公开(公告)号：US20120168624A1

公开(公告)日：2012-07-05

申请号：US13325498

申请日：2011-12-14

申请人： Bertrand DUPONT ,  Michael TCHAGASPANIAN

发明人： Bertrand DUPONT ,  Michael TCHAGASPANIAN

IPC分类号： G01J5/20 ,  H01L27/146

CPC分类号： G01J5/22

摘要： A measurement system including a reference resistive sensor traversed by a reference current, with a reference arm having a reference resistance and being traversed by the reference current in order to produce a reference voltage between its ends, at least one measurement resistive sensor traversed by a measurement current that depends on a measurement taken by the measurement resistive sensor, a measurement mirror arm traversed by a current, and a device for measuring the difference between the measurement current and the current traversing the measurement mirror arm. The resistance of the measurement mirror arm of each measurement resistive sensor is equal to the reference resistance and the measurement system further includes a device for applying, to each measurement mirror arm, the reference voltage. The device for applying the reference voltage being designed to be isolated to a current of the measurement mirror arm when the reference voltage is applied.

摘要翻译： 一种测量系统，包括由参考电流穿过的参考电阻传感器，参考臂具有参考电阻并被参考电流穿过，以便在其端部之间产生参考电压，至少一个测量电阻传感器被测量 取决于由测量电阻式传感器测量的电流，由电流穿过的测量镜臂，以及用于测量测量电流与穿过测量镜臂的电流之间的差异的装置。 每个测量电阻传感器的测量镜臂的电阻等于参考电阻，并且测量系统还包括用于向每个测量镜臂施加参考电压的装置。 用于施加参考电压的装置被设计成当施加参考电压时与测量镜臂的电流隔离。

公开(公告)号：US20100243892A1

公开(公告)日：2010-09-30

申请号：US12720340

申请日：2010-03-09

申请人： Bertrand DUPONT

发明人： Bertrand DUPONT

IPC分类号： G01J5/30 ,  G01J5/02

CPC分类号： G01J5/22 ,  G01J5/02 ,  G01J5/024 ,  H01L23/5223 ,  H01L27/14618 ,  H01L27/14669 ,  H01L28/60 ,  H01L2924/0002 ,  H04N5/3651 ,  H01L2924/00

摘要： A thermal imaging microelectronic device comprising: a support (200), a plurality of metal levels (M1, . . . , M5, M6) for interconnecting electronic components formed on the support, an array of thermal detectors formed on the support, each detector including a membrane (210) with which radiant energy may be absorbed and one or more electric signals may be provide depending on the absorbed radiant energy, and means for reading out the electric signals from the membrane, the readout means being integrated to the support, at least several of said detectors having readout means provided with an integrator comprising at least one MIM integration capacitor formed facing the membrane, the MIM capacitor having at least one upper plate (244) made in a given interconnection metal level of said plurality of interconnection metal levels (M1, . . . , M5, M6).

摘要翻译： 一种热成像微电子器件，包括：支撑件（200），用于互连形成在所述支撑件上的电子部件的多个金属级（M1，...，M5，M6），形成在所述支撑件上的热检测器阵列，每个检测器 包括可以吸收辐射能并根据吸收的辐射能提供一个或多个电信号的膜（210），以及用于从所述膜读出电信号的装置，所述读出装置被集成到所述支架上， 所述检测器中的至少几个具有读出装置，该读出装置设置有积分器，该积分器包括面向膜的至少一个MIM积分电容器，所述MIM电容器具有至少一个上板（244），所述上板在所述多个互连金属的给定互连金属层 水平（M1，...，M5，M6）。