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公开(公告)号：US20140262751A1
公开(公告)日：2014-09-18
申请号：US13803371
申请日：2013-03-14
申请人： Cardinal CG Company
IPC分类号： H01J37/32
CPC分类号： H01J37/32449 , C23C14/0042 , C23C14/54 , C23C14/542 , C23C14/544 , H01J37/3244 , H01J37/32972 , H01J37/34
摘要： A gas manifold for delivery gas to a sputtering chamber is provided with ports to accommodate plasma emission monitors to monitor plasma information in the sputtering chamber to provide feedback control. The collimators of the plasma emission monitors is exposed to gas flow and thus coating of the monitor is greatly reduced.
摘要翻译： 用于将气体输送到溅射室的气体歧管设置有端口以容纳等离子体发射监测器以监测溅射室中的等离子体信息以提供反馈控制。 等离子体发射监测器的准直器暴露于气流，因此显着性的涂层大大降低。
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公开(公告)号：US20130215415A1
公开(公告)日：2013-08-22
申请号：US13676420
申请日：2012-11-14
申请人： Cardinal CG Company
IPC分类号： G01J3/42
CPC分类号： G01J3/42 , G01N21/274 , G01N21/8422 , G01N21/896 , G01N2021/8427 , G01N2021/8609
摘要： A system for measuring properties of a thin film coated glass having a light source, a spectrometer, at least one pair of probes, a first optical fiber switch and a second optical fiber switch. The pair of probes includes a first probe located on one side of a glass sheet and a second probe located on the opposite side of the glass sheet, directly across from the first probe. The first and second optical fiber switches are adapted to couple either probe to the light source and/or the spectrometer. Because the design of the system is optically symmetrical, calibration may be performed without the use of a reference material such as a tile or mirror. Each of the first and second probes has a first leg and a second leg that are separated from each other by a distance n so that angled reflections may be detected.
摘要翻译： 一种用于测量具有光源，光谱仪，至少一对探针，第一光纤开关和第二光纤开关的薄膜涂覆玻璃的性质的系统。 一对探针包括位于玻璃板一侧的第一探针和位于玻璃板相反一侧的第二探针，其直接与第一探针相对。 第一和第二光纤开关适于将任一探针耦合到光源和/或光谱仪。 由于系统的设计是光学对称的，所以可以在不使用诸如瓦或反射镜的参考材料的情况下执行校准。 第一和第二探针中的每一个具有彼此分开距离n的第一腿部和第二腿部，从而可以检测成角度的反射。
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公开(公告)号：US09633823B2
公开(公告)日：2017-04-25
申请号：US13803371
申请日：2013-03-14
申请人： Cardinal CG Company
CPC分类号： H01J37/32449 , C23C14/0042 , C23C14/54 , C23C14/542 , C23C14/544 , H01J37/3244 , H01J37/32972 , H01J37/34
摘要： A gas manifold for delivery gas to a sputtering chamber is provided with ports to accommodate plasma emission monitors to monitor plasma information in the sputtering chamber to provide feedback control. The collimators of the plasma emission monitors is exposed to gas flow and thus coating of the monitor is greatly reduced.
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4.发明授权公开(公告)号：US08855450B2
公开(公告)日：2014-10-07
申请号：US13676420
申请日：2012-11-14
申请人： Cardinal CG Company
IPC分类号： G02B6/26 , G02B6/42 , G01N21/86 , G01V8/00 , G01N21/88 , G01N21/27 , G01N21/84 , G01J3/42 , G01N21/896
CPC分类号： G01J3/42 , G01N21/274 , G01N21/8422 , G01N21/896 , G01N2021/8427 , G01N2021/8609
摘要： A system for measuring properties of a thin film coated glass having a light source, a spectrometer, at least one pair of probes, a first optical fiber switch and a second optical fiber switch. The pair of probes includes a first probe located on one side of a glass sheet and a second probe located on the opposite side of the glass sheet, directly across from the first probe. The first and second optical fiber switches are adapted to couple either probe to the light source and/or the spectrometer. Because the design of the system is optically symmetrical, calibration may be performed without the use of a reference material such as a tile or mirror. Each of the first and second probes has a first leg and a second leg that are separated from each other by a distance n so that angled reflections may be detected.
摘要翻译： 一种用于测量具有光源，光谱仪，至少一对探针，第一光纤开关和第二光纤开关的薄膜涂覆玻璃的性质的系统。 一对探针包括位于玻璃板一侧的第一探针和位于玻璃板相反一侧的第二探针，其直接与第一探针相对。 第一和第二光纤开关适于将任一探针耦合到光源和/或光谱仪。 由于系统的设计是光学对称的，所以可以在不使用诸如瓦或反射镜的参考材料的情况下执行校准。 第一和第二探针中的每一个具有彼此分开距离n的第一腿部和第二腿部，从而可以检测成角度的反射。
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