公开(公告)号：US20060207595A1

公开(公告)日：2006-09-21

申请号：US11278909

申请日：2006-04-06

申请人： Tadahiro OHMI ,  Akinobu TERAMOTO ,  Tomio UNO ,  Ryousuke DOHI ,  Kouji NISHINO ,  Osamu NAKAMURA ,  Atsushi MATSUMOTO ,  Masaaki NAGASE ,  Nobukazu IKEDA

发明人： Tadahiro OHMI ,  Akinobu TERAMOTO ,  Tomio UNO ,  Ryousuke DOHI ,  Kouji NISHINO ,  Osamu NAKAMURA ,  Atsushi MATSUMOTO ,  Masaaki NAGASE ,  Nobukazu IKEDA

IPC分类号： A62B31/00 ,  A61G10/00

CPC分类号： G05D16/208 ,  Y10T137/7761 ,  Y10T137/8741 ,  Y10T137/87507

摘要： A gas supply facility includes a plurality of pressure type flow controllers connected in parallel, and a first controller to control operation of the plurality of pressure type flow controllers so as to supply a desired gas exhausted by a vacuum pump to a chamber while controlling its flow rate, one of the pressure type flow controllers operates as a second controller to control the gas flow rate range up to 10% of the maximum flow rate supplied to the chamber, while the remaining pressure type flow controllers are made to be ones that control the rest of the gas flow rate range. Furthermore, pressure inside the chamber is controlled by installing a pressure detector in the chamber, inputting the value detected by the detector to the controller, and by adjusting a control signal to the pressure type flow controllers.

摘要翻译： 气体供给设备包括并联连接的多个压力式流量控制器和控制多个压力式流量控制器的操作的第一控制器，以便在控制其流动的同时将由真空泵排出的期望气体供应到腔室 压力型流量控制器中的一个作为第二控制器操作，以将气体流量范围控制在高达供应给腔室的最大流速的10％，而剩余的压力式流量控制器被制成控制 剩余的气体流量范围。 此外，通过在室内安装压力检测器，将检测器检测到的值输入到控制器，并通过调节压力型流量控制器的控制信号来控制室内的压力。

公开(公告)号：US20110120566A1

公开(公告)日：2011-05-26

申请号：US12950798

申请日：2010-11-19

申请人： Tadahiro OHMI ,  Kouji NISHINO ,  Ryousuke DOHI ,  Masaaki NAGASE ,  Katsuyuki SUGITA ,  Kaoru HIRATA ,  Takashi HIROSE ,  Tsutomu SHINOHARA ,  Nobukazu IKEDA ,  Toshihide YOSHIDA ,  Hisashi TANAKA

发明人： Tadahiro OHMI ,  Kouji NISHINO ,  Ryousuke DOHI ,  Masaaki NAGASE ,  Katsuyuki SUGITA ,  Kaoru HIRATA ,  Takashi HIROSE ,  Tsutomu SHINOHARA ,  Nobukazu IKEDA ,  Toshihide YOSHIDA ,  Hisashi TANAKA

IPC分类号： F17D1/00

CPC分类号： G05D7/0635 ,  G01F1/42 ,  G01F7/005 ,  Y10T137/0379

摘要： A fluid flow rate control method is provided that uses a flow rate range variable type pressure type flow rate control device provided with at least two or more parallel fluid passages disposed between the downstream side of a control valve of the control device and a fluid supply pipe passage, and orifices having different fluid flow rate characteristics are respectively interposed in parallel fluid passages to pass fluid in a first flow rate region through one orifice for flow rate control, and to pass fluid in a second flow rate region through at least another orifice for flow rate control. Flow rate characteristics of the respective orifices are selected so that a maximum controllable flow rate of fluid in the first flow rate region at low flow rate is smaller than 10% of a maximum controllable flow rate in the second flow rate region at high flow rate.

