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    INFILTRATING CARBON NANOTUBES WITH CARBON TO PREVENT DELAMINATION FROM A SUBSTRATE
    1.
    发明申请
    INFILTRATING CARBON NANOTUBES WITH CARBON TO PREVENT DELAMINATION FROM A SUBSTRATE 审中-公开

    公开(公告)号：US20200248302A1

    公开(公告)日：2020-08-06

    申请号：US16854534

    申请日：2020-04-21

    申请人： Brigham Young University

    发明人： Robert Davis ,  Richard Vanfleet ,  Kyle Zufelt ,  David Jensen

    IPC分类号： C23C16/04 ,  C01B32/16 ,  C23C16/01 ,  C23C16/26

    摘要： A method includes depositing a layer of alumina over a silicon substrate, providing a patterned photoresist over the layer of alumina, providing an iron catalyst layer over the patterned photoresist, providing the iron catalyst layer over an exposed portion of the alumina, providing a first iron catalyst site over a first portion of the alumina, providing a second iron catalyst site over a second portion of the alumina, growing a first carbon nanotube on the first iron catalyst site, growing a second carbon nanotube on the second iron catalyst site, infiltrating the first carbon nanotube and the second carbon nanotube with carbon, and cooling both the first carbon nanotube and the second carbon nanotube. The infiltrating strengthens the first carbon nanotube and the second carbon nanotube to not delaminate from the substrate when the first carbon nanotube and the second carbon nanotube are cooled.