公开(公告)号：US06271144B1

公开(公告)日：2001-08-07

申请号：US09103121

申请日：1998-06-23

申请人： Cédric Monget ,  Sophie Vallon ,  Olivier Joubert

发明人： Cédric Monget ,  Sophie Vallon ,  Olivier Joubert

IPC分类号： H01L21302

CPC分类号： H01L21/28282 ,  H01L21/32137

摘要： The process for etching a polycrystalline Si1−xGex layer or a stack includes a polycrystalline Si1−xGex layer and of a polycrystalline Si layer, deposited on a substrate and including, at its surface, a mask of inorganic material, includes main etching step in which the said layer or the said stack is anisotropically etched, using the said mask, by means of a high-density gas plasma of a gas mixture consisting of chlorine (Cl2) and of either nitrogen (N2) or ammonia (NH3) or of a nitrogen/ammonia mixture.

摘要翻译： 用于蚀刻多晶Si1-xGex层或堆叠的方法包括沉积在基板上并且在其表面上包括无机材料掩模的多晶Si1-xGex层和多晶Si层，其包括主蚀刻步骤，其中 使用所述掩模，通过由氯（Cl 2）和氮（N 2）或氨（NH 3）或由氮（N 2）或氨（NH 3）组成的气体混合物的高密度气体等离子体对所述层或所述堆叠进行各向异性蚀刻 氮/氨混合物。

公开(公告)号：US06421472B1

公开(公告)日：2002-07-16

申请号：US09549255

申请日：2000-04-14

申请人： Marc Moroni ,  Sophie Vallon

发明人： Marc Moroni ,  Sophie Vallon

IPC分类号： G02B612

CPC分类号： G02B6/12028 ,  G02B6/10 ,  G02B6/12007 ,  G02B2006/12107

摘要： An athermalized, polymer overclad integrated optical device (with a multiplexer/demultiplexer or a Mach-Zender interferometer being representative examples) in which thermally-induced shifts in channel wavelengths are minimized. The device includes a doped silica waveguide core on a planar substrate and a polymer overclad having a negative variation in refractive index versus temperature (dn/dT) to inhibit shifts in the channel wavelengths.

摘要翻译： 聚合物外包层综合光学器件（具有代表性示例的多路复用器/多路分解器或马赫 - 赞德干涉仪）的绝热，其中通道波长的热诱导移位被最小化。 该器件包括在平面衬底上的掺杂二氧化硅波导芯和具有折射率相对于温度的负变化（dn / dT）的聚合物外包层，以抑制沟道波长的移动。

公开(公告)号：US06466707B1

公开(公告)日：2002-10-15

申请号：US09642984

申请日：2000-08-21

申请人： Steven B. Dawes ,  Nikolaus Boos ,  Sophie Vallon

发明人： Steven B. Dawes ,  Nikolaus Boos ,  Sophie Vallon

IPC分类号： G02B612

CPC分类号： G02B6/12011 ,  G02B6/10 ,  G02B6/12028

摘要： A passive temperature-compensated integrated optical component having an array of adjacent waveguides, and a slab waveguide located within a groove at an intermediate section of the array. The waveguides have an index of refraction that increases with increasing temperature, and the slab waveguide has an index of refraction that decreases with increasing temperature. The slab waveguide compensates for a temperature-induced change in the refractive index of the waveguides to maintain a generally constant optical path difference between the adjacent waveguides over a temperature range.

摘要翻译： 具有相邻波导阵列的无源温度补偿集成光学部件和位于阵列的中间部分的凹槽内的平板波导。 波导具有随着温度升高而增加的折射率，并且平板波导具有随温度升高而降低的折射率。 平板波导补偿波导的折射率的温度引起的变化，以便在温度范围内保持相邻波导之间的通常恒定的光程差。