摘要翻译： 提供了一种流体流量控制方法，其使用流量范围可变型压力型流量控制装置，该流量范围可变型压力型流量控制装置设置有至少两个或更多个平行的流体通道，该流体通道设置在控制装置的控制阀的下游侧与流体供给管 具有不同流体流速特性的通道和孔分别插入在平行的流体通道中，以使第一流量区域中的流体通过一个孔口用于流量控制，并使第二流量区域中的流体通过至少另一个孔口， 流量控制。 选择相应孔口的流量特性，使得在低流量下第一流量区域中的流体的最大可控流量小于第二流量区域在高流速下的最大可控流量的10％。

公开(公告)号：US20130000737A1

公开(公告)日：2013-01-03

申请号：US13239715

申请日：2011-09-22

申请人： Tadahiro OHMI ,  Kouji NISHINO ,  Masaaki NAGASE ,  Ryousuke DOHI ,  Nobukazu IKEDA ,  Ryutaro NISHIMURA

发明人： Tadahiro OHMI ,  Kouji NISHINO ,  Masaaki NAGASE ,  Ryousuke DOHI ,  Nobukazu IKEDA ,  Ryutaro NISHIMURA

IPC分类号： F16K47/02

CPC分类号： F16K47/02 ,  Y10T137/0324 ,  Y10T137/0396 ,  Y10T137/7761 ,  Y10T137/7762 ,  Y10T137/7842 ,  Y10T137/86389 ,  Y10T137/86397 ,  Y10T137/86461

摘要： The water hammerless opening device comprises an actuator operating type valve installed on the fluid passage, an electro-pneumatic conversion device to supply the 2-step actuator operating pressure Pa to the afore-mentioned actuator operating type valve, a vibration sensor removably fixed to the pipe passage on the upstream side of the actuator operating type valve, and a tuning box to which the vibration detecting signal Pr detected by the vibration sensor is inputted, through which the control signal Sc to control the step operating pressure Ps′ of the afore-mentioned 2-step actuator operating pressure Pa is outputted to the electro-pneumatic conversion device, and with which the 2-step actuator operating pressure Pa, of the step operating pressure Ps′ which makes the vibration detecting signal Pr nearly zero, is outputted from the electro-pneumatic conversion by adjusting the control signal Sc.

摘要翻译： 无水锤打开装置包括安装在流体通道上的致动器操作型阀，向上述致动器操作型阀提供2级致动器操作压力Pa的电动气动转换装置，可拆卸地固定到 在致动器操作型阀的上游侧的管道通道和输入了由振动传感器检测到的振动检测信号Pr的调谐箱，通过该调谐箱控制控制信号Sc以控制前述的操作压力Ps' 将上述的2步执行器工作压力Pa输出到电动气动变换装置，将使振动检测信号Pr接近零的阶梯操作压力Ps'的2级致动器工作压力Pa'从 通过调节控制信号Sc进行电 - 气转换。

公开(公告)号：US20090255587A1

公开(公告)日：2009-10-15

申请号：US12422136

申请日：2009-04-10

申请人： Tadahiro OHMI ,  Kouji NISHINO ,  Masaaki NAGASE ,  Ryousuke DOHI ,  Nobukazu IKEDA ,  Ryutaro NISHIMURA

发明人： Tadahiro OHMI ,  Kouji NISHINO ,  Masaaki NAGASE ,  Ryousuke DOHI ,  Nobukazu IKEDA ,  Ryutaro NISHIMURA

IPC分类号： F16K47/02

CPC分类号： F16K47/02 ,  Y10T137/0324 ,  Y10T137/0396 ,  Y10T137/7761 ,  Y10T137/7762 ,  Y10T137/7842 ,  Y10T137/86389 ,  Y10T137/86397 ,  Y10T137/86461

摘要： The water hammerless opening device comprises an actuator operating type valve installed on the fluid passage, an electro-pneumatic conversion device to supply the 2-step actuator operating pressure Pa to the afore-mentioned actuator operating type valve, a vibration sensor removably fixed to the pipe passage on the upstream side of the actuator operating type valve, and a tuning box to which the vibration detecting signal Pr detected by the vibration sensor is inputted, through which the control signal Sc to control the step operating pressure Ps′ of the afore-mentioned 2-step actuator operating pressure Pa is outputted to the electro-pneumatic conversion device, and with which the 2-step actuator operating pressure Pa, of the step operating pressure Ps′ which makes the vibration detecting signal Pr nearly zero, is outputted from the electro-pneumatic conversion by adjusting the control signal Sc.

