公开(公告)号：US20140368210A1

公开(公告)日：2014-12-18

申请号：US14260545

申请日：2014-04-24

Applicant: CANON ANELVA CORPORATION

Inventor： ITARU ENOMOTO ,  HIDEO MANO

IPC: G01L21/34 ,  H01J1/88 ,  H01J1/30

CPC classification number: G01L21/34 ,  G01L21/30 ,  G01L21/32 ,  H01J41/04 ,  H01J41/06

Abstract: A cold cathode ionization vacuum gauge, including: two electrodes disposed such that one of the electrodes is surrounded by the other electrode to thereby form a discharge space therebetween; and an electrode protection member disposed in the discharge space and configured to protect an inner wall surface of the other electrode, wherein the electrode protection member has electric conductivity and is elastically deformed along a shape of the inner wall surface to be electrically connected to the other electrode.

Abstract translation: 一种冷阴极电离真空计，包括：两个电极，其设置成使得一个电极被另一个电极包围，从而在它们之间形成放电空间; 以及电极保护部件，其设置在所述放电空间中并且被配置为保护所述另一电极的内壁表面，其中所述电极保护部件具有导电性并且沿着所述内壁表面的形状弹性变形以与其他电极电连接 电极。