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公开(公告)号：US20080315903A1
公开(公告)日：2008-12-25
申请号：US11765019
申请日：2007-06-19
申请人： Axel SCHMIDT , Frank FEHRMANN , Ulf HACKIUS , Stojan KANEV , Steffen LAUBE , Jorg KIESEWETTER
发明人： Axel SCHMIDT , Frank FEHRMANN , Ulf HACKIUS , Stojan KANEV , Steffen LAUBE , Jorg KIESEWETTER
CPC分类号： G01R31/2891
摘要： A method is disclosed for measurement of wafers and other semiconductor components in a probe station, which serves for examination and testing of electronic components. The device under test is held by a chuck and at least one electric probe by a probe support and the device under test and the probe are selectively positioned relative to each other by a positioning device with electric drives and the device under test is contacted. The drive of the positioning device remains in a state of readiness until establishment of contact and is switched off after establishment of contact and before measurement of the device under test.
摘要翻译： 公开了一种用于测量探针台中的晶片和其它半导体部件的方法，其用于电子部件的检查和测试。 被测器件由卡盘和至少一个电探头通过探针支架和被测器件保持，并且探针通过具有电驱动器的定位装置相对于彼此选择性地定位，并且被测器件被接触。 定位装置的驱动器保持在准备状态，直到建立接触并且在建立接触之后和在测试装置的测量之前被关闭。
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公开(公告)号：US20080284457A1
公开(公告)日：2008-11-20
申请号：US12111222
申请日：2008-04-29
申请人： Ulf HACKIUS , Frank FEHRMANN , Juliane BUSCH , Ralf KELLER
发明人： Ulf HACKIUS , Frank FEHRMANN , Juliane BUSCH , Ralf KELLER
CPC分类号： H01L21/67294 , G01R31/2891
摘要： In a device and a method for positioning an object, a drive of a movement device is controlled. To this end, a visual joystick is actuated, as a result of which a moveable actuator is moved, at least linearly by means of a display of a control unit of the movement device, into a position, in which a direction of movement, which can be implemented with the drive, is displayed symbolically. The drive for the movement of the object in the displayed direction of movement is initiated by means of a switching function of the actuator.
摘要翻译： 在用于定位物体的装置和方法中，控制移动装置的驱动器。 为此，启动视觉操纵杆，结果使可移动致动器至少通过移动装置的控制单元的显示线性地移动到移动方向的位置 可以用驱动器实现，以符号方式显示。 通过致动器的切换功能来启动在显示的移动方向上的物体的移动驱动。
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