摘要:
The present invention relates to a smart pipette for bio-cell manipulation which can freely change orientation of a bio-cell subject to the manipulation by using mechanical friction and applying instantaneous impact when penetrating the subject bio-cell while receiving real-time feedback of force/torque information of the bio-cell. Further, the present invention relates to a bio-cell manipulation method and system using a smart pipette, through which a bio-cell may be manipulated upon the application of the force/torque information generated during the cell manipulation to the smart pipette control. According to the present invention, injection position can be recognized precisely and conveniently regardless of the proficiency of the manipulating person. Thus, the bio-cell manipulation may be automated. Further, the smart pipette quantifies force/torque information feed-backed through the sensor unit and compares it with data acquired in advance through experiments on the same bio-cell. Further, through conducting impact driving when necessary, the present invention makes it possible to conduct bio-cell manipulation with minimum physical damage.
摘要:
This new automatic bio-manipulation factory system for manipulating a single cell comprises: a bio-MEMS that transports, separates, and extracts a single cell for manipulation from a plurality of cells, controls the rotation-orientation of the extracted cell automatically, and enables the extracted cell to maintain a certain temperature; and a micro manipulation system that obtains vision information and manipulation information about the extracted single cell and the manipulation tool, provides such information to operator, manipulates the extracted single cell by transmitting the rotation-orientation feedback information and the cell manipulation order of the operator to the bio-MEMS, and manipulates the manipulation tool by transmitting the tool manipulation order of the operator to the manipulation tool. The conventional manual and individualized single cell manipulation can be automated and processed collectively by systematically combining the bio-MEMS with the micro manipulation system.
摘要:
Provided is a composition for removing polymer residue of a photosensitive etching-resistant layer. The composition includes 0.1 to 80% by weight of a corrosion inhibitor shown in Formula 1; 10 to 80% by weight of a pH control agent of which hydrogen ion concentration is in a weak basic range; 0.1 to 2% by weight of ammonium fluoride; and the remaining percentage by weight of water. The composition for removing the polymer residue can effectively remove insoluble residue generated during a semiconductor fabrication process without inflicting damage on an underlying layer and contains environment-friendly components.
摘要:
Provided is a composition for removing polymer residue of a photosensitive etching-resistant layer. The composition includes 0.1 to 80% by weight of a corrosion inhibitor shown in Formula 1; 10 to 80% by weight of a pH control agent of which hydrogen ion concentration is in a weak basic range; 0.1 to 2% by weight of ammonium fluoride; and the remaining percentage by weight of water. The composition for removing the polymer residue can effectively remove insoluble residue generated during a semiconductor fabrication process without inflicting damage on an underlying layer and contains environment-friendly components.