MEMS MICROPHONE
    1.
    发明申请
    MEMS MICROPHONE 有权
    MEMS麦克风

    公开(公告)号:US20170070824A1

    公开(公告)日:2017-03-09

    申请号:US15119878

    申请日:2015-06-25

    Inventor: Yonggang HU

    Abstract: A MEMS microphone includes a substrate (100), a supporting part (200), an upper polar plate (300) and a lower polar plate (400). The substrate (100) is provided with an opening (120) penetrating the middle thereof; the lower polar plate (400) straddles the opening (120); the supporting part (200) is fixed on the lower polar plate (400); the upper polar plate (300) is affixed to the supporting part (200); an accommodating cavity (500) is formed among the supporting part (200), the upper polar plate (300) and the lower polar plate (400); a recess (600) opposite to the accommodating cavity (500) is arranged in an intermediate region of at least one of the upper polar plate (300) and the lower polar plate (400), and insulation is achieved between the upper polar plate (300) and a lower polar plate (400).

    Abstract translation: MEMS麦克风包括基板(100),支撑部件(200),上极板(300)和下极板(400)。 基板(100)设有贯穿其中间的开口(120) 所述下极板(400)跨越所述开口(120); 支撑部分(200)固定在下极板(400)上; 上极板300固定在支撑部200上。 在支撑部件(200),上极板(300)和下极板(400)之间形成容纳空腔(500); 在所述上极板(300)和所述下极板(400)中的至少一个的中间区域中布置与所述容纳腔(500)相对的凹部(600),并且在所述上极板 300)和下极板(400)。

    MEMS-BASED METHOD FOR MANUFACTURING SENSOR
    2.
    发明申请
    MEMS-BASED METHOD FOR MANUFACTURING SENSOR 有权
    基于MEMS的制造传感器的方法

    公开(公告)号:US20170073224A1

    公开(公告)日:2017-03-16

    申请号:US15312146

    申请日:2015-05-05

    CPC classification number: B81C1/00619 B81C1/00 B81C2201/0133 B81C2201/0142

    Abstract: An MEMS-based method for manufacturing a sensor comprises the steps of: forming a shallow channel (120) and a support beam (140) on a front surface of a substrate (100); forming a first epitaxial layer (200) on the front surface of the substrate (100) to seal the shallow channel (120); forming a suspended mesh structure (160) below the first epitaxial layer (200); and forming a deep channel (180) at a position on a back surface of the substrate (100) corresponding to the shallow channel (120), so that the shallow channel (120) is in communication with the deep channel (180). In the Method of manufacturing a MEMS-based sensor, when a shallow channel is formed on a front surface, a support beam of a mass block is formed, so the etching of a channel is easier to control, the process is snore precise. and the uniformity and the homogeneity of the formed support beam are better.

    Abstract translation: 用于制造传感器的基于MEMS的方法包括以下步骤:在衬底(100)的前表面上形成浅沟道(120)和支撑梁(140); 在所述衬底(100)的前表面上形成第一外延层(200)以密封所述浅沟道(120); 在所述第一外延层(200)下方形成悬浮网状结构(160); 以及在与所述浅通道(120)相对应的所述基板(100)的背表面上的位置处形成深通道(180),使得所述浅通道(120)与所述深通道(180)连通。 在制造基于MEMS的传感器的方法中,当在前表面上形成浅沟道时,形成质量块的支撑梁,因此通道的蚀刻更易于控制,工艺打鼾精确。 形成的支撑梁的均匀性和均匀性更好。

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