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公开(公告)号：US4031390A
公开(公告)日：1977-06-21
申请号：US392526
申请日：1973-08-29
CPC分类号： H01J37/21 , H01J37/147 , H01J37/22 , H01J37/265
摘要： A method of operating a particle-beam apparatus such as an electron microscope and the like equipped with a deflection system arranged at the beam path and a control device operatively connected to the deflection system includes adjusting the excitation of the deflection system by means of the control device to direct the particle-beam for a selectable time period onto a location of the object whereat the object is to be investigated and, again adjusting the excitation of the deflection system by means of the control device to direct the particle-beam in the remaining time to another location of the object whereat the particle-beam passes through the object, the last-mentioned location being disposed laterally of the first-mentioned location.
摘要翻译： 操作诸如电子显微镜等的装备有布置在光束路径处的偏转系统的粒子束装置的方法和可操作地连接到偏转系统的控制装置包括通过控制来调节偏转系统的激发 将粒子束引导到可选择的时间周期的装置，以将对象物体的位置进行调查，并且再次通过控制装置调整偏转系统的激励，以将粒子束引导到其余的 时间到物体的另一位置，其中粒子束通过物体，最后提到的位置被布置在第一个提到的位置的侧面。
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2.发明授权Beam deflection and focusing system for a scanning corpuscular-beam microscope 失效用于扫描红外光束显微镜的光束偏转和聚焦系统
公开(公告)号：US4097739A
公开(公告)日：1978-06-27
申请号：US719111
申请日：1976-08-31
IPC分类号： H01J37/141 , H01J37/147 , H01J37/28 , H01J37/26
CPC分类号： H01J37/141 , H01J37/147 , H01J37/28
摘要： A scanning, corpuscular-beam microscope which includes a beam deflection system comprising a first stage for deflecting the beam out of the optical axis of the microscope and a second stage, disposed after the first stage along the beam path, for deflecting the beam towards the optical axis of the microscope. A first objective lens having a short focal length is disposed after the second beam deflection stage along the beam path for focusing the beam on a specimen. The improvement of the invention comprises the provision of a second objective lens having a long focal length which is disposed above the first objective lens along the beam path. The second objective lens is excited for low magnification of the specimen by the microscope and redirects the deflected beam in a direction approximately parallel to the microscope axis and focuses the beam on the specimen. The first objective lens and the second stage of the deflection system are inoperative during the redirection of the beam by the second objective lens.
摘要翻译： 一种扫描型微粒子束显微镜，其包括光束偏转系统，该光束偏转系统包括用于将光束偏离显微镜的光轴的第一级和设置在沿着光束路径的第一级之后的第二级，用于将光束偏向 显微镜的光轴。 具有短焦距的第一物镜沿着光束路径设置在第二光束偏转台之后，用于将光束聚焦在样本上。 本发明的改进包括提供具有长焦距的第二物镜，其沿着光束路径设置在第一物镜上方。 通过显微镜对第二个物镜进行低放大倍率的激光，并将偏转的光束在大致平行于显微镜轴的方向上重定向并将光束聚焦在样品上。 偏转系统的第一物镜和第二阶段在通过第二物镜重定向光束期间不起作用。
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3.发明授权Method for the pictorial display of a diffraction image in a transmission-type, scanning, corpuscular-beam microscope 失效传输类型，扫描，微光束显微镜中的衍射图像的图像显示方法
公开(公告)号：US4160162A
公开(公告)日：1979-07-03
申请号：US847439
申请日：1977-11-01
IPC分类号： H01J37/22 , H01J37/28 , H01J37/295 , G01N23/00
CPC分类号： H01J37/28 , H01J37/2955
摘要： An improved method for pictorially displaying a diffraction image in a transmission-type, scanning, corpuscular-beam microscope in which a beam detector is scanned by a diffraction image moved by a deflection system in line-raster fashion in a first, predetermined direction over the beam detector. The beam detector generates an output signal for controlling the brightness of a television monitor which displays the diffraction image. The improvement of the invention comprises the step of additionally exciting the deflection system so as to move the diffraction image in another, second direction over the beam detector which is perpendicular to the first, predetermined direction so that a predetermined area of the diffraction image which includes at least part of the cross-section of the maximum intensity of the null reflex of the beam is excluded during scanning of the beam detector and the diffraction image displayed by the television monitor is blanked in an area corresponding to the cross-section of the diffraction image which is excluded during scanning.
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公开(公告)号：US4149074A
公开(公告)日：1979-04-10
申请号：US717652
申请日：1976-08-25
CPC分类号： H01J37/244 , G02B21/002 , G02B6/04 , G02B6/10 , G02B6/4214 , H01J37/26 , H01J37/28 , H01J2237/2443 , H01J2237/2802
摘要： A scanning transmission-type electron microscope including an annular-shaped detector disposed concentrically with respect to the optical axis of the microscope behind a specimen along the microscope beam path, and means for amplifying output signals generated by the detector. The detector comprises a scintillation detector and the microscope includes a photoelectron multiplier coupled to the detector and disposed outside the microscope beam. A curved light guide is also coupled to the detector and the photoelectron multiplier and includes a canal which extends through the light guide along the microscope axis for permitting the passage of a central ray cone of the electron beam of the microscope through the light guide.
