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1.发明授权Ultrasonic transducer structure, ultrasonic transducer, and method of manufacturing ultrasonic transducer 有权超声波换能器结构，超声波换能器及超声波换能器的制造方法公开(公告)号：US09120127B2
公开(公告)日：2015-09-01
申请号：US13616285
申请日：2012-09-14
IPC分类号： H01L41/053 , B06B1/02
CPC分类号： B06B1/0292 , Y10T29/49005
摘要： An ultrasonic transducer structure, an ultrasonic transducer, and a method of manufacturing the ultrasonic transducer are provided. The ultrasonic transducer structure includes a driving wafer that includes a driving circuit; and an ultrasonic transducer wafer that is disposed on the driving wafer and includes a first wafer in which a via-hole is formed, a first insulating layer formed on the first wafer, a second wafer spaced apart from the first insulating layer, and a cavity formed between the first insulating layer and the second wafer.
摘要翻译： 提供超声换能器结构，超声波换能器和制造超声换能器的方法。 超声波换能器结构包括：驱动晶片，其包括驱动电路; 以及超声波换能器晶片，其设置在所述驱动晶片上并且包括形成有通孔的第一晶片，形成在所述第一晶片上的第一绝缘层，与所述第一绝缘层间隔开的第二晶片，以及空腔 形成在第一绝缘层和第二晶片之间。
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2.发明授权Method for fabricating micro speaker and micro speaker fabricated by the same 有权用于制造由其制造的微型扬声器和微型扬声器的方法公开(公告)号：US08275155B2
公开(公告)日：2012-09-25
申请号：US12186677
申请日：2008-08-06
CPC分类号： H04R19/005 , H01L2224/11 , H04R31/006 , H04R2201/003
摘要： A method for fabricating a micro speaker is provided, including forming a package wafer and a device wafer by batch processing, bonding the package wafer and the device wafer to each other, and forming a diaphragm by isotropic-etching a back surface of the device wafer using a xenon difluoride (XeF2). As a result, a micro-electronic-mechanic system (MEMS) technology-based piezoelectric micro speaker having a wide frequency response range is realized, by batch processing, thereby providing simplified structure and processing and reducing fabricating cost.
摘要翻译： 提供了一种制造微型扬声器的方法，包括通过间歇处理形成封装晶片和器件晶片，将封装晶片和器件晶片彼此接合，并通过各向同性蚀刻器件晶片的背面形成隔膜 使用氙二氟化物（XeF2）。 结果，通过批量处理实现了具有宽频率响应范围的微电子机械系统（MEMS）技术的压电微型扬声器，从而提供简化的结构和处理并降低制造成本。
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3.发明授权Cell and channel of ultrasonic transducer, and ultrasonic transducer including the same 有权超声波换能器的电池和通道，以及包括其的超声波换能器公开(公告)号：US08727994B2
公开(公告)日：2014-05-20
申请号：US13168473
申请日：2011-06-24
CPC分类号： A61B8/44 , A61B8/14 , A61B8/4477 , A61B8/4483 , B06B1/02 , B06B1/0292 , B06B3/00 , G01S15/8906 , H01L41/00
摘要： A cell of an ultrasonic transducer is provided. The cell includes a substrate; a supporting portion disposed on the substrate; a thin film spaced apart from the substrate and the supporting portion; and a connection portion which connects the supporting portion and the thin film. The connection portion may include a deformation portion that is elastically deformable. A channel of the ultrasonic transducer includes a plurality of cells arranged in an array. The ultrasonic transducer includes a plurality of channels arranged in an array.
摘要翻译： 提供超声波换能器的电池。 电池包括衬底; 设置在所述基板上的支撑部; 与所述基板和所述支撑部分间隔开的薄膜; 以及连接支撑部和薄膜的连接部。 连接部可以包括可弹性变形的变形部。 超声波换能器的通道包括排列成阵列的多个单元。 超声换能器包括排列成阵列的多个通道。
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公开(公告)号：US08549715B2
公开(公告)日：2013-10-08
申请号：US12428502
申请日：2009-04-23
申请人： Dong-kyun Kim , Seok-whan Chung , Byung-gil Jeong
发明人： Dong-kyun Kim , Seok-whan Chung , Byung-gil Jeong
CPC分类号： H01L41/314 , H01L41/332 , H04R17/005 , H04R31/00 , H04R2201/003
摘要： A piezoelectric microspeaker fabricated by a method including: forming a lower drive unit by forming a first drive electrode by depositing and etching a first thin conductive layer on a substrate, forming a first piezoelectric plate by depositing and etching a first piezoelectric layer on the first drive electrode, and forming a first common electrode by depositing and etching a second conductive layer on the first piezoelectric plate; after forming the lower drive unit, forming a diaphragm by depositing a non-conductive layer on the first common electrode; and forming an upper drive unit by forming a second common electrode by depositing and etching a third conductive layer on the diaphragm, forming a second piezoelectric plate by depositing and etching a second piezoelectric layer on the second common electrode, and forming a second drive electrode by depositing and etching a fourth conductive layer on the second piezoelectric plate.
