Piezo actuator
    4.
    发明申请
    Piezo actuator 审中-公开
    压电执行器

    公开(公告)号:US20060255695A1

    公开(公告)日:2006-11-16

    申请号:US10550932

    申请日:2004-08-04

    申请人: Axel Endriss

    发明人: Axel Endriss

    IPC分类号: H01L41/083

    摘要: A piezoelectric actuator is provided with a multilayer construction of piezoelectric layers perpendicular to the action direction, with inner electrodes located between the piezoelectric layers, which can be subjected to an electrical voltage via outer electrodes. At further piezoelectric layers with inner electrodes, an electrical sensor signal that is proportional to the actuation of the piezoelectric actuator can be picked up via further outer electrodes. The piezoelectric layers for the actuator part and the piezoelectric layers for the at least one sensor part are integrated in one component as a piezoelectric actuator, in such a way that individual piezoelectric layers for the sensor part are located at predetermined spacings or also side by side between the piezoelectric layers for the actuator part.

    摘要翻译: 压电致动器设置有与作用方向垂直的压电层的多层结构,其中内电极位于压电层之间,其可经由外电极经受电压。 在具有内部电极的另外的压电层上,可以通过另外的外部电极拾取与压电致动器的致动成比例的电传感器信号。 用于致动器部分的压电层和用于至少一个传感器部分的压电层被集成在作为压电致动器的一个部件中,使得用于传感器部件的各个压电层位于预定间隔处或并排 在用于致动器部件的压电层之间。