公开(公告)号：US09233347B2

公开(公告)日：2016-01-12

申请号：US13520824

申请日：2010-10-22

申请人： Masaaki Nagase ,  Ryousuke Dohi ,  Kouji Nishino ,  Nobukazu Ikeda

发明人： Masaaki Nagase ,  Ryousuke Dohi ,  Kouji Nishino ,  Nobukazu Ikeda

IPC分类号： F16K11/20 ,  B01J4/02 ,  G05D11/13 ,  H01L21/67

CPC分类号： B01J4/02 ,  G05D11/132 ,  H01L21/67017 ,  Y10T137/87249

摘要： A mixed gas supply device includes a plurality of gas supply lines arranged in parallel that include flow rate control devices and outlet side switching valves, wherein gas outlets of respective outlet side switching valves communicate with a manifold, and another gas supply line at a position close to a mixed gas outlet of the manifold supplies a low flow rate gas, wherein an outlet side of the flow rate control device and an inlet side of the outlet side switching valve are hermetically connected via an outlet side connecting fitting of the flow rate control device and a mounting table having a gas passage, wherein a small hole portion is provided at a part of a flow passage at the outlet side connecting fitting and/or a flow passage, which makes the outlet side switching valve and a mixed gas flow passage in the manifold communicate with one another.

摘要翻译： 混合气体供给装置包括并列布置的多个气体供给管线，包括流量控制装置和出口侧切换阀，其中各个出口侧切换阀的气体出口与歧管连通，另一个气体供给管线位于关闭位置 到歧管的混合气体出口供给低流量气体，其中流量控制装置的出口侧和出口侧切换阀的入口侧经由流量控制装置的出口侧连接配件气密地连接 以及具有气体通道的安装台，其中在出口侧连接配件和/或流路的流路的一部分处设置有小孔部，其使出口侧切换阀和混合气体流路成为 歧管彼此通信。

公开(公告)号：US20130319551A1

公开(公告)日：2013-12-05

申请号：US13988836

申请日：2011-11-17

申请人： Ryousuke Dohi ,  Atsuo Tomita ,  Kouji Nishino ,  Yohei Sawada ,  Nobukazu Ikeda

发明人： Ryousuke Dohi ,  Atsuo Tomita ,  Kouji Nishino ,  Yohei Sawada ,  Nobukazu Ikeda

IPC分类号： F16K37/00

CPC分类号： F16K37/0041 ,  F16K31/1221 ,  F16K37/00 ,  F16K37/0083 ,  Y10T137/8158 ,  Y10T137/8242

摘要： To provide an opening degree detection device for an automatically operated valve which is easily assembled into an automatically operated valve, makes it easy to ensure detection accuracy at the time of assembling the opening degree detection device, and is easily applicable to an existing automatically operated valve. The opening degree detection device includes: a base plate 4 which is detachably mounted on an automatically operated valve 2; a displacement sensor 5; and a target 6 having an inclined detection surface 6a which is detected by the displacement sensor 5. The target 6 is fixed to the base plate 4. The displacement sensor 5 is supported on a valve stem 14 by way of a sensor support member 21, and the sensor support member 21 is supported on the base plate 4 by way of a guide means.

摘要翻译： 为了提供易于组装成自动操作的阀的自动操作阀的开度检测装置，能够容易地确保组装开度检测装置时的检测精度，并且容易应用于现有的自动操作阀 。 开度检测装置包括：可拆卸地安装在自动操作的阀2上的基板4; 位移传感器5; 以及具有由位移传感器5检测出的倾斜检测面6a的目标6。目标6固定在基板4上。位移传感器5通过传感器支撑部件21支撑在阀杆14上， 并且传感器支撑构件21通过引导装置支撑在基板4上。

公开(公告)号：US08587180B2

公开(公告)日：2013-11-19

申请号：US12989614

申请日：2009-02-18

申请人： Katsuyuki Sugita ,  Nobukazu Ikeda ,  Kouji Nishino ,  Ryousuke Dohi ,  Kaoru Hirata ,  Takatoshi Nakatani

发明人： Katsuyuki Sugita ,  Nobukazu Ikeda ,  Kouji Nishino ,  Ryousuke Dohi ,  Kaoru Hirata ,  Takatoshi Nakatani

IPC分类号： H01L41/09

CPC分类号： G05D7/0635 ,  Y10T137/7762

摘要： A pressure control valve piezoelectric element driving circuit is provided for a pressure type flow rate control device provided with a flow rate self-diagnosis function for comparing initial pressure drop characteristics data measured and with pressure drop characteristics data in a flow rate diagnosis which are measured under conditions that are the same for both measurements to detect malfunction in flow rate control from a difference between both characteristics data, wherein a first discharge circuit slowly discharges a piezoelectric element driving voltage applied to the piezoelectric element according to a step-down command signal from a CPU, through a step-down command circuit to step down the voltage, and a second discharge circuit that rapidly discharges a piezoelectric element driving voltage applied to the piezoelectric element according to a high-speed step-down command signal from the CPU, through a high-speed step-down command circuit to step down the voltage.

