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公开(公告)号:US20140083164A1
公开(公告)日:2014-03-27
申请号:US14116092
申请日:2011-06-30
IPC分类号: B81B3/00
CPC分类号: B81B3/0064 , B81B2201/0235 , B81C99/003 , G01H11/00 , G01V1/162 , G01V13/00
摘要: A micro electromechanical systems (MEMS) sensor is excited. The response of the MEMS sensor is measured. The MEMS sensor is calibrated.
摘要翻译: 微机电系统(MEMS)传感器被激发。 测量MEMS传感器的响应。 MEMS传感器被校准。
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公开(公告)号:US08705774B2
公开(公告)日:2014-04-22
申请号:US13123040
申请日:2009-01-14
申请人: Adel Jilani , James McKinnell , Brian Homeijer , Jennifer Wu , Melinda Valencia
发明人: Adel Jilani , James McKinnell , Brian Homeijer , Jennifer Wu , Melinda Valencia
IPC分类号: H04R25/00
CPC分类号: H04R17/02 , H04R21/02 , H04R2201/003
摘要: Acoustic transducer means are provided. A monolithic semiconductor layer defines a plate, a pair of oppositely disposed torsional hinges, a flexible extension and at least a portion of a support structure. Acoustic pressure communicated to the plate results in tensile strain of the flexible extension. The flexible extension provides a varying electrical characteristic responsive to the tensile strain. An electric signal corresponding to the acoustic pressure can be derived from the varying electrical characteristic of the flexible extension.
摘要翻译: 提供声学传感器装置。 单片半导体层限定板,一对相对设置的扭转铰链,柔性延伸部和支撑结构的至少一部分。 与板连通的声压导致柔性延伸部的拉伸应变。 灵活的延伸提供响应于拉伸应变的变化的电特性。 可以从柔性延伸部的变化的电特性导出对应于声压的电信号。
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公开(公告)号:US20120027236A1
公开(公告)日:2012-02-02
申请号:US13123040
申请日:2009-01-14
申请人: Adel Jilani , James McKinnell , Brian Homeijer , Jennifer Wu , Melinda Valencia , James McKinnell , Biian Homeijer , Jennifer Wu , Melinda Valencia
发明人: Adel Jilani , James McKinnell , Brian Homeijer , Jennifer Wu , Melinda Valencia , James McKinnell , Biian Homeijer , Jennifer Wu , Melinda Valencia
CPC分类号: H04R17/02 , H04R21/02 , H04R2201/003
摘要: Acoustic transducer means are provided. A monolithic semiconductor layer defines a plate, a pair of oppositely disposed torsional hinges, a flexible extension and at least a portion of a support structure. Acoustic pressure communicated to the plate results in tensile strain of the flexible extension. The flexible extension provides a varying electrical characteristic responsive to the tensile strain. An electric signal corresponding to the acoustic pressure can be derived from the varying electrical characteristic of the flexible extension.
摘要翻译: 提供声学传感器装置。 单片半导体层限定板,一对相对设置的扭转铰链,柔性延伸部和支撑结构的至少一部分。 与板连通的声压导致柔性延伸部的拉伸应变。 灵活的延伸提供响应于拉伸应变的变化的电特性。 可以从柔性延伸部的变化的电特性导出对应于声压的电信号。
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