公开(公告)号：US20220372612A1

公开(公告)日：2022-11-24

申请号：US17663549

申请日：2022-05-16

Applicant: Applied Materials, Inc.

Inventor： PRASANNAKALLESHWARA BUDDAPPA RAMACHANDRAPPA ,  Sambhu Nath Kundu ,  Vicente M. Lim ,  Visweswaren Sivaramakrishnan ,  Subramanya P. Herle

IPC: C23C14/24 ,  C23C14/14 ,  C23C14/54

Abstract: Methods and systems for the delivery of molten metals and metal alloys at a fixed volume are provided. The system includes an evaporation system having a fluid inlet port and a fluid delivery system. The fluid delivery system includes an ampoule operable to hold a source material. The ampoule includes a fluid outlet port and a gas inlet port. The fluid delivery system further includes a fluid delivery line operable to deliver the source material to the evaporation system. The fluid delivery line includes a first end fluidly coupled with the fluid outlet port and a second end fluidly coupled to the fluid inlet port. The fluid delivery line further includes a first isolation valve disposed along the fluid delivery line and a second isolation valve disposed along the fluid delivery line which define a fixed volume of the fluid delivery line.

公开(公告)号：US11180849B2

公开(公告)日：2021-11-23

申请号：US16546170

申请日：2019-08-20

Applicant: Applied Materials, Inc.

Inventor： Subramanya P. Herle ,  Vicente M. Lim ,  Basavaraj Pattanshetty ,  Ajay More ,  Marco Mohr ,  Bjoern Sticksel-Weis ,  Nilesh Chimanrao Bagul ,  Visweswaren Sivaramakrishnan

IPC: C23C16/455 ,  C23C16/448 ,  C23C14/24 ,  C23C16/50 ,  C23C14/08

Abstract: An apparatus for direct liquid injection (DLI) of chemical precursors into a processing chamber is provided. The apparatus includes a vaporizer assembly having an injection valve for receiving a liquid reactant, vaporizing the liquid reactant, and delivering the vaporized liquid reactant. The injection valve includes a valve body encompassing an interior region therein, a gas inlet port, a liquid inlet port, and a vapor outlet port all in fluid communication with the interior region. The vaporizer assembly further includes a first inlet line having a first end fluidly coupled with the liquid inlet port and a second end to be connected to a liquid source. The vaporizer assembly further includes a second inlet line with a first end fluidly coupled with the gas inlet port, a second end fluidly coupled with a carrier gas source, and a heater positioned between the first end and the second end.