公开(公告)号：US08336381B2

公开(公告)日：2012-12-25

申请号：US12516007

申请日：2007-11-29

申请人： Atsushi Kandori ,  Masao Majima ,  Kenichi Nagae ,  Yasuyoshi Takai

发明人： Atsushi Kandori ,  Masao Majima ,  Kenichi Nagae ,  Yasuyoshi Takai

IPC分类号： G01C19/00

CPC分类号： G01C19/5719 ,  G01P15/0802 ,  G01P15/124 ,  G01P15/125

摘要： A sensor includes a movably supported movable element and an opposing member, and sensor detects a relative positional relationship between the movable element and the opposing member which are provided with a spacing therebetween. The opposing member has an impurity-doped portion which is provided at either an opposing portion, which is opposed to the movable element, or an adjoining portion, which adjoins the opposing portion. At least a part of the impurity-doped portion is formed on an opposite surface (that is, opposite to a surface that faces the movable element), from which opposite surface an electrical wiring is led out.

摘要翻译： 传感器包括可移动支撑的可移动元件和相对构件，并且传感器检测可移动元件和相对构件之间的间隔的相对位置关系。 相对的构件具有杂质掺杂部分，其被设置在与可移动元件相对的相对部分或邻接相对部分的相邻部分。 杂质掺杂部分的至少一部分形成在与其相反的表面上（即，面向可移动元件的表面的相对表面），电线从该表面引出。

公开(公告)号：US20100043546A1

公开(公告)日：2010-02-25

申请号：US12516007

申请日：2007-11-29

申请人： Atsushi Kandori ,  Masao Majima ,  Kenichi Nagae ,  Yasuyoshi Takai

发明人： Atsushi Kandori ,  Masao Majima ,  Kenichi Nagae ,  Yasuyoshi Takai

IPC分类号： G01C19/56 ,  H01L21/30

CPC分类号： G01C19/5719 ,  G01P15/0802 ,  G01P15/124 ,  G01P15/125

摘要： Provided is a sensor including a movably supported movable element and an opposing member. The sensor detects a relative positional relationship between the movable element and the opposing member which are provided with a spacing therebetween The opposing member has an impurity-doped portion which is provided to one of an opposing portion which is opposed to the movable element and an adjoining portion which adjoins the opposing portion. At least a part of the impurity-doped portion is formed on an opposite surface opposite to a surface which is opposed to the movable element, from which opposite surface an electrical wiring is led out.

摘要翻译： 提供一种传感器，包括可移动支撑的可移动元件和相对构件。 传感器检测可移动元件和相对构件之间的间隔的相对位置关系。相对构件具有杂质掺杂部分，该杂质掺杂部分设置在与可移动元件相对的相对部分中的一个上， 邻接相对部分的部分。 杂质掺杂部分的至少一部分形成在与可移动元件相对的表面相对的相对表面上，从该导体的相对表面引出电线。

公开(公告)号：US09238250B2

公开(公告)日：2016-01-19

申请号：US13500284

申请日：2010-11-16

申请人： Atsushi Kandori ,  Makoto Takagi ,  Masao Majima ,  Kenichi Nagae

发明人： Atsushi Kandori ,  Makoto Takagi ,  Masao Majima ,  Kenichi Nagae

IPC分类号： G01S3/80 ,  B06B1/00 ,  B06B1/02 ,  G01S3/808

CPC分类号： H02N1/006 ,  B06B1/0246 ,  B06B1/0292 ,  G01S3/8083

摘要： Provided is a control apparatus and control method for a capacitive electromechanical transducer with small decrease in transmission/reception efficiency, and with sets of transmission/reception characteristics with different frequency ranges. The apparatus has cells each including first and second electrodes facing each other via a gap; includes a driving/detecting unit and an external stress applying unit. The driving/detecting unit performs at least one of causing the second electrode to vibrate and transmit elastic waves by generating an AC electrostatic attractive force between the electrodes, and detecting a change of capacity between the electrodes, the change being caused by the second electrode vibrating upon receipt of elastic waves. The external stress applying unit changes the external stress applied to the second electrode. The driving/detecting unit adjusts frequency characteristics by changing a parameter defining the frequency domain used in a transmitting/receiving operation, corresponding to the change of the external stress.