摘要翻译： 一种通过以下方法制造的压电微型扬声器：包括：通过在基板上沉积和蚀刻第一薄导电层形成第一驱动电极而形成下驱动单元，通过在第一驱动器上沉积和蚀刻第一压电层形成第一压电板 并且通过在第一压电板上沉积和蚀刻第二导电层形成第一公共电极; 在形成下驱动单元之后，通过在第一公共电极上沉积非导电层形成隔膜; 以及通过在所述隔膜上沉积和蚀刻第三导电层形成第二公共电极而形成上部驱动单元，通过在所述第二公共电极上沉积和蚀刻第二压电层形成第二压电板，并且通过 沉积和蚀刻第二压电板上的第四导电层。
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公开(公告)号：US08280079B2
公开(公告)日：2012-10-02
申请号：US12430652
申请日：2009-04-27
申请人： Seok-whan Chung , Dong-kyun Kim , Byung-gil Jeong
发明人： Seok-whan Chung , Dong-kyun Kim , Byung-gil Jeong
IPC分类号： H04R25/00
CPC分类号： H04R17/00 , H04R2201/003
摘要： Provided are a piezoelectric microspeaker and a method of fabricating the same. In the piezoelectric microspeaker, a diaphragm includes a first region and a second region. The first region may be formed of a material capable of maximizing an exciting force, and the second region may be formed of a material having less initial stress and a lower Young's modulus than the first region.
摘要翻译： 提供一种压电微型扬声器及其制造方法。 在压电微型扬声器中，隔膜包括第一区域和第二区域。 第一区域可以由能够最大化激励力的材料形成，并且第二区域可以由初始应力较小的材料和比第一区域更低的杨氏模量形成。
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6.发明授权公开(公告)号：US08509462B2
公开(公告)日：2013-08-13
申请号：US12704029
申请日：2010-02-11
申请人： Byung-gil Jeong , Dong-kyun Kim , Seok-whan Chung , Jun-sik Hwang
发明人： Byung-gil Jeong , Dong-kyun Kim , Seok-whan Chung , Jun-sik Hwang
IPC分类号： H04R25/00
CPC分类号： H04R17/00 , Y10T29/42 , Y10T29/49005
摘要： A piezoelectric micro speaker and a method of manufacturing the same are provided. The piezoelectric micro speaker includes a substrate having a cavity formed therein and a diaphragm that is disposed on the substrate that overlaps the cavity. A plurality of first vibrating membranes having concentric annular ring shapes are disposed in a first region of the diaphragm corresponding to a center of the cavity. A second vibrating membrane including a different material from that of the first vibrating membranes is formed in the second region of the diaphragm corresponding to an edge of the cavity. A piezoelectric actuator for vibrating the first vibrating membranes is formed on and between the concentric annular rings of the first vibrating membranes.
摘要翻译： 提供一种压电微型扬声器及其制造方法。 压电微型扬声器包括其中形成有空腔的基板和设置在与空腔重叠的基板上的隔膜。 具有同心圆环形状的多个第一振动膜设置在对应于腔的中心的隔膜的第一区域中。 在与隔膜的边缘对应的隔膜的第二区域中形成有与第一振动膜不同的材料的第二振动膜。 用于振动第一振动膜的压电致动器形成在第一振动膜的同心圆环之间和之间。
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7.发明授权Piezoelectric micro speaker with curved lead wires and method of manufacturing the same 有权具有弯曲引线的压电微型扬声器及其制造方法公开(公告)号：US08401220B2
公开(公告)日：2013-03-19
申请号：US12751686
申请日：2010-03-31
申请人： Dong-kyun Kim , Byung-gil Jeong , Seok-whan Chung , Jun-sik Hwang
发明人： Dong-kyun Kim , Byung-gil Jeong , Seok-whan Chung , Jun-sik Hwang
IPC分类号： H04R1/02
CPC分类号： H04R17/00 , H04R2201/003 , H04R2307/025 , H04R2499/11 , Y10T29/42 , Y10T29/49005
摘要： A micro speaker includes a substrate having a cavity formed therein, a diaphragm formed on the substrate overlapping the cavity. The diaphragm includes a first vibration membrane formed in a first area corresponding to a center portion of the cavity and a second vibration membrane formed in a second area corresponding to an edge portion of the cavity and formed of material different from that used for the first vibration membrane. A piezoelectric actuator is formed including a first electrode layer formed on the first vibration membrane, a piezoelectric layer formed on the first electrode layer, and a second electrode layer formed on the piezoelectric layer, and first and second curved lead wires, respectively connected to the first and second electrode layers across the second area, which are symmetrical to the center of the piezoelectric actuator.