摘要翻译： 无水锤打开装置包括安装在流体通道上的致动器操作型阀，向上述致动器操作型阀提供2级致动器操作压力Pa的电动气动转换装置，可拆卸地固定到 在致动器操作型阀的上游侧的管道通道和输入了由振动传感器检测到的振动检测信号Pr的调谐箱，通过该调谐箱控制控制信号Sc以控制前述的操作压力Ps' 将上述的2步执行器工作压力Pa输出到电动气动变换装置，将使振动检测信号Pr接近零的阶梯操作压力Ps'的2级致动器工作压力Pa'从 通过调节控制信号Sc进行电 - 气转换。

公开(公告)号：US20070068577A1

公开(公告)日：2007-03-29

申请号：US11425028

申请日：2006-06-19

申请人： Tadahiro OHMI ,  Nobukazu IKEDA ,  Kouji NISHINO ,  Masaaki NAGASE ,  Ryousuke DOHI ,  Ryutaro NISHIMURA

发明人： Tadahiro OHMI ,  Nobukazu IKEDA ,  Kouji NISHINO ,  Masaaki NAGASE ,  Ryousuke DOHI ,  Ryutaro NISHIMURA

IPC分类号： F16K31/36 ,  F16L55/055 ,  F16K47/02

CPC分类号： F16K47/02 ,  F16K47/023 ,  F16L55/043 ,  Y10T137/0324 ,  Y10T137/0379 ,  Y10T137/0396 ,  Y10T137/7761 ,  Y10T137/86389 ,  Y10T137/86461

摘要： A fluid passage is emergently-closed in a short time without causing a water hammer by an extremely simple device and operation. A water hammerless closing device includes an actuator operated valve provided in a fluid passage, an electro-pneumatic conversion device for supplying a 2-step actuator operating pressure Pa to an actuator operated-type valve, a vibration sensor removably secured to the pipe passage on the upstream side of the actuator operated-type valve, and a tuning box receiving a vibration detection signal Pr from the vibration sensor and delivering a control signal Sc to the electro-pneumatic conversion device for controlling the step operating pressure Ps′ of the 2-step actuator operating pressure Pa so that, with the control signal Sc being regulated, the electro-pneumatic conversion device outputs the 2-step actuator operating pressure Pa with the step operating pressure Ps′ capable of bringing the vibration detection signal Pr substantially to zero.

摘要翻译： 流体通道在短时间内紧密关闭，而不会通过非常简单的装置和操作造成水锤。 无水锤关闭装置包括设置在流体通道中的致动器操作阀，用于向致动器操作型阀提供2级致动器操作压力Pa的电动气动转换装置，可拆卸地固定到管道上的振动传感器 执行器操作型阀的上游侧和从振动传感器接收振动检测信号Pr的调谐箱，并将控制信号Sc传送到电动气动转换装置，以控制2- 步进致动器操作压力Pa，使得在控制信号Sc被调节的情况下，电动气动转换装置将能够使振动检测信号Pr基本上为零的步进操作压力Ps'输出2步致动器操作压力Pa。

公开(公告)号：US20080035877A1

公开(公告)日：2008-02-14

申请号：US11762987

申请日：2007-06-14

申请人： Tadahiro OHMI ,  Nobukazu Ikeda ,  Kouji Nishino ,  Masaaki Nagase ,  Kyousuke Dohi ,  Ryutaro Nishimura

发明人： Tadahiro OHMI ,  Nobukazu Ikeda ,  Kouji Nishino ,  Masaaki Nagase ,  Kyousuke Dohi ,  Ryutaro Nishimura

