公开(公告)号：US20170351275A1

公开(公告)日：2017-12-07

申请号：US15597921

申请日：2017-05-17

Applicant: CKD CORPORATION

Inventor： Minoru ITO ,  Masayuki WATANABE ,  Seiji HASHIGUCHI

IPC: G05D16/20 ,  F16K51/02 ,  F16K31/06

CPC classification number: F16K51/02 ,  F16J1/008 ,  F16K1/46 ,  G05D16/2053 ,  G05D16/2093

Abstract: A vacuum valve placed between a vacuum vessel and a vacuum pump to adjust a valve opening degree using an operating fluid includes a packing mounted in a recessed groove of a piston. The packing is provided with a contact portion on a radially inner side and a contact portion on a radially outer side, and a slide-contact portion contacting with an inner peripheral surface of a cylinder. A portion between the contact portion and the slide-contact portion has a thin thickness.

公开(公告)号：US20170234437A1

公开(公告)日：2017-08-17

申请号：US15414091

申请日：2017-01-24

Applicant: CKD CORPORATION

Inventor： Yasunori NISHIMURA ,  Masayuki WATANABE ,  Seiji HASHIGUCHI

IPC: F16K1/226

CPC classification number: F16K1/2265 ,  F16K1/2266

Abstract: A vacuum pressure control apparatus includes an annular elastic seal member formed with a valve seat, and a doubly eccentric butterfly valve element configured to come into contact or separate from the valve seat. The vacuum pressure control apparatus is to be placed on a pipe connecting a vacuum chamber and a vacuum pump. The vacuum pressure control apparatus is configured to rotate the butterfly valve element in a first direction from a first valve closed position corresponding to an initial state to change vacuum pressure in the vacuum chamber. The vacuum pressure control apparatus further includes a control unit configured to rotate the butterfly valve element in a direction opposite to a first direction so that the butterfly valve element is moved to a second valve closed position different from the first valve closed position.