UNDERCOAT AGENT, AND METHOD FOR PRODUCING STRUCTURE INCLUDING PHASE-SEPARATED STRUCTURE

    公开(公告)号:US20240191096A1

    公开(公告)日:2024-06-13

    申请号:US18491270

    申请日:2023-10-20

    摘要: An undercoat agent that is used for subjecting a layer including a block copolymer to phase separation on a substrate, the undercoat agent containing a resin component (A1) having a constitutional unit (u1) represented by General Formula (u1) and a constitutional unit (u2) represented by General Formula (u2). In General Formula (u1), R11 represents a hydrogen atom, an alkyl group having 1 to 5 carbon atoms, or a halogenated alkyl group having 1 to 5 carbon atoms, R12 represents a substituent, and n represents an integer of 0 to 5. In General Formula (u2), R2 represents a hydrogen atom, an alkyl group having 1 to 5 carbon atoms, or a halogenated alkyl group having 1 to 5 carbon atoms, L2 represents a single bond or a divalent linking group, and Y2 represents a divalent linking group having 5 to 15 carbon atoms