IPC分类号： F16K27/00

CPC分类号： F16K47/02 ,  F16K47/023 ,  F16L55/043 ,  Y10T137/0324 ,  Y10T137/0379 ,  Y10T137/0396 ,  Y10T137/7761 ,  Y10T137/86389 ,  Y10T137/86461

摘要： A fluid passage is emergently-closed in a short time without causing a water hammer by an extremely simple device and operation. A water hammerless closing device includes an actuator operated valve provided in a fluid passage, an electro-pneumatic conversion device for supplying a 2-step actuator operating pressure Pa to an actuator operated-type valve, a vibration sensor removably secured to the pipe passage on the upstream side of the actuator operated-type valve, and a tuning box receiving a vibration detection signal Pr from the vibration sensor and delivering a control signal Sc to the electro-pneumatic conversion device for controlling the step operating pressure Ps′ of the 2-step actuator operating pressure Pa so that, with the control signal Sc being regulated, the electro-pneumatic conversion device outputs the 2-step actuator operating pressure Pa with the step operating pressure Ps′ capable of bringing the vibration detection signal Pr substantially to zero.

摘要翻译： 流体通道在短时间内紧密关闭，而不会通过非常简单的装置和操作造成水锤。 无水锤关闭装置包括设置在流体通道中的致动器操作阀，用于向致动器操作型阀提供2级致动器操作压力Pa的电动气动转换装置，可拆卸地固定到管道上的振动传感器 执行器操作型阀的上游侧和从振动传感器接收振动检测信号Pr的调谐箱，并将控制信号Sc传送到电动气动转换装置，以控制2- 步进致动器操作压力Pa，使得在控制信号Sc被调节的情况下，电动气动转换装置将能够使振动检测信号Pr基本上为零的步进操作压力Ps'输出2步致动器操作压力Pa。

公开(公告)号：US20120292743A1

公开(公告)日：2012-11-22

申请号：US13565868

申请日：2012-08-03

申请人： Tadahiro OHMI ,  Akinobu TERAMOTO ,  Tomoyuki SUWA

发明人： Tadahiro OHMI ,  Akinobu TERAMOTO ,  Tomoyuki SUWA

IPC分类号： F27B9/00 ,  H01L29/06 ,  F26B7/00

CPC分类号： H01L21/3247 ,  F27B17/0025 ,  H01L21/02052 ,  H01L21/02238 ,  H01L21/02252 ,  H01L21/302 ,  H01L21/67017 ,  H01L21/67109 ,  H01L21/67126 ,  H01L21/67757

摘要： In a silicon wafer which has a surface with a plurality of terraces formed stepwise by single-atomic-layer steps, respectively, no slip line is formed.

摘要翻译： 在具有分别通过单原子层阶梯逐步形成的多个台阶的表面的硅晶片中，不形成滑移线。

公开(公告)号：US20120308714A1

公开(公告)日：2012-12-06

申请号：US13490753

申请日：2012-06-07

申请人： Tadahiro OHMI ,  Akinobu TERAMOTO

发明人： Tadahiro OHMI ,  Akinobu TERAMOTO

IPC分类号： C23C16/44 ,  H05B33/10

CPC分类号： C23C14/12 ,  C23C14/24 ,  C23C14/564

摘要： In a deposited thin film for use in a semiconductor device or the like, adsorption of contaminants is a problem. In the case in which a gas pressure in a chamber is maintained in a viscous flow region, the adsorption of the organic substances is significantly decreased as compared with the case in which the gas pressure is maintained in a molecular flow region. The gas pressure is controlled so that it can be set in the molecular flow region when forming the deposited thin film, and set in the viscous flow region when such deposition is not being performed. Thus, the deposited thin film is formed with less contamination from the organic substances.