摘要翻译： 为压力式流量控制装置设置压力式流量控制装置，该压力式流量控制装置具有用于比较测定的初始压降特性数据和流量诊断中的压降特性数据的流量自我诊断功能， 两个测量结果相同的条件是根据两个特性数据之间的差异来检测流量控制的故障，其中第一放电电路根据来自一个压电元件的降压命令信号缓慢放电施加到压电元件的压电元件驱动电压 CPU通过降压指令电路降低电压，以及第二放电电路，其根据来自CPU的高速降压命令信号快速放电施加到压电元件的压电元件的驱动电压，通过 高速降压指令电路降压。

公开(公告)号：US20120273061A1

公开(公告)日：2012-11-01

申请号：US13505620

申请日：2010-11-04

申请人： Atsushi Hidaka ,  Kaoru Hirata ,  Masaaki Nagase ,  Nobukazu Ikeda ,  Ryousuke Dohi ,  Kouji Nishino

发明人： Atsushi Hidaka ,  Kaoru Hirata ,  Masaaki Nagase ,  Nobukazu Ikeda ,  Ryousuke Dohi ,  Kouji Nishino

IPC分类号： F16K49/00 ,  F16K31/02

CPC分类号： F16K31/007 ,  F16K7/14 ,  F16K25/005 ,  G05D7/0629 ,  Y10T137/6416 ,  Y10T137/7759 ,  Y10T137/776 ,  Y10T137/7761

摘要： A piezoelectrically driven valve and a piezoelectrically driven fluid control device are provided that may control a fluid even if the temperature of the fluid is higher than an operating temperature range of a piezoelectric actuator. The piezoelectrically driven valve includes a valve element for opening and closing a fluid passage, a piezoelectric actuator for driving the valve element by utilizing extension of a piezoelectric element, and a radiation spacer that lifts and supports the piezoelectric actuator away from the fluid passage, and radiates heat that is transferred from fluid flowing in the fluid passage to the piezoelectric actuator, and preferably further includes a support cylinder that houses and supports both of the piezoelectric actuator and the radiation spacer, wherein the support cylinder is made of a material with the same thermal expansion coefficient as that of the radiation spacer, at least at a portion for housing the radiation spacer.

摘要翻译： 提供了一种压电驱动阀和压电驱动的流体控制装置，其可以控制流体，即使流体的温度高于压电致动器的工作温度范围。 压电驱动阀包括用于打开和关闭流体通道的阀元件，通过利用压电元件的延伸来驱动阀元件的压电致动器，以及将压电致动器提升和支撑远离流体通道的辐射间隔件，以及 辐射从在流体通道中流动的流体转移到压电致动器的热量，并且优选地还包括容纳和支撑压电致动器和辐射间隔物的支撑筒，其中支撑筒由具有相同材料的材料制成 至少在用于容纳辐射间隔物的部分处，与辐射间隔物的热膨胀系数相同。

公开(公告)号：US20110120566A1

公开(公告)日：2011-05-26

申请号：US12950798

申请日：2010-11-19

申请人： Tadahiro OHMI ,  Kouji NISHINO ,  Ryousuke DOHI ,  Masaaki NAGASE ,  Katsuyuki SUGITA ,  Kaoru HIRATA ,  Takashi HIROSE ,  Tsutomu SHINOHARA ,  Nobukazu IKEDA ,  Toshihide YOSHIDA ,  Hisashi TANAKA

发明人： Tadahiro OHMI ,  Kouji NISHINO ,  Ryousuke DOHI ,  Masaaki NAGASE ,  Katsuyuki SUGITA ,  Kaoru HIRATA ,  Takashi HIROSE ,  Tsutomu SHINOHARA ,  Nobukazu IKEDA ,  Toshihide YOSHIDA ,  Hisashi TANAKA

IPC分类号： F17D1/00

CPC分类号： G05D7/0635 ,  G01F1/42 ,  G01F7/005 ,  Y10T137/0379

摘要： A fluid flow rate control method is provided that uses a flow rate range variable type pressure type flow rate control device provided with at least two or more parallel fluid passages disposed between the downstream side of a control valve of the control device and a fluid supply pipe passage, and orifices having different fluid flow rate characteristics are respectively interposed in parallel fluid passages to pass fluid in a first flow rate region through one orifice for flow rate control, and to pass fluid in a second flow rate region through at least another orifice for flow rate control. Flow rate characteristics of the respective orifices are selected so that a maximum controllable flow rate of fluid in the first flow rate region at low flow rate is smaller than 10% of a maximum controllable flow rate in the second flow rate region at high flow rate.

