摘要:
In a method for fabricating a semiconductor device, a substrate may be provided that includes: a base, an active fin that projects from an upper surface of the base and is integrally formed with the base, and a buffer oxide film pattern formed on the active fin in contact with the active fin. A first dummy gate film may be formed on the substrate to cover the buffer oxide film pattern and the first dummy gate film may be smoothed to expose the buffer oxide film pattern. A second dummy gate film may be formed on the exposed buffer oxide film pattern and the first dummy gate film.
摘要:
In a method for fabricating a semiconductor device, a substrate may be provided that includes: a base, an active fin that projects from an upper surface of the base and is integrally formed with the base, and a buffer oxide film pattern formed on the active fin in contact with the active fin. A first dummy gate film may be formed on the substrate to cover the buffer oxide film pattern and the first dummy gate film may be smoothed to expose the buffer oxide film pattern. A second dummy gate film may be formed on the exposed buffer oxide film pattern and the first dummy gate film.
摘要:
A method includes forming a plurality of dummy gate structures on a substrate, each dummy gate structure including a dummy gate electrode and a dummy gate mask, forming a first insulation layer on the substrate and the dummy gate structures to fill a first space between the dummy gate structures, planarizing upper portions of the first insulation layer and the dummy gate structures, removing the remaining first insulation layer to expose a portion of the substrate, forming an etch stop layer on the remaining dummy gate structures and the exposed portion of the substrate, forming a second insulation layer on the etch stop layer to fill a second space between the dummy gate structures, planarizing upper portions of the second insulation layer and the etch stop layer to expose the dummy gate electrodes, removing the exposed dummy gate electrodes to form trenches, and forming metal gate electrodes in the trenches.
摘要:
A method includes forming a plurality of dummy gate structures on a substrate, each dummy gate structure including a dummy gate electrode and a dummy gate mask, forming a first insulation layer on the substrate and the dummy gate structures to fill a first space between the dummy gate structures, planarizing upper portions of the first insulation layer and the dummy gate structures, removing the remaining first insulation layer to expose a portion of the substrate, forming an etch stop layer on the remaining dummy gate structures and the exposed portion of the substrate, forming a second insulation layer on the etch stop layer to fill a second space between the dummy gate structures, planarizing upper portions of the second insulation layer and the etch stop layer to expose the dummy gate electrodes, removing the exposed dummy gate electrodes to form trenches, and forming metal gate electrodes in the trenches.
摘要:
Methods of manufacturing a semiconductor device include forming integrated structures of polysilicon patterns and hard mask patterns on a substrate divided into at least an NMOS forming region and a PMOS forming region. A first preliminary insulating interlayer is formed on the integrated structures. A first polishing of the first preliminary insulating interlayer is performed until at least one upper surface of the hard mask patterns is exposed, to form a second preliminary insulating interlayer. The second preliminary insulating interlayer is etched until the upper surfaces of the hard mask patterns are exposed, to form a third preliminary insulating interlayer. A second polishing of the hard mask patterns and the third preliminary insulating interlayer is performed until the polysilicon patterns are exposed to form an insulating interlayer. The polysilicon patterns are removed to form an opening. A metal material is deposed to form a gate electrode pattern in the opening.
摘要:
A victim system detector for detecting whether a second wireless communication system uses frequency bands that are used by a first wireless communication system (detecting whether the second wireless communication system is a victim system) includes a correlator and a decision unit. The correlator calculates a correlation value between a frequency domain baseband signal associated with the first wireless communication system and a correlation sequence of the second wireless communication system. The decision unit determines, based on the correlation value, whether the second wireless communication system is a victim system. Therefore, the victim system is detected accurately and efficiently.
摘要:
Disclosed is a base pad of polishing pad, which is used in conjunction with polishing slurry during a chemical-mechanical polishing or planarizing process, and a multilayer pad using the same. Since the base pad according to the present invention does not have fine pores, it is possible to prevent premeation of polishing slurry and water and to avoid nonuniformity of physical properties. Thereby, it is possible to lengthen the lifetime of the polishing pad.
摘要:
The present invention relates in general to a channel CODEC to increase the transmitting effect on a communication channel of a communication system, and more specifically to a branch metric module of a viterbi decoder. The module includes an operator for operating and outputting the differential magnitude of two signals, one signal being a code word generated to perform the viterbi decode and the other being a signal transmitted through the channel. An adder sums and outputs the data which is outputted to it from the operator. A receiving code word converter converts the magnitude of any of bits by the linear sampling quantization process, and non-linearly converts it in accordance with a preestimated or predetermined format. A number of operators calculate the magnitude between two signals at the absolute value to convert the magnitude of an inputted generative code word and the magnitude of the non-linear converted receiving code word. The adder sums and outputs the result to a branch metric converter, which converts the output according to the preestimated format.
摘要:
Disclosed is a clothes dryer, comprising: a body; a drum rotatably installed at the body; a duct for guiding air exhausted from the drum; and a filter assembly for filtering lint included in the air exhausted from the drum. The filter assembly includes a lint filter and a cover filter, and a lint collector encompassed by the lint filter and the cover filter. The clothes dryer includes sensing means for sensing whether the lint filter has been mounted to a precise position or not. The sensing means consists of a magnet mounted to a mesh frame of the lint filter, and a reed switch mounted to a cover guide.
摘要:
Methods of manufacturing a semiconductor device include forming integrated structures of polysilicon patterns and hard mask patterns on a substrate divided into at least an NMOS forming region and a PMOS forming region. A first preliminary insulating interlayer is formed on the integrated structures. A first polishing of the first preliminary insulating interlayer is performed until at least one upper surface of the hard mask patterns is exposed, to form a second preliminary insulating interlayer. The second preliminary insulating interlayer is etched until the upper surfaces of the hard mask patterns are exposed, to form a third preliminary insulating interlayer. A second polishing of the hard mask patterns and the third preliminary insulating interlayer is performed until the polysilicon patterns are exposed to form an insulating interlayer. The polysilicon patterns are removed to form an opening. A metal material is deposed to form a gate electrode pattern in the opening.