MULTIFUNCTIONAL MATERIALS FOR TEMPORARY BONDING

    公开(公告)号:US20210332188A1

    公开(公告)日:2021-10-28

    申请号:US17241174

    申请日:2021-04-27

    Abstract: The materials and methods disclosed can be used for applications such as temporary bond and debond of semiconductor and display substrates. These materials have sufficiently low melt rheologies to be used as a bonding layer and can crosslink/cure to allow for reduction in material flow over long periods of time. This class of materials also incorporates the ability to be used as a single-layer system for debonding purposes and typically uses laser debonding for its release mechanism. These materials also allow for solvent cleanability using very mild acidic conditions instead of the typical harsh conditions used on curable layers.

    PHOTONIC DEBONDING FOR WAFER-LEVEL PACKAGING APPLICATIONS

    公开(公告)号:US20220127496A1

    公开(公告)日:2022-04-28

    申请号:US17504272

    申请日:2021-10-18

    Abstract: A method is described for debonding a carrier and device substrate using a high-intensity, pulsed, broadband light system that is suitable for wafer-level packaging applications. The carrier substrate is a transparent wafer with a light absorbing layer on one side of the wafer. This method utilizes the high intensity light to rapidly heat up the light absorbing layer to decompose or melt a bonding material layer that is adjacent to the light absorbing layer. After exposure to light, the carrier substrate can be lifted off the surface of the device wafer with little or no force.

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