公开(公告)号：US20120298220A1

公开(公告)日：2012-11-29

申请号：US13483328

申请日：2012-05-30

申请人： Atsushi HIDAKA ,  Masaaki NAGASE ,  Ryousuke DOHI ,  Nobukazu IKEDA ,  Kouji NISHINO

发明人： Atsushi HIDAKA ,  Masaaki NAGASE ,  Ryousuke DOHI ,  Nobukazu IKEDA ,  Kouji NISHINO

IPC分类号： F16K17/00

CPC分类号： G01F1/363 ,  G01F15/024 ,  G05D7/0635 ,  Y10T137/7737 ,  Y10T137/776 ,  Y10T137/7761

摘要： A pressure type flow rate control device provides flow rate control for gas at 100-500° C. with an error not more than 1.0% F.S. The pressure type flow rate control device includes a valve body with a fluid passage, a valve portion interposed in the passage, a valve drive unit driving the valve portion to open/close the passage, a restriction mechanism on the downstream side of the valve portion in the passage, a temperature detector detecting gas temperature between the valve portion and restriction mechanism, a pressure detector detecting gas pressure between the valve portion and restriction mechanism, and an arithmetic control device controlling flow rate of gas in the restriction mechanism based on values detected by the temperature detector and the pressure detector, wherein the temperature detector is inserted in an attachment hole of the valve body at a position just above an outlet side fluid passage.

摘要翻译： 压力式流量控制装置为100-500℃的气体提供流量控制，误差不超过1.0％F.S. 压力式流量控制装置包括具有流体通道的阀体，插入通道中的阀部分，驱动阀部分以打开/关闭通道的阀驱动单元，在阀部分的下游侧的限制机构 在通道中，检测器检测阀部分和限制机构之间的气体温度，检测阀部分和限制机构之间的气体压力的压力检测器以及根据检测到的值控制限制机构中的气体流量的算术控制装置 通过温度检测器和压力检测器，其中温度检测器被插入在阀体的安装孔中，恰好在出口侧流体通道的正上方。

公开(公告)号：US20110120566A1

公开(公告)日：2011-05-26

申请号：US12950798

申请日：2010-11-19

申请人： Tadahiro OHMI ,  Kouji NISHINO ,  Ryousuke DOHI ,  Masaaki NAGASE ,  Katsuyuki SUGITA ,  Kaoru HIRATA ,  Takashi HIROSE ,  Tsutomu SHINOHARA ,  Nobukazu IKEDA ,  Toshihide YOSHIDA ,  Hisashi TANAKA

发明人： Tadahiro OHMI ,  Kouji NISHINO ,  Ryousuke DOHI ,  Masaaki NAGASE ,  Katsuyuki SUGITA ,  Kaoru HIRATA ,  Takashi HIROSE ,  Tsutomu SHINOHARA ,  Nobukazu IKEDA ,  Toshihide YOSHIDA ,  Hisashi TANAKA

IPC分类号： F17D1/00

CPC分类号： G05D7/0635 ,  G01F1/42 ,  G01F7/005 ,  Y10T137/0379

摘要： A fluid flow rate control method is provided that uses a flow rate range variable type pressure type flow rate control device provided with at least two or more parallel fluid passages disposed between the downstream side of a control valve of the control device and a fluid supply pipe passage, and orifices having different fluid flow rate characteristics are respectively interposed in parallel fluid passages to pass fluid in a first flow rate region through one orifice for flow rate control, and to pass fluid in a second flow rate region through at least another orifice for flow rate control. Flow rate characteristics of the respective orifices are selected so that a maximum controllable flow rate of fluid in the first flow rate region at low flow rate is smaller than 10% of a maximum controllable flow rate in the second flow rate region at high flow rate.

摘要翻译： 提供了一种流体流量控制方法，其使用流量范围可变型压力型流量控制装置，该流量范围可变型压力型流量控制装置设置有至少两个或更多个平行的流体通道，该流体通道设置在控制装置的控制阀的下游侧与流体供给管 具有不同流体流速特性的通道和孔分别插入在平行的流体通道中，以使第一流量区域中的流体通过一个孔口用于流量控制，并使第二流量区域中的流体通过至少另一个孔口， 流量控制。 选择相应孔口的流量特性，使得在低流量下第一流量区域中的流体的最大可控流量小于第二流量区域在高流速下的最大可控流量的10％。

公开(公告)号：US20060207595A1

公开(公告)日：2006-09-21

申请号：US11278909

申请日：2006-04-06

申请人： Tadahiro OHMI ,  Akinobu TERAMOTO ,  Tomio UNO ,  Ryousuke DOHI ,  Kouji NISHINO ,  Osamu NAKAMURA ,  Atsushi MATSUMOTO ,  Masaaki NAGASE ,  Nobukazu IKEDA

发明人： Tadahiro OHMI ,  Akinobu TERAMOTO ,  Tomio UNO ,  Ryousuke DOHI ,  Kouji NISHINO ,  Osamu NAKAMURA ,  Atsushi MATSUMOTO ,  Masaaki NAGASE ,  Nobukazu IKEDA

