公开(公告)号：US20220099192A1

公开(公告)日：2022-03-31

申请号：US17430175

申请日：2020-02-21

Applicant: CKD CORPORATION

Inventor： Yasunori NISHIMURA

IPC: F16K1/22 ,  F16K31/04 ,  F16K37/00

Abstract: A butterfly valve has a rod connected to a DD motor and disposed along a direction orthogonal to a flow path, and a butterfly valve body that is linked to the rod and that opens and closes the flow path due to the rod being rotated by the DD motor, wherein a linking body center of gravity, which is the center of gravity of a rotating liking body having at least the rod and the butterfly valve body as constituent members, is positioned on an axial line of a rotating shaft of the DD motor.

公开(公告)号：US20210239219A1

公开(公告)日：2021-08-05

申请号：US17144350

申请日：2021-01-08

Applicant: CKD CORPORATION

Inventor： Yasunori NISHIMURA

IPC: F16K1/22

Abstract: In a non-sealed butterfly valve, a butterfly valve element includes a downstream end face that faces a downstream side of a flow passage during valve closing and a maximum outer diameter portion that makes a gap with a minimum distance. The butterfly valve element includes a first chamfered portion that reduces the diameter of the butterfly valve element from the maximum outer diameter portion to the downstream end face over the entire circumference. The first chamfered portion has a taper angle of 5° or less relative to the thickness direction of the butterfly valve element. The first chamfered portion and the downstream end face intersect each other at a ridge line that falls within an imaginary circle that is centered on the central axis of the butterfly valve element and passes the maximum outer diameter portion.

公开(公告)号：US20210231220A1

公开(公告)日：2021-07-29

申请号：US17144334

申请日：2021-01-08

Applicant: CKD CORPORATION

Inventor： Yasunori NISHIMURA

IPC: F16K1/226

Abstract: A butterfly valve includes a drive unit and a valve unit that are coupled to each other. The drive unit includes a hollow part in which a rod is inserted between a DD motor and an end portion of the drive unit on a coupling side to the valve unit. In the hollow part, a cylindrical magnetic member is placed coaxially with the rod to cover the outer peripheral surface of the rod. A magnetic fluid is filled in a void between the outer peripheral surface of the magnetic member and the inner peripheral surface of the hollow part. The rod is made of a non-magnetic corrosion-resistant alloy.

公开(公告)号：US20230063288A1

公开(公告)日：2023-03-02

申请号：US17799964

申请日：2021-03-02

Applicant: CKD CORPORATION

Inventor： Hiroki KADOYA ,  Yasunori NISHIMURA

IPC: G05D7/06

Abstract: A pulse shot-type flow rate control device including first and second shutoff valves, a tank, a pressure sensor, and a controller is caused to perform two or more processes. In each process, the controller repeats pulse shots of alternately causing the first shutoff valve and the second shutoff valve to open and close, changes a way of the pulse shots based on a pressure difference between the pressure after filling and the pressure after discharge, and controls a volume flow rate. In each process, the controller stores, as an optimal filling time, a filling time when the volume flow rate is controlled to a target flow rate, and opens and closes the first shutoff valve by using the optimal filling time in a first pulse shot in the next process.

公开(公告)号：US20170167026A1

公开(公告)日：2017-06-15

申请号：US15363854

申请日：2016-11-29

Applicant: CKD CORPORATION ,  HORIBA STEC, CO., LTD.

Inventor： Akiko NAKADA ,  Yasunori NISHIMURA ,  Minoru ITO ,  Masami NISHIKAWA ,  Shigeyuki HAYASHI ,  Atsushi IEKI

IPC: C23C16/52 ,  H01L21/66 ,  H01L21/67 ,  C23C16/455

CPC classification number: C23C16/52 ,  C23C16/45561 ,  G01F1/34 ,  G01F3/36 ,  G01F3/38

Abstract: In a gas flow monitoring method using a MFC (a flow control device) for controlling a flow rate of process gas from a process gas supply source and supply the process gas to a predetermined process chamber, a start shut-off valve placed upstream of the MFC, and a pressure gauge placed between the start shut-off valve and the MFC, the start shut-off valve is closed and a drop of pressure on an upstream side of the MFC is measured by the pressure gauge to measure a flow rate of the MFC, thereafter, the start shut-off valve is opened to monitor the flow rate of the MFC. The MFC is switched from an ON state to an OFF state before the start shut-off valve is opened. The method enables in-line monitoring a low rate of process gas without affecting a semiconductor manufacturing process.

