公开(公告)号：US20060260978A1

公开(公告)日：2006-11-23

申请号：US11364562

申请日：2006-02-26

申请人： Barry Gregerson ,  David Halbmaier ,  Stephen Sumner ,  Brian Wiseman ,  Anthony Tieben ,  Justin Strike

发明人： Barry Gregerson ,  David Halbmaier ,  Stephen Sumner ,  Brian Wiseman ,  Anthony Tieben ,  Justin Strike

IPC分类号： B65D85/00

CPC分类号： H01L21/67353 ,  G03F1/66 ,  G03F7/70741 ,  H01L21/67359 ,  H01L21/67369 ,  H01L21/67376 ,  H01L21/67386

摘要： The present invention provides a reticle container that is equipped with a secondary container which houses the reticle and is housed in the primary container. The secondary container is held within the primary container with shock and vibration isolation members so that the secondary container has multiple degrees of freedom of motion within the primary container. The reticle is secured inside the secondary container such that shock and vibration transmission from the reticle container to the reticle is substantially attenuated.

公开(公告)号：US20060244942A1

公开(公告)日：2006-11-02

申请号：US11364860

申请日：2006-02-26

申请人： Barry Gregerson ,  David Halbmaier ,  Stephen Sumner ,  Brian Wiseman ,  Anthony Tieben ,  Justin Strike

发明人： Barry Gregerson ,  David Halbmaier ,  Stephen Sumner ,  Brian Wiseman ,  Anthony Tieben ,  Justin Strike

IPC分类号： G03B27/58

CPC分类号： G03B27/58 ,  H01L21/67353 ,  H01L21/67376 ,  H01L21/67386 ,  H01L21/67393

摘要： The present invention is a pod for containing a particulate sensitive substrate and for providing pressure equalization between the exterior and an interior environment of the pod and for minimizing gaseous fluid flow inside adjacent to the particulate sensitive substrate. The pod comprises a primary pod, a diaphragm positioned in a cover, the diaphragm having a normal undeflected position, the diaphragm deflectable from the normal undeflected position. Preferably, the pod comprises a secondary pod disposed in the primary pod defining a second enclosure for containing the particulate sensitive substrate. The pod may comprise a filter attached to the pod and providing gaseous fluid communication between the exterior of the pod and the interior of the pod. The diaphragm is responsive to rapid pressure changes and the filter is responsive to slower pressure changes and allows the diaphragm to return to its normal undeflected position.

公开(公告)号：US20050252827A1

公开(公告)日：2005-11-17

申请号：US11108619

申请日：2005-04-17

申请人： Anthony Tieben ,  John Lystad ,  David Halbmaier

发明人： Anthony Tieben ,  John Lystad ,  David Halbmaier

IPC分类号： B65D85/30 ,  H01L21/00 ,  H01L21/673

CPC分类号： H01L21/67017 ,  H01L21/67126 ,  H01L21/67379 ,  H01L21/67389 ,  H01L21/67393 ,  H01L21/67769

摘要： A substrate container includes an enclosure and an access structure formed in the enclosure and providing fluid access through the enclosure to an interior of the substrate container. The access structure includes an opening and an inner surface. A grommet is situated against the inner surface of the access structure.

摘要翻译： 衬底容器包括外壳和形成在外壳中的进入结构，并且通过外壳提供流体进入到基底容器的内部。 进入结构包括开口和内表面。 索环位于接近结构的内表面上。

公开(公告)号：US20060201958A1

公开(公告)日：2006-09-14

申请号：US11364812

申请日：2006-02-26

申请人： Anthony Tieben ,  Christian Andersen ,  Brian Wiseman

发明人： Anthony Tieben ,  Christian Andersen ,  Brian Wiseman

IPC分类号： B65D43/14 ,  B65D45/16 ,  B65D6/28

CPC分类号： G03F7/70741 ,  G03F1/66 ,  H01L21/67353 ,  H01L21/67359 ,  H01L21/67373

摘要： A hinged mask-package container with a spring latch for use in the transportation and storage of substrates. The container has a base and lid secured by a slidable spring latch that accepts the container's lid by sliding along the rail when the lid is pressed down to meet the base and then secures the lid and base by sliding back into its original position. The container also employs a living hinge made by an overmolding process whereby the hinge is formed in a first mold and then the container lid and base are formed and joined to the hinge in a second mold.