摘要翻译： 提供了一种流体流量控制方法，其使用流量范围可变型压力型流量控制装置，该流量范围可变型压力型流量控制装置设置有至少两个或更多个平行的流体通道，该流体通道设置在控制装置的控制阀的下游侧与流体供给管 具有不同流体流速特性的通道和孔分别插入在平行的流体通道中，以使第一流量区域中的流体通过一个孔口用于流量控制，并使第二流量区域中的流体通过至少另一个孔口， 流量控制。 选择相应孔口的流量特性，使得在低流量下第一流量区域中的流体的最大可控流量小于第二流量区域在高流速下的最大可控流量的10％。

公开(公告)号：US07654137B2

公开(公告)日：2010-02-02

申请号：US10598290

申请日：2005-01-13

申请人： Kaoru Hirata ,  Nobukazu Ikeda ,  Kouji Nishino ,  Ryousuke Dohi

发明人： Kaoru Hirata ,  Nobukazu Ikeda ,  Kouji Nishino ,  Ryousuke Dohi

IPC分类号： G01F1/68

CPC分类号： G01L19/0023 ,  G01F1/6842 ,  G01F1/6845 ,  Y10T137/7761

摘要： The present invention provides a corrosion-resistant metal made sensor for fluid and a fluid supply device for which the sensor is employed.More specifically, the corrosion-resistant metal made sensor for fluid is equipped with a corrosion-resistant metal substrate, a mass flow rate sensor part comprising a corrosion resistant metal substrate, a thin film forming a temperature sensor and a heater mounted on the back face side of the fluid contacting surface of the corrosion-resistant metal substrate, and a pressure sensor part comprising a thin film forming a strain sensor element mounted on the back face side of the fluid contacting surface of the corrosion-resistant metal substrate, and the sensor is so constituted that the mass flow rate and pressure of the fluid are measured.

摘要翻译： 本发明提供了用于流体的耐腐蚀金属制传感器和使用该传感器的流体供应装置。 更具体地说，用于流体的耐腐蚀金属制传感器配备有耐腐蚀金属基板，包含耐腐蚀金属基板的质量流量传感器部件，形成温度传感器的薄膜和安装在背面上的加热器 耐压金属基板的流体接触面的一侧，以及包含形成安装在耐腐蚀金属基板的流体接触面的背面侧的应变传感器元件的薄膜的压力传感器部，以及传感器 如此构成，即测量流体的质量流量和压力。

公开(公告)号：US20100012026A1

公开(公告)日：2010-01-21

申请号：US12306904

申请日：2007-06-13

申请人： Kaoru Hirata ,  Masaaki Nagase ,  Atsushi Hidaka ,  Atsushi Matsumoto ,  Ryousuke Dohi ,  Kouji Nishino ,  Nobukazu Ikeda

发明人： Kaoru Hirata ,  Masaaki Nagase ,  Atsushi Hidaka ,  Atsushi Matsumoto ,  Ryousuke Dohi ,  Kouji Nishino ,  Nobukazu Ikeda

IPC分类号： C23C16/52 ,  F16K17/38

CPC分类号： C23C16/4481 ,  C23C16/52 ,  G05D16/2013 ,  Y10T137/7737

摘要： An evaporation supply apparatus for raw material used in semiconductor manufacturing includes a source tank in which a raw material is pooled; a flow rate control device that supplies carrier gas at a regulated flow rate into the source tank; a primary piping path for feeding mixed gas G0, made up of raw material vapor G4 and carrier gas G1, an automatic pressure regulating device that regulates a control valve based on the detected values of the pressure and temperature of mixed gas G0 to regulate the cross-sectional area of the passage through which the mixed gas G0 is distributed so as to hold the pressure of the mixed gas G0 inside the source tank constant; and a constant-temperature heating unit for heating the source tank to a set temperature, in which mixed gas G0 is supplied to a process chamber while controlling the pressure inside the source tank.