IPC分类号： A62B31/00 ,  A61G10/00

CPC分类号： G05D16/208 ,  Y10T137/7761 ,  Y10T137/8741 ,  Y10T137/87507

摘要： A gas supply facility includes a plurality of pressure type flow controllers connected in parallel, and a first controller to control operation of the plurality of pressure type flow controllers so as to supply a desired gas exhausted by a vacuum pump to a chamber while controlling its flow rate, one of the pressure type flow controllers operates as a second controller to control the gas flow rate range up to 10% of the maximum flow rate supplied to the chamber, while the remaining pressure type flow controllers are made to be ones that control the rest of the gas flow rate range. Furthermore, pressure inside the chamber is controlled by installing a pressure detector in the chamber, inputting the value detected by the detector to the controller, and by adjusting a control signal to the pressure type flow controllers.

摘要翻译： 气体供给设备包括并联连接的多个压力式流量控制器和控制多个压力式流量控制器的操作的第一控制器，以便在控制其流动的同时将由真空泵排出的期望气体供应到腔室 压力型流量控制器中的一个作为第二控制器操作，以将气体流量范围控制在高达供应给腔室的最大流速的10％，而剩余的压力式流量控制器被制成控制 剩余的气体流量范围。 此外，通过在室内安装压力检测器，将检测器检测到的值输入到控制器，并通过调节压力型流量控制器的控制信号来控制室内的压力。

公开(公告)号：US20130000737A1

公开(公告)日：2013-01-03

申请号：US13239715

申请日：2011-09-22

申请人： Tadahiro OHMI ,  Kouji NISHINO ,  Masaaki NAGASE ,  Ryousuke DOHI ,  Nobukazu IKEDA ,  Ryutaro NISHIMURA

发明人： Tadahiro OHMI ,  Kouji NISHINO ,  Masaaki NAGASE ,  Ryousuke DOHI ,  Nobukazu IKEDA ,  Ryutaro NISHIMURA

IPC分类号： F16K47/02

CPC分类号： F16K47/02 ,  Y10T137/0324 ,  Y10T137/0396 ,  Y10T137/7761 ,  Y10T137/7762 ,  Y10T137/7842 ,  Y10T137/86389 ,  Y10T137/86397 ,  Y10T137/86461

摘要： The water hammerless opening device comprises an actuator operating type valve installed on the fluid passage, an electro-pneumatic conversion device to supply the 2-step actuator operating pressure Pa to the afore-mentioned actuator operating type valve, a vibration sensor removably fixed to the pipe passage on the upstream side of the actuator operating type valve, and a tuning box to which the vibration detecting signal Pr detected by the vibration sensor is inputted, through which the control signal Sc to control the step operating pressure Ps′ of the afore-mentioned 2-step actuator operating pressure Pa is outputted to the electro-pneumatic conversion device, and with which the 2-step actuator operating pressure Pa, of the step operating pressure Ps′ which makes the vibration detecting signal Pr nearly zero, is outputted from the electro-pneumatic conversion by adjusting the control signal Sc.

摘要翻译： 无水锤打开装置包括安装在流体通道上的致动器操作型阀，向上述致动器操作型阀提供2级致动器操作压力Pa的电动气动转换装置，可拆卸地固定到 在致动器操作型阀的上游侧的管道通道和输入了由振动传感器检测到的振动检测信号Pr的调谐箱，通过该调谐箱控制控制信号Sc以控制前述的操作压力Ps' 将上述的2步执行器工作压力Pa输出到电动气动变换装置，将使振动检测信号Pr接近零的阶梯操作压力Ps'的2级致动器工作压力Pa'从 通过调节控制信号Sc进行电 - 气转换。

公开(公告)号：US20090255587A1

公开(公告)日：2009-10-15

申请号：US12422136

申请日：2009-04-10

申请人： Tadahiro OHMI ,  Kouji NISHINO ,  Masaaki NAGASE ,  Ryousuke DOHI ,  Nobukazu IKEDA ,  Ryutaro NISHIMURA

发明人： Tadahiro OHMI ,  Kouji NISHINO ,  Masaaki NAGASE ,  Ryousuke DOHI ,  Nobukazu IKEDA ,  Ryutaro NISHIMURA

IPC分类号： F16K47/02

CPC分类号： F16K47/02 ,  Y10T137/0324 ,  Y10T137/0396 ,  Y10T137/7761 ,  Y10T137/7762 ,  Y10T137/7842 ,  Y10T137/86389 ,  Y10T137/86397 ,  Y10T137/86461

摘要： The water hammerless opening device comprises an actuator operating type valve installed on the fluid passage, an electro-pneumatic conversion device to supply the 2-step actuator operating pressure Pa to the afore-mentioned actuator operating type valve, a vibration sensor removably fixed to the pipe passage on the upstream side of the actuator operating type valve, and a tuning box to which the vibration detecting signal Pr detected by the vibration sensor is inputted, through which the control signal Sc to control the step operating pressure Ps′ of the afore-mentioned 2-step actuator operating pressure Pa is outputted to the electro-pneumatic conversion device, and with which the 2-step actuator operating pressure Pa, of the step operating pressure Ps′ which makes the vibration detecting signal Pr nearly zero, is outputted from the electro-pneumatic conversion by adjusting the control signal Sc.