摘要翻译： 一种扫描透射型电子显微镜，其包括相对于显微镜光路的样本相对于显微镜的光轴同心布置的环状检测器，以及用于放大由检测器产生的输出信号的装置。 检测器包括闪烁检测器，显微镜包括耦合到检测器并设置在显微镜束外部的光电子倍增器。 弯曲光导还耦合到检测器和光电子倍增器，并且包括沿着显微镜轴线延伸穿过光导的管道，以允许显微镜的电子束的中心射线锥通过光导。
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5.发明授权Method and apparatus for focusing the objective lens of a scanning transmission-type corpuscular-beam microscope 失效用于聚焦扫描透射型红外光束显微镜的物镜的方法和装置
公开(公告)号：US4097740A
公开(公告)日：1978-06-27
申请号：US721693
申请日：1976-09-09
IPC分类号： H01J37/153 , H01J37/21 , H01J37/28 , H01J37/26
CPC分类号： H01J37/21 , H01J37/153 , H01J37/28
摘要： A method and apparatus for focusing the objective lens of a scanning transmission-type corpuscular-beam microscope. In the method, the beam of the microscope is deflected by a deflection system excited in sawtooth fashion and generates a raster consisting of parallel lines on the specimen to be examined. The microscope includes a beam radiation detector disposed behind the specimen along the beam path which generates an output signal which controls the brightness of a picture tube monitor operated synchronously with the raster. The improvement of the invention comprises the steps of measuring, during the exposure of a specimen point, partial beam radiation intensities in the cone of the beam at two points disposed symmetrical with respect to the longitudinal axis of the beam cone by means of the detector, the effective input area of the detector being smaller than the cross-sectional area of the cone of the beam at the same height in the microscope. The lens current of the objective lens is then adjusted so that the output signals generated by the detector are equal for the beam radiation measurements at the two points. An apparatus for automatically focusing the objective lens in the foregoing manner is also disclosed.
摘要翻译： 一种用于聚焦扫描透射型红外光束显微镜的物镜的方法和装置。 在该方法中，显微镜的光束被以锯齿形激发的偏转系统偏转，并产生由被检样本上的平行线构成的光栅。 显微镜包括沿着光束路径设置在样本后面的光束辐射检测器，其产生控制与光栅同步操作的显像管监视器的亮度的输出信号。 本发明的改进包括以下步骤：在试样点的曝光期间，通过检测器在相对于束锥的纵向轴线对称设置的两个点处测量梁的锥体中的部分束辐射强度， 检测器的有效输入面积小于显微镜中相同高度处的梁的锥体的横截面面积。 然后调整物镜的透镜电流，使得检测器产生的输出信号对于两点处的光束辐射测量是相等的。
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6.发明授权Method for pictorially displaying output information generated by an object imaging apparatus 失效用于图形显示由对象成像装置生成的输出信息的方法
公开(公告)号：US4091374A
公开(公告)日：1978-05-23
申请号：US719112
申请日：1976-08-31
摘要： A method for pictorially displaying output information generated in the form of an electrical signal by an apparatus for imaging an object which includes a first display means for visually displaying a working image of the object and a second display means for visually displaying an orientation image of the object. The orientation image is obtained by varying the operating parameters of the apparatus and is displayed simultaneously with the working image. The improvement of the invention comprises the steps of generating the orientation image once, storing the orientation image in an image storage means, and then reproducing the orientation image from the generated image stored in the image storage means.
摘要翻译： 一种用于通过用于成像对象的装置的用于图形显示以电信号形式生成的输出信息的方法，该装置包括用于可视地显示该对象的工作图像的第一显示装置和用于可视地显示该对象的定向图像的第二显示装置 目的。 通过改变设备的操作参数获得定向图像，并与工作图像同时显示。 本发明的改进包括以下步骤：一次生成定向图像，将取向图像存储在图像存储装置中，然后从存储在图像存储装置中的生成图像再现定向图像。
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公开(公告)号：US4211924A
公开(公告)日：1980-07-08
申请号：US7647
申请日：1979-01-29
IPC分类号： H01J37/22 , H01J37/295
CPC分类号： H01J37/28 , H01J37/224 , H01J37/2955
摘要： An improved transmission-type, scanning charged-particle beam microscope including a television camera tube and a television display tube for generating and displaying a diffraction image of a specimen to be examined. The improvement of the invention comprises the provision of a transparent fluorescent screen disposed in the ray cone of the beam behind the specimen along the beam path in the microscope, light-optical means adapted for imaging the fluorescent screen on a target of the television camera tube, and detector means for integrally detecting radiation emanating from the fluorescent screen.
