TEMPERATURE MEASUREMENT DEVICE AND TEMPERATURE MEASUREMENT METHOD

    公开(公告)号:US20180087968A1

    公开(公告)日:2018-03-29

    申请号:US15712264

    申请日:2017-09-22

    Inventor: Hisashi ISOZAKI

    Abstract: The temperature measurement device includes a thermography 20 for measuring a temperature distribution of a predetermined range in a non-contact manner; a calibrator 21 including at least one heater 30 able to generate heat to a preset temperature; thermistors 32a to 32d provided on installation points on the calibrator 21, and measuring temperatures at the installation points, the installation points having different temperatures; and a controller 22 for calibrating a first temperature measurement result obtained from a temperature distribution of a range covering an object (an eye E of a calf C) measured by the thermography 20, based on temperature differences between a second temperature measurement result obtained from a temperature distribution of a range covering the calibrator 21 measured by the thermography 20 and a third temperature measurement result obtained from a temperature distribution of the calibrator 21 measured by the thermistors 32a to 32d.

    POLISHING METHOD AND POLISHING APPARATUS
    5.
    发明申请

    公开(公告)号:US20180021917A1

    公开(公告)日:2018-01-25

    申请号:US15697047

    申请日:2017-09-06

    Abstract: A polishing method and a polishing apparatus which can increase a polishing rate and can control a polishing profile of a substrate being polished by adjusting a surface temperature of a polishing pad are disclosed. The polishing method for polishing a substrate by pressing the substrate against a polishing pad on a polishing table includes a pad temperature adjustment step of adjusting a surface temperature of the polishing pad, and a polishing step of polishing the substrate by pressing the substrate against the polishing pad having the adjusted surface temperature. In the pad temperature adjustment step, the surface temperature of a part of an area of the polishing pad, the area being to be brought in contact with the substrate, is adjusted during the polishing step so that the rate of temperature change of a temperature profile in a radial direction of the surface of the polishing pad becomes constant in the radial direction of the polishing pad.

    Airflow-organization testing method for a clean room and system using the same method
    10.
    发明授权
    Airflow-organization testing method for a clean room and system using the same method 有权
    使用相同方法的洁净室和系统的气流组织测试方法

    公开(公告)号:US09057709B2

    公开(公告)日:2015-06-16

    申请号:US13704363

    申请日:2012-09-21

    Inventor: Li Li Wanshi Jin

    Abstract: An airflow-organization testing method for a clean room and a system using the same method are disclosed. The airflow-organization testing method for a clean room uses a thermal imaging device to detect a sample gas-flow formed by a sample gas in the clean room, and the sample gas has a temperature difference from ambient air. The airflow-organization testing system for a clean room includes a sample gas supplier and a thermal imaging device, and the thermal imaging device can continuously detect a spatial position of the sample gas and display it on a display, thereby improving detection precision and expanding detection range.

    Abstract translation: 公开了一种用于洁净室的气流组织测试方法和使用相同方法的系统。 用于洁净室的气流组织测试方法使用热成像装置来检测由洁净室中的样品气体形成的样品气流,并且样品气体与环境空气具有温度差。 洁净室的气流组织测试系统包括样品气体供应商和热成像装置,并且热成像装置可以连续检测样品气体的空间位置并将其显示在显示器上,从而提高检测精度和扩大检测 范围。

Patent Agency Ranking