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公开(公告)号：US20230245859A1
公开(公告)日：2023-08-03
申请号：US17588999
申请日：2022-01-31
发明人： Neil J. Bassom , Joshua Abeshaus , David Sporleder , Neil Colvin , Joseph Valinski , Michael Cristoforo , Vladimir Romanov , Pradeepa Kowrikan Subrahmnya
CPC分类号： H01J37/32412 , H01J37/08
摘要： An ion source has an arc chamber defining an arc chamber volume. A reservoir is coupled to the arc chamber, defining a reservoir volume. The reservoir receives a source species to define a liquid within the reservoir volume. A conduit fluidly couples the reservoir volume to the arc chamber volume. First and second openings of the conduit are open to the respective reservoir and arc chamber volume. A heat source selectively heats the reservoir to melt the source species at a predetermined temperature. A liquid control apparatus controls a first volume of the liquid within the reservoir volume to define a predetermined supply of the liquid to the arc chamber volume. The liquid control apparatus is a pressurized gas source fluidly coupled to the reservoir to supply a gas to the reservoir and provide a predetermined amount of liquid to the arc chamber.
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公开(公告)号：US10573485B1
公开(公告)日：2020-02-25
申请号：US16227296
申请日：2018-12-20
发明人： Wilhelm Platow , Edward Eisner , Bo Vanderberg , Neil Bassom , Michael Cristoforo , Joshua Abeshaus
IPC分类号： H01J37/08 , H01J37/317
摘要： An electrode system for an ion source has a source electrode that defines a source aperture in an ion source chamber, and is coupled to a source power supply. A first ground electrode defines a first ground aperture that is electrically coupled to an electrical ground potential and extracts ions from the ion source. A suppression electrode is positioned downstream of the first ground electrode and defines a suppression aperture that is electrically coupled to a suppression power supply. A second ground electrode is positioned downstream of the suppression electrode and defines a second ground aperture. The first and second ground electrodes are fixedly coupled to one another and are electrically coupled to the electrical ground potential.
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公开(公告)号：US20230343558A1
公开(公告)日：2023-10-26
申请号：US18336337
申请日：2023-06-16
发明人： Neil J. Bassom , Joshua Abeshaus , David Sporleder , Neil Colvin , Joseph Valinski , Michael Cristoforo , Vladimir Romanov , Pradeepa Kowrikan Subrahmnya
CPC分类号： H01J37/32412 , H01J37/08
摘要： An ion source has an arc chamber defining an arc chamber volume. A reservoir is coupled to the arc chamber, defining a reservoir volume. The reservoir receives a source species to define a liquid within the reservoir volume. A conduit fluidly couples the reservoir volume to the arc chamber volume. First and second openings of the conduit are open to the respective reservoir and arc chamber volume. A heat source selectively heats the reservoir to melt the source species at a predetermined temperature. A liquid control apparatus controls a first volume of the liquid within the reservoir volume to define a predetermined supply of the liquid to the arc chamber volume. The liquid control apparatus is a pressurized gas source fluidly coupled to the reservoir to supply a gas to the reservoir and provide a predetermined amount of liquid to the arc chamber.
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公开(公告)号：US20240145213A1
公开(公告)日：2024-05-02
申请号：US17977537
申请日：2022-10-31
发明人： Neil Colvin , Paul Silverstein , Joshua Abeshaus
IPC分类号： H01J37/317 , H01J37/063
CPC分类号： H01J37/3171 , H01J37/063
摘要： An electrode apparatus for an ion implantation system has a base plate having a base plate aperture and at least one securement region. A securement apparatus is associated with each securement region, and a plurality of electrode rods are selectively coupled to the base plate by the securement apparatus. The plurality of electrode rods have a predetermined shape to define an optical region that is associated with the base plate aperture. An electrical coupling electrically connects to the plurality of electrode rods and is configured to electrically connect to an electrical potential. The plurality of electrode rods have a predetermined shape configured to define a path of a charged particle passing between the plurality of electrode rods based on the electrical potential. The plurality of electrode rods can define a suppressor or ground electrode downstream of an extraction aperture of an ion source.
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公开(公告)号：US11728140B1
公开(公告)日：2023-08-15
申请号：US17588999
申请日：2022-01-31
发明人： Neil J. Bassom , Joshua Abeshaus , David Sporleder , Neil Colvin , Joseph Valinski , Michael Cristoforo , Vladimir Romanov , Pradeepa Kowrikan Subrahmnya
CPC分类号： H01J37/32412 , H01J37/08
摘要： An ion source has an arc chamber defining an arc chamber volume. A reservoir is coupled to the arc chamber, defining a reservoir volume. The reservoir receives a source species to define a liquid within the reservoir volume. A conduit fluidly couples the reservoir volume to the arc chamber volume. First and second openings of the conduit are open to the respective reservoir and arc chamber volume. A heat source selectively heats the reservoir to melt the source species at a predetermined temperature. A liquid control apparatus controls a first volume of the liquid within the reservoir volume to define a predetermined supply of the liquid to the arc chamber volume. The liquid control apparatus is a pressurized gas source fluidly coupled to the reservoir to supply a gas to the reservoir and provide a predetermined amount of liquid to the arc chamber.
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公开(公告)号：US20230135525A1
公开(公告)日：2023-05-04
申请号：US17976055
申请日：2022-10-28
发明人： Neil K. Colvin , Neil Bassom , Joshua Abeshaus
IPC分类号： H01J37/32
摘要： An ion source has arc chamber having one or more radiation generating features, an arc chamber body enclosing an internal volume, and at least one gas inlet aperture defined therein. A gas source provides a gas such as a source species gas or a halide through the gas inlet aperture. The source species gas can be an aluminum-based ion source material such as dimethylaluminum chloride (DMAC). One or more shields positioned proximate to the gas inlet aperture provide a fluid communication between the gas inlet aperture and the internal volume, minimize a line-of-sight from the one or more radiation generating features to the gas inlet aperture, and substantially prevent thermal radiation from reaching the gas inlet aperture from the one or more radiation generating features.
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