公开(公告)号：US4863240A

公开(公告)日：1989-09-05

申请号：US919317

申请日：1986-10-14

申请人： Atsunobu Nakajima ,  Seiji Hoshi ,  Hiroyoshi Yamamoto ,  Chikara Miyata ,  Ikuo Nanno ,  Shigeru Inagaki ,  Hideo Hoshi

发明人： Atsunobu Nakajima ,  Seiji Hoshi ,  Hiroyoshi Yamamoto ,  Chikara Miyata ,  Ikuo Nanno ,  Shigeru Inagaki ,  Hideo Hoshi

IPC分类号： G02B7/09 ,  G11B7/09 ,  H02K41/035

CPC分类号： G11B7/0935 ,  H02K41/0354 ,  H02K2201/18

摘要： An apparatus actuates an objective lens in axial and circumferential directions through annular magnetic gaps which are formed by yokes and a magnet. In order to retain the objective lens in the neutral position in the circumferential direction, two or four magnetic pieces are mounted on a lens mount and disposed near the circumferetial ends of the annular magnetic gaps in which the force caused by the magnetic potential energy in the magnetic gaps acts on the magnetic pieces to pull them back in the direction of the magnetic gaps so that a magnetic spring for retaining the objective lens at the neutral position is formed by the magnetic pieces.

摘要翻译： 设备通过由轭和磁体形成的环形磁隙在轴向和圆周方向上致动物镜。 为了将物镜保持在圆周方向的中立位置，两个或四个磁性片被安装在透镜座上并设置在环形磁隙的圆周端附近，其中由磁场能量引起的力 磁隙作用在磁性片上，以将它们沿磁隙的方向拉回，使得用于将物镜保持在中立位置的磁性弹簧由磁性片形成。

公开(公告)号：US4921346A

公开(公告)日：1990-05-01

申请号：US246359

申请日：1988-09-19

申请人： Hiroshi Tokumoto ,  Hiroshi Bando ,  Fumiki Sakai ,  Chikara Miyata ,  Shigeru Wakiyama

发明人： Hiroshi Tokumoto ,  Hiroshi Bando ,  Fumiki Sakai ,  Chikara Miyata ,  Shigeru Wakiyama

IPC分类号： G01N21/00 ,  G01B7/34 ,  G01H11/06 ,  G01N21/31 ,  G01N23/00 ,  G01N27/00 ,  G01N29/00 ,  G01Q70/00

CPC分类号： G01Q60/16 ,  B82Y35/00 ,  G01Q10/06 ,  G01Q30/02

摘要： The amount of deformations such as expansions or contractions of a substance caused in accordance with irradiation of cyclically interrupted monochromatic light is detected by either the changes in a tunnel current sensitive to the changing distance between a sample surface and a detection probe or the amount of changes in a probe fine feed mechanism keeping the tunnel current constant between a sample surface and a detection probe at all times, so that the absorption spectrum intrinsic to the substance relative to the irradiating optical energy according to its wavelength is measured to examine the optical properties of the substance.

摘要翻译： 通过对样品表面和检测探针之间的变化距离敏感的隧道电流的变化或变化量来检测根据循环中断的单色光的照射引起的物质的膨胀或收缩的变形量 在探针精细进给机构中，始终保持样品表面和检测探针之间的隧道电流恒定，从而测量物质相对于根据其波长的照射光能所固有的吸收光谱，以检查物质的光学性质 物质。

公开(公告)号：US4999495A

公开(公告)日：1991-03-12

申请号：US399910

申请日：1989-08-29

申请人： Chikara Miyata ,  Masatoshi Yasutake ,  Hiroshi Ishijima

发明人： Chikara Miyata ,  Masatoshi Yasutake ,  Hiroshi Ishijima

IPC分类号： G01Q10/04 ,  G01Q30/02 ,  G01Q60/10 ,  G01Q60/16

CPC分类号： G01Q60/16 ,  B82Y35/00 ,  G01Q30/025 ,  Y10S977/872

摘要： In a tunneling unit of a scanning tunneling microscope (STM), a rough feed mechanism for approaching a sample and a probe to a tunnel area is disposed separately (or is provided to a stage on a sample side, for example), a fine movement element block is formed as a separate unit and the tunnel unit main body is made compact and provided with high rigidity so that it can be mounted to an optical microscope or a laser microscope. If the fine movement element block of the tunnel unit is mounted to a revolver of an optical microscope or the like, rotation positioning accuracy of the revolver is a few microns. Therefore, high precision positioning of the position to be observed by STM can be attained by optical means and measurement having high resolution in an nm order can be conducted by use of STM. Since STM can be mounted to an existing apparatus in accordance with the present invention, measurement accuracy can be improved drastically and the invention is extremely useful industrially.

摘要翻译： 在扫描隧道显微镜（STM）的隧道单元中，将用于将样品和探针接近通道区域的粗略进给机构分开设置（例如，设置在样品侧的台面上），精细运动 元件块形成为单独的单元，并且隧道单元主体被制造成紧凑并且具有高刚性，使得其可以安装到光学显微镜或激光显微镜。 如果隧道单元的微细移动元件块安装在光学显微镜等的左轮手枪上，则左轮的旋转定位精度为几微米。 因此，可以通过光学装置实现STM观察到的位置的高精度定位，并且可以通过使用STM来进行具有nm分辨率的高分辨率的测量。 由于STM可以安装到根据本发明的现有设备中，因此可以大大提高测量精度，并且本发明在工业上是非常有用的。