公开(公告)号：US20060257669A1

公开(公告)日：2006-11-16

申请号：US10543285

申请日：2004-01-21

申请人： Arnd Ritz ,  Michael Vergöhl ,  Berno Husche

发明人： Arnd Ritz ,  Michael Vergöhl ,  Berno Husche

IPC分类号： B32B17/06 ,  B32B9/00 ,  B32B19/00 ,  C23C16/00 ,  C23C14/00

CPC分类号： C23C14/083 ,  C03C17/2456 ,  C03C17/3417 ,  C03C2217/212 ,  C03C2218/15 ,  C03C2218/155

摘要： The invention relates to a method of producing titanium oxide coatings and also to articles, in particular lamps, lights or optical elements having said coating. In order to develop a method of the generic type such that the coating with rutile is considerably simplified, and to be able to carry it out at lower process temperatures, and also to find suitable surfaces for coating in this way, the invention proposes that the coating be deposited, with the rutile structure being obtained, on the surface of the substrate that is to be coated, at an oxygen partial pressure p which can be defined, by sputtering, at a deposition temperature of 100 to 300° C. from a titanium target.

摘要翻译： 本发明涉及一种生产氧化钛涂层的方法，还涉及具有所述涂层的制品，特别是灯，灯或光学元件。 为了开发通用类型的方法，使得具有金红石的涂层被大大简化，并且能够在较低的工艺温度下进行涂布，并且也以这种方式找到合适的涂层表面，本发明提出， 在待涂覆的基材的表面上以可以通过溅射在100至300℃的沉积温度下从氧分压p沉积涂层，其中所述氧分压p 钛靶。