公开(公告)号：US06801681B2

公开(公告)日：2004-10-05

申请号：US09765520

申请日：2001-01-17

申请人： Patrick E. Feierabend ,  John S. Foster ,  Bryant P. Hichwa ,  Richard T. Martin ,  Paul J. Rubel ,  Kimon Rybnicek ,  John W. Stocker ,  Jeffery F. Summers

发明人： Patrick E. Feierabend ,  John S. Foster ,  Bryant P. Hichwa ,  Richard T. Martin ,  Paul J. Rubel ,  Kimon Rybnicek ,  John W. Stocker ,  Jeffery F. Summers

IPC分类号： G02B626

CPC分类号： G02B6/3564 ,  G02B6/3518 ,  G02B6/357 ,  G02B6/3584 ,  G02B6/4226 ,  G02B26/0841 ,  G02B26/085 ,  G02B2006/12104

摘要： An optical switch is fabricated using micro-electro-mechanical system (“MEMS”) techniques. A thin mirror is fabricated in the major plane of the substrate and rotates about an axis perpendicular to the major plane to move into and out of an optical beam path. The mirror surface is open for chemical polishing and deposition, resulting in a high-quality mirror. In one embodiment, the backside of the mirror is patterned with reinforcing ribs. In another embodiment, a two-sided mirror is fabricated.

摘要翻译： 使用微机电系统（“MEMS”）技术制造光开关。 在基板的主平面上制造薄的反射镜，并且围绕垂直于主平面的轴旋转以进入和离开光束路径。 镜面打开以进行化学抛光和沉积，产生高品质的镜子。 在一个实施例中，镜子的背面被加强肋图案化。 在另一个实施例中，制造双面镜。

公开(公告)号：US06785038B2

公开(公告)日：2004-08-31

申请号：US09765522

申请日：2001-01-17

申请人： Bryant P. Hichwa ,  John S. Foster ,  Richard T. Martin ,  Paul J. Rubel ,  John W. Stocker ,  Jeffery F. Summers

发明人： Bryant P. Hichwa ,  John S. Foster ,  Richard T. Martin ,  Paul J. Rubel ,  John W. Stocker ,  Jeffery F. Summers

IPC分类号： G02B2600

CPC分类号： G02B6/3564 ,  G02B6/3518 ,  G02B6/357 ,  G02B6/3584 ,  G02B6/4226 ,  G02B2006/12104

摘要： An optical cross-connect is fabricated on a substrate using individual MEMs dice with mirrors that rotate into and out of an optical beam path. Each die can be aligned to a single (input-output) pair of collimators in a fiber-optic switching system. An individually accessible magnetic drive on each die provides low power consumption when re-configuring the array in addition to fast switching speeds. The state of each die can be electronically sensed to verify proper array configuration and operation of each die.

摘要翻译： 光学交叉连接使用具有旋转进入和离开光束路径的反射镜的各个MEM骰子在基板上制造。 每个管芯可以与光纤交换系统中的单个（输入 - 输出）准直器对准。 除了快速切换速度之外，每个模具上可单独访问的磁驱动器重新配置阵列时提供低功耗。 可以电子地感测每个管芯的状态，以验证每个管芯的阵列配置和操作。

公开(公告)号：US07141080B2

公开(公告)日：2006-11-28

申请号：US11272689

申请日：2005-11-15

申请人： Patrick E. Feierabend ,  John S. Foster ,  Richard T. Martin ,  Paul J. Rubel ,  John W. Stocker ,  Jeffery F. Summers ,  Andrew D. Wallis

发明人： Patrick E. Feierabend ,  John S. Foster ,  Richard T. Martin ,  Paul J. Rubel ,  John W. Stocker ,  Jeffery F. Summers ,  Andrew D. Wallis

IPC分类号： H01L21/00

CPC分类号： B81C3/008 ,  G02B6/3512 ,  G02B6/3518 ,  G02B6/353 ,  G02B6/3546 ,  G02B6/3572 ,  G02B6/3578 ,  G02B6/3584 ,  G02B6/3586 ,  Y10T29/41

摘要： The invention describes a method and apparatus for deploying micromachined actuators in a plane which is orthogonal to the original fabrication plane of the devices. Using batch-processing, photolithographic procedures known in the micromachined electro-mechanical system (MEMS) art, a plurality of devices is constructed on a suitable substrate. The devices are then separated one from another by sawing and dicing the original fabrication wafer. The devices are rotated into an orthogonal orientation and affixed to a second wafer. The second wafer also contains circuitry for addressing and manipulating each of the devices independently of the others. With this method and apparatus, arrays of actuators are constructed whose plane of actuation is perpendicular to the plane of the array. This invention is useful for constructing N×M fiber optic switches, which direct light from N input fibers into M output fibers.