摘要翻译： 具有用于运输和储存基材的弹簧闩锁的铰接式面罩包装容器。 容器具有通过可滑动的弹簧闩锁固定的底座和盖子，该盖子通过沿着导轨按压而沿着轨道滑动而接收容器的盖子，以便与基座相接触，然后通过滑回到其初始位置来固定盖子和底座。 容器还采用通过包覆成型工艺制成的活动铰链，由此在第一模具中形成铰链，然后在第二模具中形成容器盖和基座并将其接合到铰链。

公开(公告)号：US20050230284A1

公开(公告)日：2005-10-20

申请号：US11108349

申请日：2005-04-17

申请人： Anthony Tieben ,  John Lystad

发明人： Anthony Tieben ,  John Lystad

IPC分类号： B65D85/00 ,  B65D85/30 ,  H01L21/00 ,  H01L21/673

CPC分类号： H01L21/67376 ,  H01L21/67126

摘要： A wafer container including an enclosure portion with a door frame defining an opening for insertion and removal of wafers and a door fittable in the door frame to seal the enclosure portion. A continuous elastomeric seal extends around the door inward of the periphery. The seal is positioned on a sealing surface proximate the perimeter of the door and may be partially inset in a radial groove in the door. In cross-section, the elastomeric seal has an inset portion and a sealing head coupled by a bridging portion. The sealing head has a foot portion projecting from the bridging portion toward the sealing surface of the door, and a head portion extending in a direction generally opposite the foot relative to the bridging portion. The door frame has a seal engaging structure so that when the door is seated in the door frame, the bridging portion of the elastomeric seal contacts the seal engaging structure displacing the bridging portion axially toward the sealing surface and causing the head of the sealing head to rotate radially and contact the seal engaging structure. The displacement action also affirmatively sets the foot of the sealing head in contact with the sealing surface of the door.

摘要翻译： 一种晶片容器，其包括具有限定用于插入和移除晶片的开口的门框的封闭部分和可装配在门框中以密封外壳部分的门。 连续的弹性密封件围绕着门的周边延伸。 密封件位于靠近门的周边的密封表面上，并且可以部分地插入门的径向凹槽中。 在横截面中，弹性体密封件具有插入部分和通过桥接部分联接的密封头。 密封头具有从桥接部分朝向门的密封表面突出的脚部，以及相对于桥接部分大致相对于脚的方向延伸的头部。 门框具有密封接合结构，使得当门被安置在门框中时，弹性体密封件的桥接部分接触密封接合结构，使桥接部分轴向朝向密封表面移动，并使密封头的头部 径向旋转并接触密封接合结构。 位移动作还肯定地将密封头的脚部与门的密封面接触。

公开(公告)号：US20050224391A1

公开(公告)日：2005-10-13

申请号：US10496756

申请日：2002-11-26

申请人： Gregory Bores ,  Surai Kalia ,  Anthony Tieben

发明人： Gregory Bores ,  Surai Kalia ,  Anthony Tieben

IPC分类号： B65D55/02 ,  B65D85/30 ,  B65D85/86 ,  H01L21/673

CPC分类号： H01L21/67373 ,  H01L21/67396 ,  Y10T29/49117

摘要： A front opening wafer carrier formed principally of plastic and comprising an enclosure portion (20) and a door (24) has a path to ground with respect to the wafers (22), the path to ground effectuated by the door (24). The base “ground” may be provided at the machine interface upon which the carrier sits, or through the robotic arm that grasps, operates and moves the door (24).

摘要翻译： 主要由塑料形成并且包括外壳部分（20）和门（24）的前开口晶片载体具有相对于晶片（22）接地的路径，该路径由门（24）实现。 基座“接地”可以设置在承载件所在的机器接口处，或者通过抓握，操作和移动门（24）的机器人臂来提供。