摘要翻译： 无水锤打开装置包括安装在流体通道上的致动器操作型阀，向上述致动器操作型阀提供2级致动器操作压力Pa的电动气动转换装置，可拆卸地固定到 在致动器操作型阀的上游侧的管道通道和输入了由振动传感器检测到的振动检测信号Pr的调谐箱，通过该调谐箱控制控制信号Sc以控制前述的操作压力Ps' 将上述的2步执行器工作压力Pa输出到电动气动变换装置，将使振动检测信号Pr接近零的阶梯操作压力Ps'的2级致动器工作压力Pa'从 通过调节控制信号Sc进行电 - 气转换。

公开(公告)号：US20070068577A1

公开(公告)日：2007-03-29

申请号：US11425028

申请日：2006-06-19

申请人： Tadahiro OHMI ,  Nobukazu IKEDA ,  Kouji NISHINO ,  Masaaki NAGASE ,  Ryousuke DOHI ,  Ryutaro NISHIMURA

发明人： Tadahiro OHMI ,  Nobukazu IKEDA ,  Kouji NISHINO ,  Masaaki NAGASE ,  Ryousuke DOHI ,  Ryutaro NISHIMURA

IPC分类号： F16K31/36 ,  F16L55/055 ,  F16K47/02

CPC分类号： F16K47/02 ,  F16K47/023 ,  F16L55/043 ,  Y10T137/0324 ,  Y10T137/0379 ,  Y10T137/0396 ,  Y10T137/7761 ,  Y10T137/86389 ,  Y10T137/86461

摘要： A fluid passage is emergently-closed in a short time without causing a water hammer by an extremely simple device and operation. A water hammerless closing device includes an actuator operated valve provided in a fluid passage, an electro-pneumatic conversion device for supplying a 2-step actuator operating pressure Pa to an actuator operated-type valve, a vibration sensor removably secured to the pipe passage on the upstream side of the actuator operated-type valve, and a tuning box receiving a vibration detection signal Pr from the vibration sensor and delivering a control signal Sc to the electro-pneumatic conversion device for controlling the step operating pressure Ps′ of the 2-step actuator operating pressure Pa so that, with the control signal Sc being regulated, the electro-pneumatic conversion device outputs the 2-step actuator operating pressure Pa with the step operating pressure Ps′ capable of bringing the vibration detection signal Pr substantially to zero.

摘要翻译： 流体通道在短时间内紧密关闭，而不会通过非常简单的装置和操作造成水锤。 无水锤关闭装置包括设置在流体通道中的致动器操作阀，用于向致动器操作型阀提供2级致动器操作压力Pa的电动气动转换装置，可拆卸地固定到管道上的振动传感器 执行器操作型阀的上游侧和从振动传感器接收振动检测信号Pr的调谐箱，并将控制信号Sc传送到电动气动转换装置，以控制2- 步进致动器操作压力Pa，使得在控制信号Sc被调节的情况下，电动气动转换装置将能够使振动检测信号Pr基本上为零的步进操作压力Ps'输出2步致动器操作压力Pa。

公开(公告)号：US20110042595A1

公开(公告)日：2011-02-24

申请号：US12852220

申请日：2010-08-06

申请人： Atsushi MATSUMOTO ,  Kaoru HIRATA ,  Ryousuke DOHI ,  Nobukazu IKEDA ,  Kouji NISHINO

发明人： Atsushi MATSUMOTO ,  Kaoru HIRATA ,  Ryousuke DOHI ,  Nobukazu IKEDA ,  Kouji NISHINO

IPC分类号： F16K31/02

CPC分类号： F16K24/04 ,  F16K7/14 ,  F16K31/004 ,  F16K31/007 ,  F16K51/02

摘要： A control valve has a body that forms a valve chamber and a valve seat, a metal diaphragm installed inside the valve chamber and making contact with and departing from the valve seat, an actuator box fixed to the side of the body, a piezoelectric element installed inside the actuator box to thrust the metal diaphragm through mediation of a metal diaphragm presser by elongating downward when voltage is applied, a conical spring mechanism that absorbs elongation of the piezoelectric element at the time when the metal diaphragm makes contact with the valve seat and a prescribed thrust is applied to the valve seat and the like, and a preload mechanism that applies upward compressive force to the piezoelectric element all the time wherein the compressive force applied to the piezoelectric element is externally adjustable.

摘要翻译： 控制阀具有形成阀室和阀座的主体，安装在阀室内部并与阀座接触和离开的金属隔膜，固定在主体侧的致动器盒，安装在压缩元件侧的压电元件 在致动器箱内部，通过金属隔膜压板的调节，通过在施加电压时向下延伸来推动金属隔膜;锥形弹簧机构，其在金属隔膜与阀座接触时吸收压电元件的伸长， 规定的推力被施加到阀座等，以及预压机构，其向压电元件施加向上的压缩力，其中施加到压电元件的压缩力是外部可调节的。