摘要翻译： 微型扬声器包括其中形成有空腔的基板，形成在基板上的与该空腔重叠的隔膜。 隔膜包括形成在与空腔的中心部分相对应的第一区域中的第一振动膜和形成在与空腔的边缘部分相对应的第二区域中并由与用于第一振动的材料不同的材料形成的第二区域的第二振动膜 膜。 一种压电致动器，包括形成在第一振动膜上的第一电极层，形成在第一电极层上的压电层和形成在压电层上的第二电极层，以及分别连接到第一电极层上的第一和第二弯曲引线 跨越第二区域的第一和第二电极层，其与压电致动器的中心对称。
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公开(公告)号：US08237332B2
公开(公告)日：2012-08-07
申请号：US12489531
申请日：2009-06-23
申请人： Dong-kyun Kim , Seok-whan Chung , Byung-gil Jeong
发明人： Dong-kyun Kim , Seok-whan Chung , Byung-gil Jeong
IPC分类号： H01L41/22
摘要： Provided are a piezoelectric acoustic transducer and a method of fabricating the same. In the piezoelectric acoustic transducer, a piezoelectric portion is formed in a portion of a diaphragm, and a deformation layer is formed in another portion of the diaphragm. Deformation of the piezoelectric portion is transferred to the deformation layer, or deformation of the deformation layer is transferred to the piezoelectric layer so that the deformation layer vibrates with the piezoelectric layer.
摘要翻译： 提供一种压电声换能器及其制造方法。 在压电声换能器中，在隔膜的一部分中形成压电部，在隔膜的另一部分形成变形层。 压电部分的变形转移到变形层，或者变形层的变形转移到压电层，使得变形层与压电层振动。
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公开(公告)号：US20100072860A1
公开(公告)日：2010-03-25
申请号：US12428502
申请日：2009-04-23
申请人： Dong-kyun Kim , Seok-whan Chung , Byung-gil Jeong
发明人： Dong-kyun Kim , Seok-whan Chung , Byung-gil Jeong
CPC分类号： H01L41/314 , H01L41/332 , H04R17/005 , H04R31/00 , H04R2201/003
摘要： Provided is a method of fabricating a piezoelectric microspeaker. According to the method, drive units having a piezoelectric layer and an electrode are symmetrically formed so as to be disposed over and under a diaphragm, respectively. When a thin conductive layer is used as the diaphragm, the diaphragm can be used as a common electrode. On the other hand, when a thin non-conductive layer is used as the diaphragm, a common electrode is necessary in each of the drive units.
摘要翻译： 提供一种制造压电微型扬声器的方法。 根据该方法，具有压电层和电极的驱动单元被对称地形成为分别设置在隔膜上方和下方。 当使用薄导电层作为隔膜时，隔膜可用作公共电极。 另一方面，当使用薄的非导电层作为隔膜时，在每个驱动单元中需要公共电极。
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10.发明授权Piezoelectric micro speaker having piston diaphragm and method of manufacturing the same 有权具有活塞隔膜的压电微型扬声器及其制造方法公开(公告)号：US08958595B2
公开(公告)日：2015-02-17
申请号：US12696935
申请日：2010-01-29
申请人： Jun-sik Hwang , Dong-kyun Kim , Seok-whan Chung , Byung-gil Jeong
发明人： Jun-sik Hwang , Dong-kyun Kim , Seok-whan Chung , Byung-gil Jeong
CPC分类号： H04R17/00 , H04R31/003 , H04R2201/003 , H04R2440/07
摘要： Provided are a piezoelectric micro speaker having a piston diaphragm and a method of manufacturing the piezoelectric micro speaker. The piezoelectric micro speaker includes: a substrate having a cavity formed therein; a vibrating membrane that is disposed on the substrate and covers at least a center part of the cavity; a piezoelectric actuator disposed on the vibrating membrane so as to vibrate the vibrating membrane; and a piston diaphragm that is disposed in the cavity and performs piston motion by vibration of the vibrating membrane. When the vibrating membrane vibrates by the piezoelectric actuator, the piston diaphragm, which is connected to the vibrating membrane through a piston bar, performs a piston motion in the cavity.
摘要翻译： 提供一种具有活塞隔膜的压电微型扬声器和制造压电微型扬声器的方法。 压电微型扬声器包括：其中形成有空腔的基板; 振动膜，其设置在所述基板上并且覆盖所述空腔的至少中心部分; 设置在所述振动膜上以使所述振动膜振动的压电致动器; 以及活塞隔膜，其设置在所述空腔中并通过所述振动膜的振动来进行活塞运动。 当振动膜由压电致动器振动时，通过活塞杆连接到振动膜的活塞隔膜在空腔中进行活塞运动。
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