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1.发明授权Scanning transmission electron microscope including an improved image detector 失效扫描传输电子显微镜，包括改进的图像检测器
公开(公告)号：US4038543A
公开(公告)日：1977-07-26
申请号：US696475
申请日：1976-06-15
CPC分类号： H01J37/09 , H01J37/22 , H01J37/28 , H01J2237/216 , H01J2237/2614
摘要： A scanning transmission electron microscope including an evacuated housing and a phase contrast device in which the imaging ray cone of the microscope generates a hologram having zones of positive or negative interference. The microscope includes means for separately detecting and measuring the intensities of the zones of positive or negative interference and a picture display means coupled to and controlled by the detecting means for monitoring the intensities detected and measured.The improvement of the invention comprises an improved detecting means including an image converter disposed in the electron beam path of the microscope on which the hologram is projected for converting the hologram into an optical image. Planar image masks are disposed outside of the microscope housing and have transparent and opaque areas which correspond to the zones of positive and negative interference of the hologram. An image transmission means, disposed adjacent the image converter, transmits the optical image with unchanged relative intensity distribution to the masks, and means, disposed adjacent the masks and coupled to the display means, measures the intensity of light transmitted through the transparent areas of the mask and generates an output signal corresponding to the intensities measured and detected for display on the display means.A method for correcting astigmatism and/or defocusing in such a microscope is also disclosed.
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公开(公告)号：US4031390A
公开(公告)日：1977-06-21
申请号：US392526
申请日：1973-08-29
CPC分类号： H01J37/21 , H01J37/147 , H01J37/22 , H01J37/265
摘要： A method of operating a particle-beam apparatus such as an electron microscope and the like equipped with a deflection system arranged at the beam path and a control device operatively connected to the deflection system includes adjusting the excitation of the deflection system by means of the control device to direct the particle-beam for a selectable time period onto a location of the object whereat the object is to be investigated and, again adjusting the excitation of the deflection system by means of the control device to direct the particle-beam in the remaining time to another location of the object whereat the particle-beam passes through the object, the last-mentioned location being disposed laterally of the first-mentioned location.
摘要翻译： 操作诸如电子显微镜等的装备有布置在光束路径处的偏转系统的粒子束装置的方法和可操作地连接到偏转系统的控制装置包括通过控制来调节偏转系统的激发 将粒子束引导到可选择的时间周期的装置，以将对象物体的位置进行调查，并且再次通过控制装置调整偏转系统的激励，以将粒子束引导到其余的 时间到物体的另一位置，其中粒子束通过物体，最后提到的位置被布置在第一个提到的位置的侧面。
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