公开(公告)号：US20040027563A1

公开(公告)日：2004-02-12

申请号：US10215972

申请日：2002-08-08

Applicant: Applied Materials Israel Ltd.

Inventor： Emanuel Elyasaf ,  Haim Feldman ,  Simon Yalov ,  Eitan Lahat

IPC: G01N021/88

CPC classification number: G01N21/8806 ,  G01N21/956

Abstract: Inspection system and method for high-throughput inspection, the system and method is capable to generate and sense transmitted and/or reflected short duration beams. According to one embodiment of the invention the transmitted and reflected short duration beams are generated and sensed simultaneously thus provide a reflected image and a transmitted image simultaneously. The reflected and transmitted short duration radiation beams are manipulated either in the frequency domain or are distinctly polarized such that they are directed to the appropriate area sensors. According to another aspect of the invention the system changes the manipulation of a short duration beam of radiation to selectively direct the short duration beam to distinct area sensors.

Abstract translation: 用于高通量检测的检测系统和方法，该系统和方法能够产生和感测传输和/或反射的短持续时间波束。 根据本发明的一个实施例，同时产生和感测发射和反射的短持续时间波束，同时提供反射图像和透射图像。 反射和发射的短持续时间的辐射束在频域中被操纵或被明显极化，使得它们被引导到适当的区域传感器。 根据本发明的另一方面，系统改变对短持续时间的射束的操纵，以选择性地将短持续时间的射束引导到不同的区域传感器。

公开(公告)号：US20030210402A1

公开(公告)日：2003-11-13

申请号：US10353754

申请日：2003-01-28

Applicant: Applied Materials Israel Ltd.

Inventor： Alexander Libinson ,  Haim Feldman ,  Daniel Some ,  Boris Goldberg

IPC: G01B009/02

CPC classification number: G02B21/14 ,  G01N21/95607

Abstract: Apparatus for optical assessment of a sample includes a radiation source, adapted to generate a beam of coherent radiation, and traveling lens optics, adapted to focus the beam so as to generate first and second spots on a surface of the sample and to scan the spots together over the surface. The distance between the first and second spots is responsive to a pitch of a repetitive pattern of the sample. Collection optics are positioned to collect the radiation scattered from the first and second spots and to focus the collected radiation so as to generate an interference pattern. A detector detects a change in the interference pattern.

Abstract translation: 用于光学评估样本的装置包括适于产生相干辐射束的辐射源和适用于聚焦光束的行进透镜光学器件，以便在样品的表面上产生第一和第二斑点并扫描斑点 一起在表面。 第一和第二点之间的距离响应于样品的重复图案的间距。 收集光学器件被定位成收集从第一和第二点散射的辐射并聚焦所收集的辐射，以便产生干涉图案。 检测器检测干涉图案的变化。

公开(公告)号：US20040246474A1

公开(公告)日：2004-12-09

申请号：US10423353

申请日：2003-04-25

Applicant: Applied Materials Israel Ltd

Inventor： Avishay Guetta ,  Haim Feldman ,  Ron Naftali ,  Doron Shoham

IPC: G01N021/00

CPC classification number: G01N21/9501 ,  G01N21/8422 ,  G01N21/8806

Abstract: A system and method for inspection of a substrate having a first refractive index, the method including the steps of: (i) defining an apodization scheme in response to a characteristic of the layer; (ii) applying an apodizer to apodize a beam of radiation in response to the apodization scheme; (iii) directing the apodized beam of radiation to impinge on the substrate, whereby a plurality of rays are reflected from the substrate; whereas the apodized beam of radiation propagates through an at least partially transparent medium having a third refractive index and an at least partially transparent layer having a second refractive index and is subsequently reflected from the substrate; whereas the second refractive index differs from the first refractive index and from the third refractive index; and (iv) detecting at least some of the plurality of reflected rays.

Abstract translation: 一种用于检查具有第一折射率的衬底的系统和方法，所述方法包括以下步骤：（i）响应于所述层的特性定义变迹方案; （ii）响应于变迹方案应用变迹器来变形辐射束; （iii）引导变迹的辐射束照射到衬底上，由此多个射线从衬底反射; 而变迹的辐射束通过具有第三折射率的至少部分透明的介质和具有第二折射率的至少部分透明的层传播，并随后从基底反射; 而第二折射率与第一折射率和第三折射率不同; 和（iv）检测所述多个反射光线中的至少一些。

公开(公告)号：US20030214723A1

公开(公告)日：2003-11-20

申请号：US10151363

申请日：2002-05-16

Applicant: Applied Materials Israel Ltd

Inventor： Haim Feldman

IPC: G02B027/10

CPC classification number: G02B3/005 ,  G02B3/0056 ,  G02B3/0062 ,  G02B26/105 ,  G02B27/46 ,  G03F7/70616

Abstract: A scanning angle expander that includes a converting optics for receiving an input beam, the input beam being inclined with respect with an optical axis of the converting optics by an input scan angle, and for converting the input beam to multiple output beamlets, each output beamlet being inclined with respect to the optical axis of the converting optics by an output scan angle; and expanding optics, for converting the multiple output beamlets to an output beam that is substantially parallel to the output beamlets, whereas the output beam and the input beam have substantially a same size.