摘要翻译： 用于半导体制造的原料的蒸发供给装置包括：原料汇集在其中的源罐; 流量控制装置，其以规定的流量将载气供给到所述源罐; 用于供给由原料蒸气G4和载气G1组成的混合气体G0的主要管路，基于混合气体G0的压力和温度的检测值来调节控制阀的自动调压装置，以调节十字 混合气体G0通过其分配的通道的截面积，以将混合气体G0的压力保持在源箱内部恒定; 以及用于将源罐加热到设定温度的恒温加热单元，其中将混合气体G0供给到处理室，同时控制源罐内的压力。

公开(公告)号：US06606912B2

公开(公告)日：2003-08-19

申请号：US09825340

申请日：2001-04-04

申请人： Tadahiro Ohmi ,  Takashi Hirose ,  Eiji Ideta ,  Nobukazu Ikeda ,  Ryousuke Dohi ,  Kouji Nishino ,  Kazuhiro Yoshikawa ,  Satoshi Kagatsume ,  Jun Hirose ,  Kazuo Fukasawa ,  Hiroshi Koizumi ,  Hideki Nagaoka

发明人： Tadahiro Ohmi ,  Takashi Hirose ,  Eiji Ideta ,  Nobukazu Ikeda ,  Ryousuke Dohi ,  Kouji Nishino ,  Kazuhiro Yoshikawa ,  Satoshi Kagatsume ,  Jun Hirose ,  Kazuo Fukasawa ,  Hiroshi Koizumi ,  Hideki Nagaoka

IPC分类号： G01L700

CPC分类号： G01L19/0023 ,  G01L19/0645 ,  G01L19/145 ,  G01L19/147

摘要： A construction for mounting a pressure detector prevents the detector diaphragm from being strained by stress applied to the pressure detector as the detector is mounted in a fixture main body provided in a pipe line or the like, thereby keeping the output characteristics and temperature characteristics of the detector from greatly differing before and after the mounting. The pressure detector is constructed by combining and fastening together a diaphragm base having a diaphragm and a sensor base having a sensor element therein that is activated by displacement of the diaphragm base. The pressure detector, with a gasket placed thereunder, is disposed in a mounting hole of a fixture main body that is mounted in a pipe line. The pressure detector is air-tightly pressed and fastened by a presser member inserted from above in the mounting hole. The presser member is brought in contact with a block upper surface of the diaphragm base, and the gasket is also brought in contact with the block lower surface of the diaphragm base. A shallow groove is defined in the form of a ring on the lower surface of the block at a place inward of the portion contacting the metal gasket so that the shallow groove absorbs strain caused by the presser member.

摘要翻译： 用于安装压力检测器的结构防止了检测器膜片被施加到压力检测器上的应力而被应变，因为检测器安装在设置在管线等中的夹具主体中，从而保持了输出特性和温度特性 检测器在安装前后差异很大。 压力检测器通过将具有隔膜的膜片基座和具有传感器元件的传感器基座组合并紧固在一起而构成，该传感器基座通过隔膜基座的位移而被激活。 压力检测器，其上放置有垫圈，设置在安装在管道中的固定装置本体的安装孔中。 压力检测器通过从安装孔中从上方插入的压紧构件气密地按压并紧固。 压板构件与隔膜基座的块上表面接触，并且垫圈也与隔膜基座的块下表面接触。 浅槽在块体的下表面上在与金属垫片接触的部分的内侧的位置处以环的形式限定，使得浅槽吸收由压紧构件引起的应变。

公开(公告)号：US06152168A

公开(公告)日：2000-11-28

申请号：US284352

申请日：1999-05-24

申请人： Tadahiro Ohmi ,  Tetu Kagazume ,  Kazuhiko Sugiyama ,  Ryousuke Dohi ,  Tomio Uno ,  Kouji Nishino ,  Hiroyuki Fukuda ,  Nobukazu Ikeda ,  Michio Yamaji

发明人： Tadahiro Ohmi ,  Tetu Kagazume ,  Kazuhiko Sugiyama ,  Ryousuke Dohi ,  Tomio Uno ,  Kouji Nishino ,  Hiroyuki Fukuda ,  Nobukazu Ikeda ,  Michio Yamaji

