公开(公告)号：US11049704B1

公开(公告)日：2021-06-29

申请号：US16879105

申请日：2020-05-20

Applicant: APPLIED MATERIALS ISRAEL LTD.

Inventor： Irit Ruach-Nir ,  Michal Eilon ,  Guy Eytan ,  Magen Yaacov Schulman ,  Sven Ruhle ,  Manuel Radek ,  Igor Krivts (Krayvitz)

IPC: H01J49/00 ,  H01J49/04 ,  H01J49/28

Abstract: A cleanliness monitor, an evaluation system and a method. The cleanliness monitor may include: a first vacuum chamber, a second vacuum chamber, a molecule collector, a release unit, a mass spectrometer, a manipulator that may be configured to move the molecule collector from the first position to the second position, and an analyzer. The mass spectrometer may have a line of sight to an inner space of the second vacuum chamber. The mass spectrometer may be configured to monitor the inner space of the second vacuum chamber and to generate detection signals that are indicative of a content of the inner space of the second vacuum chamber. A first subset of the detection signals may be indicative of a presence of the at least subset of released organic molecules. The analyzer may be configured to determine, based on the detection signals, the cleanliness of at least one out of (a) the first vacuum chamber, and (b) a tested vacuum chamber. The tested vacuum chamber is fluidly coupled to the first vacuum chamber.

公开(公告)号：US10217621B2

公开(公告)日：2019-02-26

申请号：US15653299

申请日：2017-07-18

Applicant: APPLIED MATERIALS ISRAEL LTD.

Inventor： Irit Ruach-Nir ,  Michal Eilon ,  Guy Eytan ,  Magen Yaacov Schulman

IPC: H01J49/04 ,  H01L21/67 ,  H01J49/00

Abstract: A cleanliness monitor for monitoring a cleanliness of a vacuum chamber. The cleanliness monitor may include a mass spectrometer, a molecule aggregation and release unit and an analyzer. The molecule aggregation and release unit is configured to (a) aggregate, during an aggregation period, organic molecules that are present in the vacuum chamber and (b) induce, during a release period, a release of a subset of the organic molecules towards the mass spectrometer. The mass spectrometer is configured to monitor an environment within the vacuum chamber and to generate detection signals indicative of a content of the environment; wherein a first subset of the detection signals is indicative of a presence of the subset of the organic molecules. The analyzer is configured to determine the cleanliness of the vacuum chamber based on the detection signals.

公开(公告)号：US10910204B2

公开(公告)日：2021-02-02

申请号：US16576588

申请日：2019-09-19

Applicant: Applied Materials Israel Ltd.

Inventor： Irit Ruach-Nir ,  Michal Eilon ,  Guy Eytan ,  Magen Yaacov Schulman

IPC: H01J49/04 ,  H01J37/18 ,  H01J49/00

Abstract: A cleanliness monitor for monitoring a cleanliness of a vacuum chamber. The cleanliness monitor may include a mass spectrometer, a molecule aggregation and release unit and an analyzer. The molecule aggregation and release unit is configured to (a) aggregate, during an aggregation period, organic molecules that are present in the vacuum chamber and (b) induce, during a release period, a release of a subset of the organic molecules towards the mass spectrometer. The mass spectrometer is configured to monitor an environment within the vacuum chamber and to generate detection signals indicative of a content of the environment; wherein a first subset of the detection signals is indicative of a presence of the subset of the organic molecules. The analyzer is configured to determine the cleanliness of the vacuum chamber based on the detection signals.

公开(公告)号：US20200013603A1

公开(公告)日：2020-01-09

申请号：US16576588

申请日：2019-09-19

Applicant: Applied Materials Israel Ltd.

Inventor： Irit Ruach-Nir ,  Michal Jacobon-Eilon ,  Guy Eytan ,  Magen Yaacov Schulman

IPC: H01J49/04 ,  H01J49/00

Abstract: A cleanliness monitor for monitoring a cleanliness of a vacuum chamber. The cleanliness monitor may include a mass spectrometer, a molecule aggregation and release unit and an analyzer. The molecule aggregation and release unit is configured to (a) aggregate, during an aggregation period, organic molecules that are present in the vacuum chamber and (b) induce, during a release period, a release of a subset of the organic molecules towards the mass spectrometer. The mass spectrometer is configured to monitor an environment within the vacuum chamber and to generate detection signals indicative of a content of the environment; wherein a first subset of the detection signals is indicative of a presence of the subset of the organic molecules. The analyzer is configured to determine the cleanliness of the vacuum chamber based on the detection signals.