摘要翻译： 提供了一种用于容量式机电换能器的控制装置和控制方法，其具有小的发送/接收效率的降低以及具有不同频率范围的发送/接收特性的集合。 该装置具有各自包括经由间隙彼此面对的第一和第二电极的单元; 包括驱动/检测单元和外部应力施加单元。 驱动/检测单元执行以下至少一种：使第二电极通过在电极之间产生AC静电吸引力而振动并传播弹性波，并且检测电极之间的容量变化，由第二电极振动引起的变化 收到弹性波。 外部应力施加单元改变施加到第二电极的外部应力。 驱动/检测单元通过改变与发生/接收操作中使用的频域相对应的外部应力变化的参数来调整频率特性。

公开(公告)号：US20120194107A1

公开(公告)日：2012-08-02

申请号：US13500284

申请日：2011-11-16

申请人： Atsushi Kandori ,  Makoto Takagi ,  Masao Majima ,  Kenichi Nagae

发明人： Atsushi Kandori ,  Makoto Takagi ,  Masao Majima ,  Kenichi Nagae

IPC分类号： H02N1/00

CPC分类号： H02N1/006 ,  B06B1/0246 ,  B06B1/0292 ,  G01S3/8083

摘要： Provided is a control apparatus and control method for a capacitive electromechanical transducer with small decrease in transmission/reception efficiency, and with sets of transmission/reception characteristics with different frequency ranges. The apparatus has cells each including first and second electrodes facing each other via a gap; includes a driving/detecting unit and an external stress applying unit. The driving/detecting unit performs at least one of causing the second electrode to vibrate and transmit elastic waves by generating an AC electrostatic attractive force between the electrodes, and detecting a change of capacity between the electrodes, the change being caused by the second electrode vibrating upon receipt of elastic waves. The external stress applying unit changes the external stress applied to the second electrode. The driving/detecting unit adjusts frequency characteristics by changing a parameter defining the frequency domain used in a transmitting/receiving operation, corresponding to the change of the external stress.

摘要翻译： 提供了一种用于容量式机电换能器的控制装置和控制方法，其具有小的发送/接收效率的降低以及具有不同频率范围的发送/接收特性的集合。 该装置具有各自包括经由间隙彼此面对的第一和第二电极的单元; 包括驱动/检测单元和外部应力施加单元。 驱动/检测单元执行以下至少一种：使第二电极通过在电极之间产生AC静电吸引力而振动并传播弹性波，并且检测电极之间的容量变化，由第二电极振动引起的变化 收到弹性波。 外部应力施加单元改变施加到第二电极的外部应力。 驱动/检测单元通过改变与发生/接收操作中使用的频域相对应的外部应力变化的参数来调整频率特性。

公开(公告)号：US08393211B2

公开(公告)日：2013-03-12

申请号：US12104356

申请日：2008-04-16

申请人： Atsushi Kandori ,  Masao Majima ,  Kenichi Nagae

发明人： Atsushi Kandori ,  Masao Majima ,  Kenichi Nagae

IPC分类号： G01C19/56

CPC分类号： G01P15/097 ,  G01C19/5719

摘要： A sensor includes a detecting oscillator supported in such a manner that the detecting oscillator is allowed to oscillate; first and second electrodes; a detecting electrode facing the first and second electrodes; and signal supplying units configured to supply first and second AC signals respectively to the first and second electrodes. Either the first and second electrodes or the detecting electrode is provided on the detecting oscillator. The first and second AC signals respectively supplied to the first and second electrodes by the signal supplying units cause the detecting oscillator to be maintained at a neutral position for detection without being displaced when no physical quantity is input. When the detecting oscillator is displaced, an input physical quantity is detected on the basis of a signal corresponding to charges induced at the detecting electrode by the first and second AC signals supplied respectively to the first and second electrodes.