摘要翻译： 在用于半导体器件等的沉积薄膜中，污染物的吸附是一个问题。 在室内的气体压力保持在粘性流动区域的情况下，与在分子流动区域中保持气体压力的情况相比，有机物质的吸附显着降低。 控制气体压力，使得当形成沉积的薄膜时，可以将其设置在分子流动区域中，并且当不进行这种沉积时将其设定在粘性流动区域中。 因此，沉积的薄膜形成有机物质的污染较少。

公开(公告)号：US20120234491A1

公开(公告)日：2012-09-20

申请号：US13469851

申请日：2012-05-11

申请人： Tadahiro OHMI ,  Akinobu Teramoto

发明人： Tadahiro OHMI ,  Akinobu Teramoto

IPC分类号： B05B1/18 ,  C23C16/511 ,  C23C16/50

CPC分类号： H01L21/3065 ,  C23C16/402 ,  C23C16/511 ,  H01J37/32192 ,  H01J37/3244 ,  H01J37/32449

摘要： A plasma processing apparatus in which consumption of expensive krypton and xenon gases is suppressed as much as possible while reducing damage on a workpiece during plasma processing. In plasma processing of a substrate using a rare gas, two or more kinds of different rare gases are employed, and an inexpensive argon gas is used as one rare gas and any one or both of krypton and xenon gases having a larger collision cross-sectional area against electron than that of the argon gas is used as the other gas. Consequently, consumption of expensive krypton and xenon gases is suppressed as much as possible and damage on a workpiece is reduced during plasma processing.

摘要翻译： 一种等离子体处理装置，其中尽可能地抑制昂贵的氪气和氙气的消耗，同时减少等离子体处理期间对工件的损坏。 在使用稀有气体的基板的等离子体处理中，使用两种以上的不同种类的稀有气体，廉价的氩气用作一种稀有气体，氪气和氙气气体中的任何一种或两者具有较大的碰撞横截面 作为其他气体，使用与氩气相比的电子区域。 因此，尽可能地抑制昂贵的氪气和氙气的消耗，并且在等离子体处理期间减少了工件上的损坏。

公开(公告)号：US20100038722A1

公开(公告)日：2010-02-18

申请号：US12604015

申请日：2009-10-22

申请人： Takefumi NISHIMUTA ,  Hiroshi MIYAGI ,  Tadahiro OHMI ,  Shigetoshi SUGAWA ,  Akinobu TERAMOTO

发明人： Takefumi NISHIMUTA ,  Hiroshi MIYAGI ,  Tadahiro OHMI ,  Shigetoshi SUGAWA ,  Akinobu TERAMOTO

IPC分类号： H01L27/092

CPC分类号： H01L29/7851 ,  H01L21/823807 ,  H01L21/823821 ,  H01L21/82385 ,  H01L29/045

摘要： A MIS transistor, formed on a semiconductor substrate, assumed to comprise a semiconductor substrate (702, 910) comprising a projecting part (704, 910B) with at least two different crystal planes on the surface on a principal plane, a gate insulator (708, 920B) for covering at least a part of each of said at least two different crystal planes constituting the surface of the projecting part, a gate electrode (706, 930B), comprised on each of said at least two different crystal planes constituting the surface of the projecting part, which sandwiches the gate insulator with the said at least two different planes, and a single conductivity type diffusion region (710a, 710b, 910c, 910d) formed in the projecting part facing each of said at least two different crystal planes and individually formed on both sides of the gate electrode. Such a configuration allows control over increase in the element area and increase of channel width.

摘要翻译： 形成在半导体衬底上的MIS晶体管被假设为包括半导体衬底（702,910），该半导体衬底包括在主平面上的表面上具有至少两个不同晶面的突出部分（704,910B），栅极绝缘体（708 ，920B），用于覆盖构成所述突出部分的表面的所述至少两个不同晶面的每一个的至少一部分;栅电极（706,930B），包括在构成所述表面的所述至少两个不同晶面中的每一个上 所述突出部分与所述至少两个不同平面夹住所述栅极绝缘体，以及形成在所述突出部分中的所述至少两个不同晶面中的每一个的单导电型扩散区域（710a，710b，910c，910d） 并分别形成在栅电极的两侧。 这种配置允许控制元件面积的增加和通道宽度的增加。