公开(公告)号：US10923375B2

公开(公告)日：2021-02-16

申请号：US16692359

申请日：2019-11-22

Applicant: Brooks Automation, Inc.

Inventor： Radik Sunugatov ,  Robert Carlson ,  Mike Krolak

IPC: H01L21/67 ,  H01L21/677 ,  B65G1/137

Abstract: A substrate loading device including a frame adapted to connect to a substrate processing apparatus, the frame having a transport opening through which substrates are transported to the processing apparatus, a cassette support connected to the frame for holding at least one substrate cassette container proximate the transport opening, the support configured so that a sealed internal atmosphere of the container is accessed from the support at predetermined access locations of the container, and the cassette support has a predetermined continuous steady state differential pressure plenum region, determined at least in part by boundaries of fluid flow generating differential pressure, so that the predetermined continuous steady state differential pressure plenum region defines a continuously steady state fluidic flow isolation barrier disposed on the support between the predetermined access locations of the container and another predetermined section of the support isolating the other predetermined section from the predetermined access locations.

公开(公告)号：US11476142B2

公开(公告)日：2022-10-18

申请号：US17176949

申请日：2021-02-16

Applicant: Brooks Automation, Inc.

Inventor： Radik Sunugatov ,  Robert Carlson ,  Mike Krolak

IPC: H01L21/67 ,  H01L21/677 ,  B65G1/137

Abstract: A substrate loading device including a frame adapted to connect to a substrate processing apparatus, the frame having a transport opening through which substrates are transported to the processing apparatus, a cassette support connected to the frame for holding at least one substrate cassette container proximate the transport opening, the support configured so that a sealed internal atmosphere of the container is accessed from the support at predetermined access locations of the container, and the cassette support has a predetermined continuous steady state differential pressure plenum region, determined at least in part by boundaries of fluid flow generating differential pressure, so that the predetermined continuous steady state differential pressure plenum region defines a continuously steady state fluidic flow isolation barrier disposed on the support between the predetermined access locations of the container and another predetermined section of the support isolating the other predetermined section from the predetermined access locations.

公开(公告)号：US12002696B2

公开(公告)日：2024-06-04

申请号：US17362599

申请日：2021-06-29

Applicant: Brooks Automation, Inc.

Inventor： Radik Sunugatov ,  Roy R. Wang ,  Karl Shieh ,  Justo Graciano ,  Austin Wise ,  Caspar Hansen ,  Erick Pastor

IPC: H01L21/67 ,  G06T7/13 ,  H01L21/673 ,  H01L21/677

CPC classification number: H01L21/67265 ,  G06T7/13 ,  H01L21/6732 ,  H01L21/67778

Abstract: A semiconductor wafer mapping apparatus comprising a frame forming a wafer load opening communicating with a load station for a substrate carrier disposed to hold more than one wafers vertically distributed in the substrate carrier for loading through the wafer load opening, a movable arm movably mounted to the frame so as to move relative to the wafer load opening and having at least one end effector movably mounted to the movable arm to load wafers from the substrate carrier through the wafer load opening, an image acquisition system including an array of cameras arranged on a common support and each camera fixed with respect to the common support that is static with respect to each camera of the array of cameras, wherein each respective camera is positioned with a field of view disposed to view through the wafer load opening with the common support positioned by the movable arm.

公开(公告)号：US11610793B2

公开(公告)日：2023-03-21

申请号：US17341638

申请日：2021-06-08

Applicant: Brooks Automation, Inc.

Inventor： Radik Sunugatov ,  Robert Carlson

IPC: H01L21/67 ,  B65G49/06

Abstract: Substrate loading device including a frame adapted to connect the substrate loading device to a substrate processing apparatus, the frame having a transport opening through which substrates are transported between the substrate loading device and the substrate processing apparatus, a cassette support connected to the frame for holding at least one substrate cassette container for transfer of substrates to and from the at least one substrate cassette container through the transport opening, and selectably variable cassette support purge ports with a variable purge port nozzle outlet, variable between more than one selectable predetermined purge port nozzle characteristics, disposed on the cassette support, each of the more than one purge port nozzle characteristics being configured so that the purge port nozzle outlet with each selected predetermined purge port nozzle characteristic complements and couples to at least one purge port of the at least one substrate cassette container.

公开(公告)号：US20210407831A1

公开(公告)日：2021-12-30

申请号：US17362599

申请日：2021-06-29

Applicant: Brooks Automation, Inc.