摘要翻译： 传感器包括以允许检测振荡器振荡的方式支持的检测振荡器; 第一和第二电极; 面向所述第一和第二电极的检测电极; 以及信号供给单元，被配置为分别向第一和第二电极提供第一和第二AC信号。 第一和第二电极或检测电极都设置在检测振荡器上。 分别由信号提供单元提供给第一和第二电极的第一和第二AC信号使检测振荡器保持在中性位置用于检测，而不会在不输入物理量的情况下移位。 当检测振荡器移位时，基于分别提供给第一和第二电极的第一和第二AC信号，根据与在检测电极处感应的电荷相对应的信号来检测输入物理量。

公开(公告)号：US20080264167A1

公开(公告)日：2008-10-30

申请号：US12104356

申请日：2008-04-16

申请人： Atsushi Kandori ,  Masao Majima ,  Kenichi Nagae

发明人： Atsushi Kandori ,  Masao Majima ,  Kenichi Nagae

IPC分类号： G01P3/44

CPC分类号： G01P15/097 ,  G01C19/5719

摘要： A sensor includes a detecting oscillator supported in such a manner that the detecting oscillator is allowed to oscillate; first and second electrodes; a detecting electrode facing the first and second electrodes; and signal supplying units configured to supply first and second AC signals respectively to the first and second electrodes. Either the first and second electrodes or the detecting electrode is provided on the detecting oscillator. The first and second AC signals respectively supplied to the first and second electrodes by the signal supplying units cause the detecting oscillator to be maintained at a neutral position for detection without being displaced when no physical quantity is input. When the detecting oscillator is displaced, an input physical quantity is detected on the basis of a signal corresponding to charges induced at the detecting electrode by the first and second AC signals supplied respectively to the first and second electrodes.

摘要翻译： 传感器包括以允许检测振荡器振荡的方式支持的检测振荡器; 第一和第二电极; 面向所述第一和第二电极的检测电极; 以及信号供给单元，被配置为分别向第一和第二电极提供第一和第二AC信号。 第一和第二电极或检测电极都设置在检测振荡器上。 分别由信号提供单元提供给第一和第二电极的第一和第二AC信号使检测振荡器保持在中性位置用于检测，而不会在不输入物理量的情况下移位。 当检测振荡器移位时，基于分别提供给第一和第二电极的第一和第二AC信号，根据与在检测电极处感应的电荷相对应的信号来检测输入物理量。

公开(公告)号：US08336380B2

公开(公告)日：2012-12-25

申请号：US12304966

申请日：2007-07-26

申请人： Atsushi Kandori ,  Masao Majima ,  Kenichi Nagae

发明人： Atsushi Kandori ,  Masao Majima ,  Kenichi Nagae

IPC分类号： G01C19/56

CPC分类号： G01C19/5712

摘要： Provided is an angular velocity sensor including: a reference vibrator supported so as to generate reciprocating rotational vibration about a first rotation axis as a center; a detection vibrator supported by the reference vibrator so as to generate reciprocating rotational vibration about a second rotation axis, which is different from the first rotation axis, as a center; a reference vibration generating unit for allowing the reference vibrator to generate reciprocating rotational vibration; and a detection unit for detecting a displacement amount of the detection vibrator with respect to the reference vibrator, which is in association with the reciprocating rotational vibration of the detection vibrator.

