摘要:
In an optical scanning system for detecting particles and pattern defects on a sample surface, a light beam is focused to an illuminated spot on the surface and the spot is scanned across the surface along a scan line. A detector is positioned adjacent to the surface to collect scattered light from the spot where the detector includes a one- or two-dimensional array of sensors. Light scattered from the illuminated spot at each of a plurality of positions along the scan line is focused onto a corresponding sensor in the array. A plurality of detectors symmetrically placed with respect to the illuminating beam detect laterally and forward scattered light from the spot. The spot is scanned over arrays of scan line segments shorter than the dimensions of the surface. A bright field channel enables the adjustment of the height of the sample surface to correct for errors caused by height variations of the surface. Different defect maps provided by the output of the detectors can be compared to identify and classify the defects. The imaging function of the array of sensors combines the advantages of a scanning system and an imaging system while improving signal/background ratio of the system.
摘要:
In an optical scanning system for detecting particles and pattern defects on a sample surface, a light beam is focused to an illuminated spot on the surface and the spot is scanned across the surface along a scan line. A detector is positioned adjacent to the surface to collect scattered light from the spot where the detector includes a one- or two-dimensional array of sensors. Light scattered from the illuminated spot at each of a plurality of positions along the scan line is focused onto a corresponding sensor in the array. A plurality of detectors symmetrically placed with respect to the illuminating beam detect laterally and forward scattered light from the spot. The spot is scanned over arrays of scan line segments shorter than the dimensions of the surface. A bright field channel enables the adjustment of the height of the sample surface to correct for errors caused by height variations of the surface. Different defect maps provided by the output of the detectors can be compared to identify and classify the defects. The imaging function of the array of sensors combines the advantages of a scanning system and an imaging system while improving signal/background ratio of the system.
摘要:
An optical scanning system and method for detecting anomalies, including pattern defects and particulate contaminants, on both patterned and unpatterned surfaces, using a light beam, scanning at a grazing angle with respect to the surfaces, a plurality of detectors and an interchannel communication scheme to compare data from each detector, which facilitates characterizing anomalies. The light beam illuminates a spot on the surface which is scanned over a short scan-line. The surface is moved in a manner so that the spot is scanned over its entire area in a serpentine fashion along adjacent striped regions. The plurality of detectors include groups of collector channels disposed circumferentially around the surface, a bright field reflectivity/autoposition channel, an alignment/registration channel and an imaging channel. The collector channels in each group are symmetrically disposed, in the azimuth, on opposite sides of the center of the scan line. The position of the collector channels, as well as the polarization of the beam, facilitates distinguishing pattern defects from particulate contaminants. The bright field reflectivity/autoposition channel is positioned to receive specularly reflected light that carries information concerning local variation in reflectivity, which is used to classify detected anomalies, as well as determine variations in the height of the surface. The alignment/registration channel is positioned to detect a maximum of the light scattered from the pattern on the surface to ensure that the streets of die present on the surface are oriented so as not to be oblique with respect to the scan line. The imaging channel combines the advantages of a scanning system and an imaging system while improving signal/background ratio of the present system.
摘要:
Systems and methods for inspecting a surface of a specimen such as a semiconductor wafer are provided. A system may include an illumination system configured to direct a first beam of light to a surface of the specimen at an oblique angle of incidence and to direct a second beam of light to a surface of the specimen at a substantially normal angle. The system may also include a collection system configured to collect at least a portion of the first and second beams of light returned from the surface of the specimen. In addition, the system may include a detection system. The detection system may be configured to process the collected portions of the first and second beams of light. In this manner, a presence of defects on the specimen may be detected from the collected portions of the first and second beams of light.
摘要:
A bronchoalveolar lavage instillation/aspiration system which includes (i) a needleless bronchoalveolar lavage instillation/aspiration device with a barrel member including a barrel lumen having a distal aperture and a self-sealing member configured for maintaining a fluid-disruptable, resealable barrier to the distal aperture; and (ii) a catheter assembly configured to provide a patent path of fluid communication between the instillation/aspiration device and a patient bronchial passage, where the catheter includes a wedging structure configured to engage a patient bronchial passage. In another aspect, embodiments of the present invention may include one or more methods of making and using a system or component described herein.
摘要:
Light scattered from illuminated spot on a patterned wafer is first passed through a di-electric filter and then by an optical fiber bundle to a detector. The di-electric filter controls the aperture of the light that is passed to a desired azimuth angle and the optical fiber further limits the aperture.
摘要:
A catheter assembly configured for use in a non-bronchoscopic bronchoalveolar lavage procedure. The catheter assembly may include an inner catheter member having an inner catheter lumen and an outer catheter member having an outer catheter lumen, where the inner catheter member is disposed longitudinally and coaxially through at least a lengthwise portion of the outer catheter lumen, a distal end portion of the outer catheter includes an atraumatically-shaped disruptable seal—which seal includes at least a pair of overlapping slits that extend at least partially through an internal distal end wall portion of the outer catheter—and where a distal end portion of the inner catheter includes a wedging structure configured to at least partially sealingly contact an inner circumference of a passage in a lower portion of a patient lung.
摘要:
An illuminated rectal retractor for creating a working space for dissecting instruments in support of a surgical procedure such as rectal examination or for the removal of polyps or hemorrhoids or other types of procedures which require the illumination and access to tissue in the rectal area of a patient, the illuminated retractor having a handle member pivotally connected at an obtuse angle to a first cylindrical and elongate section and a second elongate section that is releasably connected to the first elongate section and a portion of the second elongate section defining an illumination input end portion which is optically coupled to a light source so that the second elongate section is substantially illuminated, and, an operating channel extends along the lengthwise dimension of the first elongate section and the operating channel is illuminated by the second elongate section in use.
摘要:
A system and method for using a transformation engine to dynamically transform source instance document changes to target instance document changes is presented. A mapping developer creates and stores “model mapping definitions” that map source model elements to target model elements. In turn, the transformation engine receives source instance document changes from a user, and identifies the model mapping definition that corresponds to the changes. The transformation engine analyzes the model mapping definition, and locates a transformer that is defined in the model mapping definition. As a result, the transformation engine uses the transformer to generate a target object based upon the changes to the source instance document. The target object is inserted into a target instance document, which the user views.
摘要:
A system and method for automatic instance data mapping generation is presented. A developer uses edit commands, such as mouse commands and keyboard commands, to update a model. For example, a software developer may upgrade “Application XYZ” from version 1.0 to version 2.0 in order to include a simpler approach to import images, as well as the ability to import newer image format types. As a developer updates a model using edit commands, the edit commands are stored in a migration mapping definition. In turn, the migration mapping definition is deployed, along with the updated model, to an end user. The end user then uses the migration mapping definition to migrate instance data generated by the original model to instance data that is usable by the updated model.