Vapor phase chemical infiltration process of a material into a porous
substrate at controlled surface temperature
    1.
    发明授权
    Vapor phase chemical infiltration process of a material into a porous substrate at controlled surface temperature 失效
    将材料的气相化学渗透过程控制在表面温度下进入多孔基材

    公开(公告)号:US5652030A

    公开(公告)日:1997-07-29

    申请号:US635933

    申请日:1996-04-25

    摘要: The substrate (10) is placed in an enclosure (12) and is heated so as to establish therein a temperature gradient such that the substrate has a higher temperature in portions that are remote from its exposed surfaces than at its exposed surfaces. A reaction gas constituting a precursor for the material to be infiltrated is admitted into the enclosure, with formation of the material being enhanced in those portions of the substrate that are at higher temperature. At the beginning of the infiltration process, and at least during the major portion thereof, substrate heating is controlled in such a manner as to maintain the temperature of its exposed surfaces at a value that is no greater than the minimum temperature for the reaction gas to deposit the material that is to be infiltrated, while portions of the substrate that are remote from its exposed surfaces are at a temperature that is greater than the minimum temperature for deposition.

    摘要翻译: PCT No.PCT / FR94 / 01090 Sec。 371日期:1996年4月25日 102(e)日期1996年4月25日PCT 1994年9月20日PCT公布。 公开号WO95 / 11868 日期1995年5月4日将衬底(10)放置在外壳(12)中并被加热以便在其中建立温度梯度,使得衬底在远离其暴露表面的部分中比在其暴露表面处具有更高的温度 。 构成待渗透材料的前体的反应气体被允许进入外壳,在衬底的处于较高温度的部分中材料的形成被增强。 在渗透过程开始时,并且至少在其主要部分期间,基板加热被控制为将其暴露表面的温度保持在不大于反应气体的最低温度的值 沉积要渗透的材料,而远离其暴露表面的基底的部分处于大于沉积最低温度的温度。

    Chemical vapor infiltration method with variable infiltration parameters
    6.
    发明授权
    Chemical vapor infiltration method with variable infiltration parameters 失效
    化学气相渗透法具有可变渗透参数

    公开(公告)号:US6001419A

    公开(公告)日:1999-12-14

    申请号:US930743

    申请日:1997-10-06

    摘要: Between the start and the end of the chemical vapor infiltration process, filtration conditions are modified by causing at least one of the following infiltration parameters to vary: retention time of the gas, pressure, temperature, concentration of precursor in the gas, and concentration of dopant, if any, in the gas; thereby adapting infiltration conditions to changes in the porometry of the substrate in order to control the microstructure of the material deposited within the substrate, in particular in order to conserve a microstructure that is constant.

    摘要翻译: PCT No.PCT / FR96 / 00530 Sec。 371日期:1997年10月6日 102(e)日期1997年10月6日PCT 1996年4月9日PCT PCT。 公开号WO96 / 31447 日期1996年10月10日在化学气相渗透过程的开始和结束之间,通过使至少一个以下渗透参数变化来改变渗透条件:气体的保留时间,压力,温度,前体浓度 气体和气体中掺杂剂的浓度(如果有的话); 从而使渗透条件适应于衬底的孔隙率的变化,以便控制沉积在衬底内的材料的微结构,特别是为了保持恒定的微结构。

    Chemical vapor infiltration process of a pyrocarbon matrix within a
porous substrate with creation of a temperature gradient in the
substrate
    7.
    发明授权
    Chemical vapor infiltration process of a pyrocarbon matrix within a porous substrate with creation of a temperature gradient in the substrate 失效
    在多孔基材内的热解碳基质的化学气相渗透过程,在基质中产生温度梯度

    公开(公告)号:US5789026A

    公开(公告)日:1998-08-04

    申请号:US632487

    申请日:1996-04-25

    CPC分类号: C04B35/806 C04B35/83

    摘要: The substrate (10) is placed in an enclosure (12) and is heated so as to establish a temperature gradient within the substrate such that the substrate has a temperature in its portions remote from its exposed surfaces that is greater than its temperature at said surfaces. A gas constituting a precursor of carbon and comprising at least one saturated or unsaturated hydrocarbon is admitted into the enclosure, with the formation of pyrolytic carbon be favored in the higher temperature portions of the substrate. The gas comprises a mixture containing at least one saturated or unsaturated hydrocarbon and hydrogen, and the substrate is heated in such a manner as to establish a temperature gradient within the substrate on either side of a temperature of 1500 K, with hydrogen having an inhibiting role at temperatures below 1500 K.

    摘要翻译: PCT No.PCT / FR94 / 01074 Sec。 371日期:1996年4月25日 102(e)日期1996年4月25日PCT提交1994年9月14日PCT公布。 公开号WO95 / 11867 日期1995年5月4日将衬底(10)放置在外壳(12)中并被加热以便在衬底内建立温度梯度,使得衬底的远离其暴露表面的部分的温度大于其 所述表面的温度。 构成碳前体并含有至少一种饱和或不饱和烃的气体进入外壳,热解碳的形成在基材的较高温度部分受到青睐。 气体包括含有至少一种饱和或不饱和烃和氢的混合物,并且以这样一种方式加热底物,以便在1500K温度的两侧在衬底内建立温度梯度,其中氢具有抑制作用 温度低于1500K。