公开(公告)号：US12302641B2

公开(公告)日：2025-05-13

申请号：US17636998

申请日：2019-09-23

Applicant: Applied Materials, Inc.

Inventor： Chung-Shin Kang ,  Thomas L. Laidig ,  Yinfeng Dong ,  Yao-Cheng Yang ,  Chen-Chien Hung ,  Shivaraj Gururaj Kamalapura ,  Tsaichuan Kao

IPC: G06F30/398 ,  G03F7/00 ,  H10D89/10

Abstract: A digital pattern generation system comprises a memory and a controller. The controller is coupled the memory and is configured to remove redundant cells from a digital pattern file, generate a first updated digital pattern file and compare the first updated digital pattern file with the digital pattern file. Further a number of vertexes of a first arc of the first updated digital pattern file is reduced to generate a second updated digital pattern file. Additionally, a first cell of the second updated digital pattern file is replaced with an alternative version of the first cell to generate a third updated digital pattern file. Further, one or more polygons within the third updated digital pattern file is converted to one or more quad polygons to generate an optimized digital pattern file.

公开(公告)号：US11906905B2

公开(公告)日：2024-02-20

申请号：US17767020

申请日：2019-11-15

Applicant: Applied Materials, Inc.

Inventor： Chung-Shin Kang ,  Yinfeng Dong ,  Rick R. Hung ,  Yao Cheng Yang ,  Tsaichuan Kao

IPC: G03F7/20 ,  G03F7/00

CPC classification number: G03F7/70433 ,  G03F7/70508

Abstract: A verification device for verifying a design file for digital lithography comprises a memory and a controller. The memory comprises the design file. The controller is configured to access the design file and apply one or more compliance rules to the design file to determine compliance of the design file. The compliance rules comprises at least one of detecting non-orthogonal edges within the design file, detecting non-compliant overlapping structures within the design file, and detecting a non-compliant interaction between a reference layer of the design file and a target layer of the design file. The controller is further configured to verify the design file in response to a comparison of a number of non-orthogonal edges, non-compliant overlapping structures and non-compliant interactions to a threshold.