Inventor： Radik Sunugatov ,  Roy R. Wang ,  Karl Shieh ,  Justo Graciano ,  Austin Wise ,  Caspar Hansen ,  Erick Pastor

IPC: H01L21/67 ,  H01L21/673 ,  H01L21/677 ,  G06T7/13

Abstract: A semiconductor wafer mapping apparatus comprising a frame forming a wafer load opening communicating with a load station for a substrate carrier disposed to hold more than one wafers vertically distributed in the substrate carrier for loading through the wafer load opening, a movable arm movably mounted to the frame so as to move relative to the wafer load opening and having at least one end effector movably mounted to the movable arm to load wafers from the substrate carrier through the wafer load opening, an image acquisition system including an array of cameras arranged on a common support and each camera fixed with respect to the common support that is static with respect to each camera of the array of cameras, wherein each respective camera is positioned with a field of view disposed to view through the wafer load opening with the common support positioned by the movable arm.

公开(公告)号：US20210296142A1

公开(公告)日：2021-09-23

申请号：US17341638

申请日：2021-06-08

Applicant: Brooks Automation, Inc.

Inventor： Radik Sunugatov ,  Robert Carlson

IPC: H01L21/67 ,  H01L21/677 ,  H01L21/673 ,  B65G47/90

Abstract: Substrate loading device including a frame adapted to connect the substrate loading device to a substrate processing apparatus, the frame having a transport opening through which substrates are transported between the substrate loading device and the substrate processing apparatus, a cassette support connected to the frame for holding at least one substrate cassette container for transfer of substrates to and from the at least one substrate cassette container through the transport opening, and selectably variable cassette support purge ports with a variable purge port nozzle outlet, variable between more than one selectable predetermined purge port nozzle characteristics, disposed on the cassette support, each of the more than one purge port nozzle characteristics being configured so that the purge port nozzle outlet with each selected predetermined purge port nozzle characteristic complements and couples to at least one purge port of the at least one substrate cassette container.

公开(公告)号：US20210249292A1

公开(公告)日：2021-08-12

申请号：US17176949

申请日：2021-02-16

Applicant: Brooks Automation, Inc.

Inventor： Radik Sunugatov ,  Robert Carlson ,  Mike Krolak

IPC: H01L21/677 ,  B65G1/137

Abstract: A substrate loading device including a frame adapted to connect to a substrate processing apparatus, the frame having a transport opening through which substrates are transported to the processing apparatus, a cassette support connected to the frame for holding at least one substrate cassette container proximate the transport opening, the support configured so that a sealed internal atmosphere of the container is accessed from the support at predetermined access locations of the container, and the cassette support has a predetermined continuous steady state differential pressure plenum region, determined at least in part by boundaries of fluid flow generating differential pressure, so that the predetermined continuous steady state differential pressure plenum region defines a continuously steady state fluidic flow isolation barrier disposed on the support between the predetermined access locations of the container and another predetermined section of the support isolating the other predetermined section from the predetermined access locations.

公开(公告)号：US11031265B2

公开(公告)日：2021-06-08

申请号：US16692443

申请日：2019-11-22

Applicant: Brooks Automation, Inc.

Inventor： Radik Sunugatov ,  Robert Carlson

IPC: H01L21/67 ,  B65G49/06

Abstract: Substrate loading device including a frame adapted to connect the substrate loading device to a substrate processing apparatus, the frame having a transport opening through which substrates are transported between the loading device and processing apparatus, a cassette support for holding at least one substrate cassette container, and cassette support purge ports with purge port nozzle locations disposed on the cassette support, each nozzle location being configured so that a nozzle at the nozzle location couples to at least one purge port of the substrate cassette container, wherein each nozzle location defines an interchangeable purge port nozzle interface so that different interchangeable purge port nozzles are removably mounted to respective nozzle interfaces of the nozzle locations that correspond to the different nozzle configurations of the interchangeable purge port nozzle modules, in conformance with and effecting coupling to different ports of different substrate cassette containers having different purge port characteristics.

公开(公告)号：US20200168488A1

公开(公告)日：2020-05-28

申请号：US16692443

申请日：2019-11-22

Applicant: Brooks Automation, Inc.

Inventor： Radik Sunugatov ,  Robert Carlson

IPC: H01L21/67 ,  B65G49/06

Abstract: Substrate loading device including a frame adapted to connect the substrate loading device to a substrate processing apparatus, the frame having a transport opening through which substrates are transported between the loading device and processing apparatus, a cassette support for holding at least one substrate cassette container, and cassette support purge ports with purge port nozzle locations disposed on the cassette support, each nozzle location being configured so that a nozzle at the nozzle location couples to at least one purge port of the substrate cassette container, wherein each nozzle location defines an interchangeable purge port nozzle interface so that different interchangeable purge port nozzles are removably mounted to respective nozzle interfaces of the nozzle locations that correspond to the different nozzle configurations of the interchangeable purge port nozzle modules, in conformance with and effecting coupling to different ports of different substrate cassette containers having different purge port characteristics.