公开(公告)号：US11448601B2

公开(公告)日：2022-09-20

申请号：US16885785

申请日：2020-05-28

Applicant: Applied Materials Israel Ltd.

Inventor： Boris Golberg ,  Roman Naidis

IPC: G01N21/88 ,  G02B21/08 ,  G02B5/20 ,  G01N21/95

Abstract: A method and a system for obtaining information from a sample. The system may include (i) a spatial filter that includes a blocking element and an aperture; (ii) an illumination unit; and (iii) an optical unit that includes an optical objective assembly. The illumination unit may be configured to illuminate the optical objective assembly with oblique radiation. The optical objective assembly may be configured to (a) focus the oblique radiation onto the sample, (b) collect radiation from the sample to provide collected radiation, and (c) reflect the oblique radiation to provide back reflected radiation. The optical unit may be configured to (a) focus the collected radiation to provide focused collected radiation, (b) direct the focused collection radiation towards the aperture, (c) focus the back reflected radiation to provide focused back reflected radiation, and (d) direct the focused back reflected radiation towards the blocking element.

公开(公告)号：US20130342893A1

公开(公告)日：2013-12-26

申请号：US13923086

申请日：2013-06-20

Applicant: APPLIED MATERIALS ISRAEL, LTD.

Inventor： Haim Feldman ,  Boris Morgenstein ,  Roman Naidis ,  Adam Baer

IPC: G02F1/29

CPC classification number: G02F1/29 ,  G01N21/8806 ,  G01N21/9501 ,  G02F1/11 ,  G02F2001/294

Abstract: An inspection system includes a first focusing unit configured to perform fast focus changes to a first focusing function applied to an incident light beam. A traveling lens acousto-optic device is arranged to receive the light beam focused by the first focusing function and produce focused spots using a plurality of traveling lenses generated in response to radio frequency signals. The traveling lenses apply a second focusing function and the traveling lens acousto-optic device is arranged to alter the second focusing function at a fast rate. The inspection system also includes optics arranged to direct the focused spots onto an inspected object and to direct radiation from the inspected object to a sensor.

Abstract translation: 检查系统包括被配置为对应用于入射光束的第一聚焦功能执行快速聚焦改变的第一聚焦单元。 移动透镜声光装置被布置成接收由第一聚焦功能聚焦的光束，并且使用响应于射频信号产生的多个行进透镜产生聚焦点。 行进透镜应用第二聚焦功能，并且行进透镜声光装置被布置成以快速的速度改变第二聚焦功能。 检查系统还包括被布置成将聚焦点引导到被检查对象并将来自被检查对象的辐射引导到传感器的光学系统。

公开(公告)号：US20210372936A1

公开(公告)日：2021-12-02

申请号：US16885785

申请日：2020-05-28

Applicant: Applied Materials Israel Ltd.

Inventor： Boris Golberg ,  Roman Naidis

IPC: G01N21/88 ,  G01N21/95 ,  G02B5/20 ,  G02B21/08

Abstract: A method and a system for obtaining information from a sample. The system may include (i) a spatial filter that includes a blocking element and an aperture; (ii) an illumination unit; and (iii) an optical unit that includes an optical objective assembly. The illumination unit may be configured to illuminate the optical objective assembly with oblique radiation. The optical objective assembly may be configured to (a) focus the oblique radiation onto the sample, (b) collect radiation from the sample to provide collected radiation, and (c) reflect the oblique radiation to provide back reflected radiation. The optical unit may be configured to (a) focus the collected radiation to provide focused collected radiation, (b) direct the focused collection radiation towards the aperture, (c) focus the back reflected radiation to provide focused back reflected radiation, and (d) direct the focused back reflected radiation towards the blocking element.

公开(公告)号：US08659754B2

公开(公告)日：2014-02-25

申请号：US13923086

申请日：2013-06-20

Applicant: Applied Materials Israel, Ltd.

Inventor： Haim Feldman ,  Boris Morgenstein ,  Roman Naidis ,  Adam Baer

IPC: G01N21/00

CPC classification number: G02F1/29 ,  G01N21/8806 ,  G01N21/9501 ,  G02F1/11 ,  G02F2001/294

Abstract: An inspection system includes a first focusing unit configured to perform fast focus changes to a first focusing function applied to an incident light beam. A traveling lens acousto-optic device is arranged to receive the light beam focused by the first focusing function and produce focused spots using a plurality of traveling lenses generated in response to radio frequency signals. The traveling lenses apply a second focusing function and the traveling lens acousto-optic device is arranged to alter the second focusing function at a fast rate. The inspection system also includes optics arranged to direct the focused spots onto an inspected object and to direct radiation from the inspected object to a sensor.

Abstract translation: 检查系统包括被配置为对应用于入射光束的第一聚焦功能执行快速聚焦改变的第一聚焦单元。 移动透镜声光装置被布置成接收由第一聚焦功能聚焦的光束，并且使用响应于射频信号产生的多个行进透镜产生聚焦点。 行进透镜应用第二聚焦功能，并且行进透镜声光装置被布置成以快速的速度改变第二聚焦功能。 检查系统还包括被布置成将聚焦点引导到被检查对象并将来自被检查对象的辐射引导到传感器的光学系统。