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    Substrate container with pressure equalization
    3.
    发明授权
    Substrate container with pressure equalization 失效
    具有压力均衡的基板容器

    公开(公告)号：US07528936B2

    公开(公告)日：2009-05-05

    申请号：US11364860

    申请日：2006-02-26

    申请人： Barry Gregerson ,  David Halbmaier ,  Stephen Sumner ,  Brian Wiseman ,  Anthony Mathius Tieben ,  Justin Strike

    发明人： Barry Gregerson ,  David Halbmaier ,  Stephen Sumner ,  Brian Wiseman ,  Anthony Mathius Tieben ,  Justin Strike

    IPC分类号： G03B27/58

    CPC分类号： G03B27/58 ,  H01L21/67353 ,  H01L21/67376 ,  H01L21/67386 ,  H01L21/67393

    摘要： The present invention is a pod for containing a particulate sensitive substrate and for providing pressure equalization between the exterior and an interior environment of the pod and for minimizing gaseous fluid flow inside adjacent to the particulate sensitive substrate. The pod comprises a primary pod, a diaphragm positioned in a cover, the diaphragm having a normal undeflected position, the diaphragm deflectable from the normal undeflected position. Preferably, the pod comprises a secondary pod disposed in the primary pod defining a second enclosure for containing the particulate sensitive substrate. The pod may comprise a filter attached to the pod and providing gaseous fluid communication between the exterior of the pod and the interior of the pod. The diaphragm is responsive to rapid pressure changes and the filter is responsive to slower pressure changes and allows the diaphragm to return to its normal undeflected position.

    摘要翻译： 本发明是用于容纳微粒敏感基材并用于在容器的外部和内部环境之间提供压力平衡并且用于最小化与颗粒敏感基材相邻的气态流体流动的容器的容器。 所述荚包括主荚，位于盖中的隔膜，所述膈肌具有正常的未偏转位置，所述膈肌可偏离正常的未偏转位置。 优选地，荚包括设置在主荚中的次荚，限定用于容纳微粒敏感基质的第二外壳。 荚可以包括附接到荚果的过滤器，并且在荚的外部和荚的内部之间提供气态流体连通。 隔膜响应于快速的压力变化，过滤器响应于较慢的压力变化，并允许隔膜返回其正常的未偏转位置。

    Environmental control in a reticle SMIF pod
    5.
    发明申请
    Environmental control in a reticle SMIF pod 有权
    光栅SMIF盒中的环境控制

    公开(公告)号：US20060266011A1

    公开(公告)日：2006-11-30

    申请号：US11396949

    申请日：2006-04-03

    申请人： David Halbmaier ,  Anthony Simpson ,  William Goodwin ,  Oleg Kishkovich ,  Thomas Kielbaso ,  Frank Manganiello

    发明人： David Halbmaier ,  Anthony Simpson ,  William Goodwin ,  Oleg Kishkovich ,  Thomas Kielbaso ,  Frank Manganiello

    IPC分类号： B01D50/00

    CPC分类号： H01L21/67017 ,  H01L21/67353 ,  H01L21/67359 ,  H01L21/67386 ,  H01L21/67389 ,  H01L21/67393

    摘要： The present invention provides a standardized mechanical interface (SMIF) reticle pod that is configured to provide a controlled environment for supporting a reticle wherein the controlled environment is maintained substantially free of crystal growth causing contaminants. Accordingly, there is provided a layered filter with filter elements capable of filtering particulates and adsorbing gaseous contaminants. The filter has an inwardly facing face generally planar shaped with a surface area that is substantially half or more of the area of the reticle face. The inwardly facing face is placed in close proximity to the reticle patterned surface and has an area that is a significant fraction of the reticle patterned surface area. The SMIF pod is also provided with a purge system configured to inject a very dry gas within the controlled environment to flush the controlled environment of contaminants as well as to regenerate the filter.

    摘要翻译： 本发明提供了一种标准化的机械接口（SMIF）掩模版盒，其被配置为提供用于支撑掩模版的受控环境，其中所述受控环境基本上不含引起污染物的晶体生长。 因此，提供了具有能够过滤颗粒并吸附气态污染物的过滤元件的层状过滤器。 过滤器具有大致平面形状的面向内的面，其表面面积大致为掩模版面的面积的一半或更多。 面向内的面被放置在靠近掩模版图案的表面，并且具有的面积是掩模版图案表面积的很大一部分。 SMIF吊舱还设有吹扫系统，其配置成在受控环境内喷射非常干燥的气体，以冲洗受污染物的受控环境以及再生过滤器。

    Wafer container door with particulate collecting structure
    7.
    发明申请
    Wafer container door with particulate collecting structure 失效
    晶圆集装箱门采用颗粒收集结构

    公开(公告)号：US20050258069A1

    公开(公告)日：2005-11-24

    申请号：US11108620

    申请日：2005-04-17

    申请人： David Halbmaier

    发明人： David Halbmaier

    IPC分类号： B65D85/00 ,  B65D85/30 ,  H01L21/673

    CPC分类号： H01L21/67373 ,  H01L21/67393 ,  Y10S206/832

    摘要： A substrate container having an enclosure with an access opening for inserting and removing substrates into an interior of the enclosure and a door chassis that is configured to selectively enclose the opening, the door chassis comprising a first wall having a peripheral wall extending therefrom. The substrate container includes a latch mechanism that is operably coupled with the chassis, the latch mechanism configured to operably secure the chassis to the opening. The door of the substrate container includes a textured particle capture region wherein particles generated by the latch mechanism and elsewhere are captured by the particle capture region.

    摘要翻译： 一种具有外壳的基板容器，该外壳具有用于将基板插入和移除到外壳的内部的进入开口，以及构造成选择性地封闭开口的门框架，该门框架包括具有从其延伸的周壁的第一壁。 基板容器包括与底盘可操作地联接的闩锁机构，闩锁机构构造成将底盘可操作地固定到开口。 基板容器的门包括织构化的颗粒捕获区域，其中由闩锁机构和其他地方产生的颗粒被颗粒捕获区捕获。