摘要翻译： 提供了一种角速度传感器，包括：参考振动器，被支撑为以围绕第一旋转轴线为中心产生往复旋转振动; 由参考振动器支撑的检测振动器作为中心产生围绕与第一旋转轴不同的第二旋转轴线的往复旋转振动; 参考振动发生单元，用于允许参考振动器产生往复旋转振动; 以及检测单元，用于检测与检测振动器的往复旋转振动相关的检测振动器相对于参考振动器的位移量。

公开(公告)号：US20090193893A1

公开(公告)日：2009-08-06

申请号：US12304966

申请日：2007-07-26

申请人： Atsushi Kandori ,  Masao Majima ,  Kenichi Nagae

发明人： Atsushi Kandori ,  Masao Majima ,  Kenichi Nagae

IPC分类号： G01C19/56

CPC分类号： G01C19/5712

摘要： Provided is an angular velocity sensor including: a reference vibrator supported so as to generate reciprocating rotational vibration about a first rotation axis as a center; a detection vibrator supported by the reference vibrator so as to generate reciprocating rotational vibration about a second rotation axis, which is different from the first rotation axis, as a center; a reference vibration generating unit for allowing the reference vibrator to generate reciprocating rotational vibration; and a detection unit for detecting a displacement amount of the detection vibrator with respect to the reference vibrator, which is in association with the reciprocating rotational vibration of the detection vibrator.

摘要翻译： 提供了一种角速度传感器，包括：参考振动器，被支撑为以围绕第一旋转轴线为中心产生往复旋转振动; 由参考振动器支撑的检测振动器作为中心产生围绕与第一旋转轴不同的第二旋转轴线的往复旋转振动; 参考振动发生单元，用于允许参考振动器产生往复旋转振动; 以及检测单元，用于检测与检测振动器的往复旋转振动相关的检测振动器相对于参考振动器的位移量。

公开(公告)号：US20120227498A1

公开(公告)日：2012-09-13

申请号：US13508437

申请日：2010-11-11

申请人： Atsushi Kandori ,  Masao Majima

发明人： Atsushi Kandori ,  Masao Majima

IPC分类号： G01N29/36

CPC分类号： B06B1/0292 ,  G01N21/1702 ,  G01N29/2418

摘要： There is a case in which a generated acoustic wave is decreased owing to the attenuation of light, whereby a desired output is not obtained from an electromechanical transducer device that receives the acoustic wave. The control apparatus for controlling an electromechanical transducer device of the present invention includes: a conversion unit that converts a current output from a first electrode of the electromechanical transducer device to a voltage; a DC voltage applying unit that applies a DC voltage to a second electrode arranged with a gap between itself and the first electrode; and a generation unit that generates a control signal which makes at least one of the DC voltage and a conversion ratio for converting the current to the voltage be changed, on the basis of information about an elapsed time from a point in time at which an inspection object was irradiated with light.

摘要翻译： 存在由于光的衰减而产生的声波降低的情况，从而从接收声波的机电换能器装置不能获得期望的输出。 本发明的机电换能器装置的控制装置包括：转换单元，其将从机电换能器装置的第一电极输出的电流转换为电压; 直流电压施加单元，其向在其自身和所述第一电极之间设置有间隙的第二电极施加DC电压; 以及生成单元，其基于关于从检查的时间点起的经过时间的信息，生成将DC电压和用于将电流转换为电压的转换比中的至少一个变化的控制信号 物体用光照射。

公开(公告)号：US07148591B2

公开(公告)日：2006-12-12

申请号：US11214001

申请日：2005-08-30

申请人： Yasushi Mizoguchi ,  Masao Majima ,  Yasuhiro Shimada ,  Atsushi Kandori

发明人： Yasushi Mizoguchi ,  Masao Majima ,  Yasuhiro Shimada ,  Atsushi Kandori

IPC分类号： H02K33/00 ,  G02B26/08

CPC分类号： G02B26/0841 ,  Y10S359/904

摘要： To provide a small-size oscillating device, a coil is disposed on a substrate.

摘要翻译： 为了提供小型振荡装置，在基板上设置线圈。