公开(公告)号：US20030210402A1

公开(公告)日：2003-11-13

申请号：US10353754

申请日：2003-01-28

Applicant: Applied Materials Israel Ltd.

Inventor： Alexander Libinson ,  Haim Feldman ,  Daniel Some ,  Boris Goldberg

IPC: G01B009/02

CPC classification number: G02B21/14 ,  G01N21/95607

Abstract: Apparatus for optical assessment of a sample includes a radiation source, adapted to generate a beam of coherent radiation, and traveling lens optics, adapted to focus the beam so as to generate first and second spots on a surface of the sample and to scan the spots together over the surface. The distance between the first and second spots is responsive to a pitch of a repetitive pattern of the sample. Collection optics are positioned to collect the radiation scattered from the first and second spots and to focus the collected radiation so as to generate an interference pattern. A detector detects a change in the interference pattern.

Abstract translation: 用于光学评估样本的装置包括适于产生相干辐射束的辐射源和适用于聚焦光束的行进透镜光学器件，以便在样品的表面上产生第一和第二斑点并扫描斑点 一起在表面。 第一和第二点之间的距离响应于样品的重复图案的间距。 收集光学器件被定位成收集从第一和第二点散射的辐射并聚焦所收集的辐射，以便产生干涉图案。 检测器检测干涉图案的变化。

公开(公告)号：US20040007659A1

公开(公告)日：2004-01-15

申请号：US10192220

申请日：2002-07-09

Applicant: Applied Materials Israel Ltd

Inventor： Haim Feldman ,  Boris Golberg ,  Alexander Libinson

IPC: G02B007/04 ,  G02B027/40

CPC classification number: G02B7/34

Abstract: An apparatus and method for focus error detection operable to receive light reflected from an inspected object and to determine a focus error on a surface of the inspected object, the focus error detection apparatus including optics and at least one detection apparatus, whereas the optics and the at least one detection apparatus define at least a first focus error detection path and a second focus error detection path, the first focus error detection path detects focus errors with a greater sensitivity than the second focus error detection path, while the second focus error detection path detects focus errors over a greater focus error range than the first focus error detection path.

Abstract translation: 一种用于聚焦误差检测的装置和方法，其可操作以接收从检查对象反射的光并确定被检查对象的表面上的聚焦误差，所述聚焦误差检测装置包括光学元件和至少一个检测装置，而光学元件和 至少一个检测装置限定至少第一聚焦误差检测路径和第二聚焦误差检测路径，第一聚焦误差检测路径以比第二聚焦误差检测路径更大的灵敏度检测聚焦误差，而第二聚焦误差检测路径 在比第一个聚焦误差检测路径更大的聚焦误差范围内检测到聚焦误差。