公开(公告)号：US06574409B1

公开(公告)日：2003-06-03

申请号：US09660638

申请日：2000-09-13

申请人： Marc Moroni ,  Sophie Vallon

发明人： Marc Moroni ,  Sophie Vallon

IPC分类号： G02B610

CPC分类号： G02B6/12011 ,  G02B6/12028

摘要： An athermalized optical waveguide circuit device exhibiting reduced signal power losses includes an optical phased-array comprising a plurality of curved waveguide cores of different lengths supported on a planar substrate, wherein each of the waveguide cores of the array includes a first silica segment, a second silica segment, and a central polymer segment connecting the first silica segment with the second silica segment to form a continuous waveguide core. The device is prepared by forming a plurality of adjacent curved silica waveguide cores on a planar substrate, overcladding the silica waveguide cores with a silica overclad, etching at least one groove into a central portion of the optical phased-array through the overclad and silica waveguide cores, forming a plurality of polymer waveguide core segments connecting a first silica waveguide core segment with a corresponding second silica waveguide core segment to form a continuous waveguide core, and overcladding the polymer waveguide core segments to define a composite optical phased-array comprising a plurality of adjacent composite waveguides. The polymer waveguide core segments have a negative variation of index of refraction as a function of temperature to compensate for the positive variation of the silica waveguide core segments, while providing an uninterrupted waveguide with low power loss of optical signals.

摘要翻译： 显示出降低的信号功率损耗的无热水化光波导电路装置包括光学相控阵列，其包括支撑在平面基板上的多个不同长度的弯曲波导芯，其中阵列中的每个波导芯包括第一二氧化硅段，第二二极管 二氧化硅段和连接第一二氧化硅段与第二二氧化硅段的中心聚合物段，以形成连续的波导芯。 通过在平面基板上形成多个相邻的弯曲二氧化硅波导芯，通过在二氧化硅外包层上包覆二氧化硅波导芯，通过外包层和二氧化硅波导将至少一个凹槽蚀刻到光相控阵列的中心部分 形成多个聚合物波导芯段，其将第一硅石波导芯段与对应的第二硅石波导芯段连接以形成连续的波导芯，并且包覆聚合物波导芯段以限定复合光相位阵列，其包括多个 的相邻复合波导。 聚合物波导芯段具有作为温度的函数的折射率的负变化，以补偿二氧化硅波导芯段的正变化，同时提供具有低功率光信号损耗的不间断波导。

公开(公告)号：US06577787B2

公开(公告)日：2003-06-10

申请号：US09758556

申请日：2001-01-11

申请人： Alain Marcel Jean Beguin ,  Marc Moroni ,  Sophie Vallon

发明人： Alain Marcel Jean Beguin ,  Marc Moroni ,  Sophie Vallon

IPC分类号： G02B628

CPC分类号： G02B6/12028 ,  G02B6/122 ,  G02B6/1221 ,  G02B6/132

摘要： The present invention provides methods of tuning the optical properties, such as the channel center wavelengths, of an integrated optical waveguide device by providing a device, such as a wavelength division multiplexer or demultiplexer, which contains an organic material, and fine tuning the device by exposing the organic material to at least one incremental step of UV irradiation.

摘要翻译： 本发明提供了通过提供包含有机材料的诸如波分复用器或解复用器的器件来调谐集成光波导器件的光学特性（例如通道中心波长）的方法，并且通过 将有机材料暴露于UV照射的至少一个增量步骤。

公开(公告)号：US06519380B2

公开(公告)日：2003-02-11

申请号：US09757884

申请日：2001-01-10

申请人： Steven B. Dawes ,  Marc Moroni ,  Sophie Vallon

发明人： Steven B. Dawes ,  Marc Moroni ,  Sophie Vallon

IPC分类号： G02B612

CPC分类号： G02B6/12028 ,  G02B6/122 ,  G02B6/1221 ,  G02B6/132

摘要： The present invention provides an athermalized organic-containing overclad integrated planar optical waveguide circuit device in which thermal induced shifting of channel wavelengths is minimized. The organic-containing overclad material is combined with a silica or doped silica glass material in the form of a local overclad, a bi-layer overclad, or a hybrid overclad. The organic-containing overclad material is a polymer or a sol-gel material.

摘要翻译： 本发明提供了一种其中通道波长的热诱导移位最小化的无热含有机物的外包层综合平面光波导电路装置。 含有机物的外包层材料与二氧化硅或掺杂的二氧化硅玻璃材料以局部外包层，双层外包层或混合外包层的形式组合。 含有机物的外包层材料是聚合物或溶胶 - 凝胶材料。