IPC分类号： F16K17/22 ,  G05D7/06

CPC分类号： G05D7/0647 ,  Y10T137/7759 ,  Y10T137/7761

摘要： A pressure-type flow rate control apparatus for use especially in the gas supply system in semiconductor manufacturing facilities. The flow control apparatus is provided with a bore-variable orifice, which permits easy switching of the fluid flow rate control range as well as size reduction of the pressure-type flow control apparatus, and offers other advantages including improved gas replaceability, prevention of dust formation, and reduced manufacturing costs of the flow control system. The apparatus comprises an orifice, a control valve provided on the upstream side of the orifice, a pressure detector provided between the control valve and the orifice, and a control unit to calculate a fluid flow rate Q on the basis of a pressure P1 detected by the pressure detector with the equation Q=KP1 (K=constant) and to output in a drive for the control valve the difference between the set flow rate signal Qs and the calculated flow rate signal Q as control signal Qy, wherein the pressure P1 on the upstream side of the orifice is regulated by actuating the control valve for controlling the flow rate of the fluid downstream of the orifice with the ratio P2/P1 between the pressure P1 on the upstream side of the orifice and the downstream pressure P2 maintained at not higher than the ratio of the critical pressure of the controlled fluid, characterized in that a direct touch type metal diaphragm valve unit functions as the orifice and that the ring-shaped gap between the valve seat and the diaphragm serves a variable orifice wherein the gap is adjusted by the orifice drive.

摘要翻译： PCT No.PCT / JP98 / 03620 Sec。 371日期1999年5月24日 102（e）日期1999年5月24日PCT提交1998年8月13日PCT公布。 公开号WO99 /​​ 09463 日期1999年2月25日一种特别用于半导体制造设备中的气体供给系统的压力式流量控制装置。 流量控制装置设置有可变孔口，其允许容易地切换流体流量控制范围以及压力型流量控制装置的尺寸减小，并且提供其它优点，包括改进的气体替换性，防止灰尘 形成和降低流量控制系统的制造成本。 该装置包括孔口，设置在孔口的上游侧的控制阀，设置在控制阀和孔口之间的压力检测器，以及控制单元，用于根据检测到的压力P1计算流体流量Q 压力检测器具有等式Q = KP1（K =常数），并且在控制阀的驱动器中输出设定流量信号Qs和计算流量信号Q之间的差作为控制信号Qy，其中压力P1 on 孔口的上游侧通过致动用于控制孔口下游流体的流速的控制阀来调节，孔口上游侧的压力P1与保持在不同的孔口的下游压力P2之间的比率P2 / P1 高于受控流体的临界压力的比例，其特征在于，直接触摸式金属隔膜阀单元用作孔口，并且阀海之间的环形间隙 并且隔膜用于可变孔口，其中间隙由孔口驱动器调节。

公开(公告)号：US09133951B2

公开(公告)日：2015-09-15

申请号：US11913271

申请日：2006-05-10

申请人： Tadahiro Ohmi ,  Kouji Nishino ,  Ryousuke Dohi ,  Nobukazu Ikeda ,  Masaaki Nagase ,  Kaoru Hirata ,  Katsuyuki Sugita ,  Tsutomu Shinohara ,  Takashi Hirose ,  Tomokazu Imai ,  Toshihide Yoshida ,  Hisashi Tanaka

发明人： Tadahiro Ohmi ,  Kouji Nishino ,  Ryousuke Dohi ,  Nobukazu Ikeda ,  Masaaki Nagase ,  Kaoru Hirata ,  Katsuyuki Sugita ,  Tsutomu Shinohara ,  Takashi Hirose ,  Tomokazu Imai ,  Toshihide Yoshida ,  Hisashi Tanaka

IPC分类号： F16K27/00 ,  F16L55/027 ,  G01F1/36 ,  G01F15/00 ,  G05D7/06

CPC分类号： F16K27/003 ,  F16L55/02718 ,  G01F1/36 ,  G01F15/001 ,  G01F15/005 ,  G05D7/0635

摘要： An orifice changeable pressure type flow rate control apparatus comprises a valve body of a control valve for a pressure type flow rate control apparatus installed between an inlet side fitting block provided with a coupling part of a fluid supply pipe and an outlet side fitting block provided with a coupling part of a fluid takeout pipe; a fluid inlet side of the valve body and the inlet side fitting block, and a fluid outlet side of the valve body and the outlet side fitting block are detachably and hermitically connected respectively so a flow passage for gases through the control valve is formed; and, a gasket type orifice for a pressure type flow rate control apparatus is removably inserted between a gasket type orifice insertion hole provided on the outlet side of the valve body and a gasket type orifice insertion hole of the outlet side fitting block.

摘要翻译： 节流孔可变压力型流量控制装置包括安装在设置有流体供给管的联接部的入口侧配件块和设置有流体供给管的出口侧配件块之间的压力型流量控制装置的控制阀的阀体 流体取出管的联接部分; 阀体和入口侧配件块的流体入口侧和阀体和出口侧配件块的流体出口侧分别可拆卸地和隐蔽地连接，从而形成用于通过控制阀的气体的流动通道; 并且用于压力式流量控制装置的垫圈型孔口可移除地插入设置在阀体的出口侧的垫圈型孔插入孔和出口侧配件块的衬垫型孔插入孔之间。