Abstract translation: 一种扫描角扩展器，其包括用于接收输入光束的转换光学器件，所述输入光束相对于所述转换光学器件的光轴以输入扫描角度倾斜，并且用于将所述输入光束转换成多个输出子束，每个输出光束 相对于转换光学器件的光轴倾斜输出扫描角; 以及扩展光学器件，用于将多个输出子束转换成基本上平行于输出子束的输出光束，而输出光束和输入光束具有基本上相同的大小。

公开(公告)号：US20040119001A1

公开(公告)日：2004-06-24

申请号：US10327534

申请日：2002-12-19

Applicant: Applied Materials Israel Ltd

Inventor： Gilad Almogy ,  Haim Feldman

IPC: H01J003/14 ,  H01J005/16

CPC classification number: G01N21/8806 ,  G02B26/10

Abstract: A method for imaging and an imaging system, the system includes the steps of: (i) scanning a beam of coherent radiation over a surface along a scan axis; (ii) focusing the beam to a spot on the surface, so that the spot has a predetermined dimension along the scan axis; (iii) spreading the beam laterally while scanning the beam, so that the beam covers an area substantially wider than the predetermined dimension in a direction transverse to the scan axis; and (iii) capturing the radiation scattered from the surface while scanning the beam, so as to form an image of the surface.

Abstract translation: 一种用于成像和成像系统的方法，所述系统包括以下步骤：（i）沿着扫描轴在表面上扫描相干辐射束; （ii）将光束聚焦到表面上的光斑，使得光点沿扫描轴具有预定尺寸; （iii）在扫描光束的同时横向扩散光束，使得光束在横向于扫描轴线的方向上覆盖基本上比预定尺寸宽的区域; 和（iii）在扫描光束时捕获从表面散射的辐射，以便形成表面的图像。

公开(公告)号：US20040042014A1

公开(公告)日：2004-03-04

申请号：US10232093

申请日：2002-08-29

Applicant: Applied Materials Israel Ltd.

Inventor： Haim Feldman

IPC: G01B009/02

CPC classification number: G01B9/02081 ,  G01B9/02003 ,  G01B2290/45 ,  G01B2290/70 ,  G01N21/8851 ,  G01N21/9501 ,  G01N21/95607

Abstract: A method for optical evaluation of a sample includes scanning a beam of coherent radiation over the sample, whereby the radiation is scattered from the sample, while directing a portion of the scanning beam toward a diffraction grating so that the portion of the beam is scanned over the grating, whereby a frequency-shifted reference beam is diffracted from the grating. The scattered radiation and the frequency-shifted reference beam are combined at a detector to generate an optical heterodyne signal.

Abstract translation: 用于光学评估样品的方法包括扫描样品上的相干辐射束，由此辐射从样品中散射，同时将扫描光束的一部分朝向衍射光栅引导，使得光束的该部分被扫描 光栅，由此频移参考光束从光栅衍射。 散射辐射和频移参考光束在检测器处组合以产生光学外差信号。

公开(公告)号：US20040007659A1

公开(公告)日：2004-01-15

申请号：US10192220

申请日：2002-07-09

Applicant: Applied Materials Israel Ltd

Inventor： Haim Feldman ,  Boris Golberg ,  Alexander Libinson

IPC: G02B007/04 ,  G02B027/40

CPC classification number: G02B7/34

Abstract: An apparatus and method for focus error detection operable to receive light reflected from an inspected object and to determine a focus error on a surface of the inspected object, the focus error detection apparatus including optics and at least one detection apparatus, whereas the optics and the at least one detection apparatus define at least a first focus error detection path and a second focus error detection path, the first focus error detection path detects focus errors with a greater sensitivity than the second focus error detection path, while the second focus error detection path detects focus errors over a greater focus error range than the first focus error detection path.

Abstract translation: 一种用于聚焦误差检测的装置和方法，其可操作以接收从检查对象反射的光并确定被检查对象的表面上的聚焦误差，所述聚焦误差检测装置包括光学元件和至少一个检测装置，而光学元件和 至少一个检测装置限定至少第一聚焦误差检测路径和第二聚焦误差检测路径，第一聚焦误差检测路径以比第二聚焦误差检测路径更大的灵敏度检测聚焦误差，而第二聚焦误差检测路径 在比第一个聚焦误差检测路径更大的聚焦误差范围内检测到聚焦误差。