摘要翻译： 一种改进的透射型扫描带电粒子束显微镜，包括电视照相机管和用于产生和显示被检样本的衍射图像的电视显示管。 本发明的改进包括在显微镜中沿着光束路径设置在样品后面的光束的透射荧光屏中的光学装置，适于将荧光屏成像在电视摄像机管的目标上 以及用于整体地检测从荧光屏发出的辐射的检测器装置。
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公开(公告)号：US3995266A
公开(公告)日：1976-11-30
申请号：US577875
申请日：1975-05-15
CPC分类号： G05B19/075 , H01J37/24 , H03K21/00 , H03M1/0612
摘要： A device for setting an electric command variable comprising parallel circuit branches for the coarse and fine adjustment of the variable is disclosed. In particular, the fine and coarse adjustment branches each include a digital bi-directional counter and a digital-analog converter. Upon exceeding the limits of the conversion range of the digital-to-analog converter of the fine branch, the counter therein is adjusted to a value which corresponds to a middle setting of its associated converter. To prevent the latter adjustment from causing a variation of the analog command variable, a corresponding correction of the counter in the coarse branch is then made. The present device has particular application in the setting of the energizing currents in magnetic lenses of an electron microscope.
摘要翻译： 公开了一种用于设置电子指令变量的装置，包括用于粗调和微调整变量的并行电路分支。 特别地，精细和粗调分支各自包括数字双向计数器和数模转换器。 当超过精细分支的数模转换器的转换范围的限制时，其中的计数器被调整为对应于其相关联的转换器的中间设置的值。 为了防止后一种调整引起模拟命令变量的变化，然后对粗分支中的计数器进行相应的校正。 本装置在电子显微镜的磁性透镜的激励电流的设定中具有特别的应用。
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9.发明授权Resilient shaft coupling designed as a composite part and method of producing it 失效弹性轴联轴器设计为复合零件及其生产方法
公开(公告)号：US5295912A
公开(公告)日：1994-03-22
申请号：US780767
申请日：1991-10-22
申请人： Karl-Heinz Muller , Werner Hoffmann
发明人： Karl-Heinz Muller , Werner Hoffmann
摘要： A resilient shaft coupling includes a annular member constructed of a hexagonal resilient joint disc and at least one attaching element which includes a plurality of flange arms. The resilient joint disc includes attaching regions at its corners provided with axial connecting element bores. The straight sides of the joint disc are provided with thin web regions which permit elastic deformation.
摘要翻译： 弹性轴联接器包括由六角形弹性接头盘和包括多个凸缘臂的至少一个附接元件构成的环形构件。 弹性接头盘在其设置有轴向连接元件孔的拐角处包括附接区域。 连接盘的直边设置有允许弹性变形的薄腹板区域。
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公开(公告)号：US4654605A
公开(公告)日：1987-03-31
申请号：US801487
申请日：1985-11-25
申请人： Klaus Lehmann , Karl-Heinz Muller
发明人： Klaus Lehmann , Karl-Heinz Muller
CPC分类号： G11C27/04
摘要： A resonant circuit which includes the input capacitance of the clock pulse inputs of a shift register (10) is pulsed by a sinusoidal wave at voltage peaks of the wave by an oscillator delivering barely enough energy to overcome the damping of the resonant circuit. The oscillator may be crystal controlled and, instead of having a single ended output for delivering energy only on peaks of one polarity, may be in push-pull form reinforcing oscillation peaks of both polarities. This circuit is easily combined with arrangements for switching oscillator frequency from one value to another and/or arrangements for interrupting the clock pulse output for timed intervals after each loading or unloading of the shift register. The loss power dissipation is reduced to about 6% of the loss power dissipation of a square pulse drive for the clocking of the same shift register. The low loss drive for shift register advancement is applicable to a variety of analog stepped storage and delay devices, such as charge coupled devices and "bucket brigade" devices.
摘要翻译： 包括移位寄存器（10）的时钟脉冲输入的输入电容的谐振电路由振荡器的电压峰值处的正弦波脉冲，该振荡器提供足够少的能量以克服谐振电路的阻尼。 振荡器可以是晶体控制的，并且代替具有用于仅在一个极性的峰值上传递能量的单端输出，可以是推挽形式，以增强两极性的振荡峰值。 该电路容易地与用于将振荡器频率从一个值切换到另一个值的布置和/或用于在每次加载或卸载移位寄存器之后中断时钟脉冲输出以用于定时间隔的布置。 对于相同移位寄存器的时钟，损耗功耗降低到方波脉冲驱动的损耗功耗的6％左右。 用于移位寄存器提前的低损耗驱动适用于各种模拟阶梯式存储和延迟装置，例如电荷耦合装置和“斗旅”装置。
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