公开(公告)号：US20240142001A1

公开(公告)日：2024-05-02

申请号：US18279001

申请日：2022-04-01

Applicant: CKD CORPORATION

Inventor： Nobuhiro FUKUKAWA ,  Hiroki KADOYA ,  Yasunori NISHIMURA

IPC: F16K1/24 ,  F16J15/43 ,  F16K1/226

CPC classification number: F16K1/24 ,  F16J15/43 ,  F16K1/226

Abstract: A butterfly valve includes a purge gas flow path supplying a purge gas for preventing inflow of a control fluid into a magnetic fluid sealing portion from a flow path through an insertion hole. The purge gas flow path is provided with an opening and closing valve for opening and closing the purge gas flow path and a pressure gauge for measuring a pressure value in the purge gas flow path, in the stated order from the upstream side. The purge gas flow path is connected to a portion between the magnetic fluid sealing portion and the flow path of the butterfly valve on the downstream side of the pressure gauge, and communicates with the flow path through the insertion hole. The butterfly valve further includes a control device that controls at least the opening and closing valve. The control device is provided with a monitoring program for monitoring a pressure value.

公开(公告)号：US20180156362A1

公开(公告)日：2018-06-07

申请号：US15807281

申请日：2017-11-08

Applicant: CKD CORPORATION

Inventor： Hideyuki TAKEDA ,  Hiroki IWATA ,  Hiroto YASUE ,  Yasunori NISHIMURA

IPC: F16L3/10 ,  F16L43/02 ,  F16L23/16 ,  F16L21/06 ,  F16L23/032 ,  F16L47/14 ,  F16L23/06

CPC classification number: F16L3/1075 ,  B25B27/10 ,  B25B27/16 ,  F16L3/1233 ,  F16L21/06 ,  F16L21/08 ,  F16L23/003 ,  F16L23/032 ,  F16L23/06 ,  F16L23/162 ,  F16L23/167 ,  F16L23/22 ,  F16L43/02 ,  F16L47/145

Abstract: A fluid-device connecting structure includes a first fluid device having a first connection part, a second fluid device having a second connection part, an annular seal member to connect the first and second connection parts, and a coupling member to keep the first and second connection parts in a connected state. The coupling member includes a first coupling segment and a second coupling segment, each including at one end a first hinge part or a second hinge part. The first and second connection parts each have a cylindrical outer shape. The first coupling segment has a U-like shape having an opening and surrounds the first and second connection parts over a range more than 180 degrees of an entire circumference of each of the first and second connection parts.

公开(公告)号：US20170234437A1

公开(公告)日：2017-08-17

申请号：US15414091

申请日：2017-01-24

Applicant: CKD CORPORATION

Inventor： Yasunori NISHIMURA ,  Masayuki WATANABE ,  Seiji HASHIGUCHI

IPC: F16K1/226

CPC classification number: F16K1/2265 ,  F16K1/2266

Abstract: A vacuum pressure control apparatus includes an annular elastic seal member formed with a valve seat, and a doubly eccentric butterfly valve element configured to come into contact or separate from the valve seat. The vacuum pressure control apparatus is to be placed on a pipe connecting a vacuum chamber and a vacuum pump. The vacuum pressure control apparatus is configured to rotate the butterfly valve element in a first direction from a first valve closed position corresponding to an initial state to change vacuum pressure in the vacuum chamber. The vacuum pressure control apparatus further includes a control unit configured to rotate the butterfly valve element in a direction opposite to a first direction so that the butterfly valve element is moved to a second valve closed position different from the first valve closed position.

公开(公告)号：US20150090352A1

公开(公告)日：2015-04-02

申请号：US14472764

申请日：2014-08-29

Applicant: CKD CORPORATION

Inventor： Yasunori NISHIMURA

IPC: F16K31/124

CPC classification number: F16K31/04 ,  F16K31/1262 ,  F16K31/50 ,  Y10T137/7758

Abstract: An air-driven shutoff valve includes a valve seat formed in a main body, a valve element movable into or out of contact with the valve seat, a drive part integrally connected to the valve element, and a pilot opening/closing valve configured to supply compressed fluid to drive the drive part. The pilot opening/closing valve includes (a) a first needle valve, a first motor to change an opening degree of the first needle valve, and a first check valve allowing the compressed fluid to flow only from a pilot opening/closing valve side to a drive part side, and (b) a second needle valve, a second motor to change an opening degree of the second needle valve, and a second check valve allowing the compressed fluid to flow only from the drive part side to the pilot opening/closing valve side.

Abstract translation: 一种空气驱动的截止阀，包括形成在主体中的阀座，可移动地与阀座接触或不接触的阀元件，与阀元件一体连接的驱动部分，以及配置成供给 压缩流体驱动驱动部件。 先导开闭阀包括：（a）第一针阀，改变第一针阀的开度的第一电动机和允许压缩流体仅从先导开闭阀侧流动的第一止回阀， 驱动部分侧，和（b）第二针阀，改变第二针阀的开度的第二电动机和允许压缩流体仅从驱动部分侧流动到第二针阀的第二止回阀， 关闭阀侧。