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公开(公告)号：US20230128094A1
公开(公告)日：2023-04-27
申请号：US17971511
申请日：2022-10-21
Applicant: Applied Materials, Inc.
Inventor： Brian Hayes Burrows , Sekar Krishnasamy , Ayyanagouda Raravi , Monika Mudalkar , Govindraj Desai , Hemantha Kumar Raju , Basavaraj Pattanshetty , David Masayuki Ishikawa , Visweswaren Sivaramakrishnan , Shrikant Swaminathan , Mario Cambron , Robert Navasca , Miaojun Wang , Jonathan Frankel
Abstract: A reactor for coating particles includes a rotatable reactor assembly includes a reactor drum configured to hold a plurality of particles to be coated, an inlet tube, and an outlet tube. The drum includes a cylindrical tube, and an inlet-side endplate secured to cover an inlet-side opening of the cylindrical tube and/or an outlet-side endplate secured to cover an outlet-side opening of the cylindrical tube. A stationary gas inlet line is coupled to the inlet tube by a rotary inlet seal, a stationary gas outlet line is coupled to the outlet tube by a rotary outlet seal, and a motor rotates the rotatable reactor assembly. The inlet tube is releasably mechanically secured to the inlet-side endplate and the outlet tube is releasably mechanically secured to the outlet-side endplate.
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公开(公告)号：US20230127489A1
公开(公告)日：2023-04-27
申请号：US17971504
申请日：2022-10-21
Applicant: Applied Materials, Inc.
Inventor： Brian Hayes Burrows , Sekar Krishnasamy , Ayyanagouda Raravi , Monika Mudalkar , Govindraj Desai , Hemantha Kumar Raju , Basavaraj Pattanshetty , David Masayuki Ishikawa , Visweswaren Sivaramakrishnan , Shrikant Swaminathan , Mario Cambron , Robert Navasca , Miaojun Wang , Jonathan Frankel
Abstract: A reactor for coating particles includes a rotatable reactor assembly including a drum configured to hold a plurality of particles to be coated, an inlet tube, and an outlet tube, a stationary gas inlet line coupled to the inlet tube by a rotary inlet seal, a stationary gas outlet line coupled to the outlet tube by a rotary outlet seal, and a motor to rotate the rotatable reactor assembly.
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公开(公告)号：US20230132290A1
公开(公告)日：2023-04-27
申请号：US17971516
申请日：2022-10-21
Applicant: Applied Materials, Inc.
Inventor： Brian Hayes Burrows , Sekar Krishnasamy , Ayyanagouda Raravi , Monika Mudalkar , Govindraj Desai , Hemantha Kumar Raju , Basavaraj Pattanshetty , David Masayuki Ishikawa , Visweswaren Sivaramakrishnan , Shrikant Swaminathan , Mario Cambron , Robert Navasca , Miaojun Wang , Jonathan Frankel
IPC: C23C16/458 , C23C16/44 , C23C16/455
Abstract: A deposition system includes an isolator or fume hood and a reactor for coating particles, the reactor including a rotatable reactor assembly positioned within the isolator or fume hood and including a reactor drum configured to hold a plurality of particles to be coated, an inlet tube, and an outlet tube. The reactor drum is configured to be detached from the inlet tube and the outlet tube by an operator while the reactor drum remains within the isolator or fume hood.
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公开(公告)号：US11180849B2
公开(公告)日：2021-11-23
申请号：US16546170
申请日：2019-08-20
Applicant: Applied Materials, Inc.
Inventor： Subramanya P. Herle , Vicente M. Lim , Basavaraj Pattanshetty , Ajay More , Marco Mohr , Bjoern Sticksel-Weis , Nilesh Chimanrao Bagul , Visweswaren Sivaramakrishnan
IPC: C23C16/455 , C23C16/448 , C23C14/24 , C23C16/50 , C23C14/08
Abstract: An apparatus for direct liquid injection (DLI) of chemical precursors into a processing chamber is provided. The apparatus includes a vaporizer assembly having an injection valve for receiving a liquid reactant, vaporizing the liquid reactant, and delivering the vaporized liquid reactant. The injection valve includes a valve body encompassing an interior region therein, a gas inlet port, a liquid inlet port, and a vapor outlet port all in fluid communication with the interior region. The vaporizer assembly further includes a first inlet line having a first end fluidly coupled with the liquid inlet port and a second end to be connected to a liquid source. The vaporizer assembly further includes a second inlet line with a first end fluidly coupled with the gas inlet port, a second end fluidly coupled with a carrier gas source, and a heater positioned between the first end and the second end.
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