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公开(公告)号：US20070238215A1
公开(公告)日：2007-10-11
申请号：US11399854
申请日：2006-04-07
申请人： Carl Stewart , Peter Hancock
发明人： Carl Stewart , Peter Hancock
IPC分类号： H01L21/00
CPC分类号： G01L9/0054 , G01L9/0042 , G01L9/0047
摘要： Silicon piezoresistor low pressure transducers can not be made cost effectively with a full scale output large enough to interface to control electronics. The size of the diaphragm, and therefore the size of the die required to produce a sufficient span make the die cost prohibitive. Simultaneously forming transistors and composite diaphragms with a common series of semiconductor processing steps supplies sensing elements and amplifier elements in close proximity. The transistors can be configured to amplify voltages or currents produced by piezoresistors located on the composite diaphragm to produce an output large enough to interface with control electronics. As such, a smaller die results in a cost effective transducer.
摘要翻译： 硅压敏电阻器低压传感器不能具有成本效益，其全尺寸输出足够大以连接到控制电子器件。 隔膜的尺寸，因此产生足够跨度所需的模具的尺寸使得模具成本过高。 通过一系列半导体处理步骤同时形成晶体管和复合膜片提供感应元件和放大器元件。 晶体管可以被配置为放大位于复合膜片上的压敏电阻产生的电压或电流，以产生足够大的输出以与控制电子器件连接。 因此，较小的管芯导致成本有效的换能器。
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2.发明授权Flow sensor apparatus and method with media isolated electrical connections 有权具有介质隔离电气连接的流量传感器装置和方法公开(公告)号：US08033180B2
公开(公告)日：2011-10-11
申请号：US12779657
申请日：2010-05-13
IPC分类号： G01L7/00
CPC分类号： G01L19/0023 , G01F1/363 , G01F1/48 , Y10T29/49002 , Y10T29/49826
摘要： A flow sensor apparatus that utilizes a pressure sensor with media isolated electrical connections. A cap can be attached to topside of the pressure sensor over a diaphragm to protect bond pads and wire bonds from a fluid media. A flow channel can be etched on the cap with an opening and exit on the sides of the cap so that liquid can flow through the flow channel. An inlet port and an outlet port can be attached to the channel's opening and exit to allow for fluid flow over the diaphragm. The flow channel creates a larger pressure over portions of the diaphragm that increases the deflection of the diaphragm, which increases an output signal of the pressure sensor. V-grooves can be created on two sides of the pressure sensor and in the cap to create the channel for the fluid in and out of the cap's cavity.
摘要翻译： 一种使用具有介质隔离电气连接的压力传感器的流量传感器装置。 盖可以通过隔膜连接到压力传感器的顶部，以保护接合垫和引线接合与流体介质。 可以在盖上蚀刻流动通道，其开口和出口在盖的侧面上，使得液体可以流过流动通道。 入口和出口可以连接到通道的开口和出口，以允许流体流过隔膜。 流动通道在膜片的部分上产生较大的压力，这增加了膜片的偏转，这增加了压力传感器的输出信号。 可以在压力传感器和盖子的两侧上形成V形槽，以形成流体进出盖体腔体的通道。
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公开(公告)号：US08616065B2
公开(公告)日：2013-12-31
申请号：US13196743
申请日：2011-08-02
申请人： Carl Stewart , Alistair Bradley , Lamar Ricks
发明人： Carl Stewart , Alistair Bradley , Lamar Ricks
IPC分类号： G01L9/06
CPC分类号： G01L9/0054 , G01L9/065
摘要： The present disclosure relates to sensors including pressure sensors. In some cases, the pressure sensor may include a membrane or diaphragm, multiple sense elements connected to one another in a bridge configuration and positioned on the membrane, and an amplifier coupled to an output of the bridge configuration and having an output, where the diaphragm, sense elements and amplifier may be formed on a singled substrate or formed integrally therewith, or both. In one example, the pressure sensor may sense a particular range of pressures applied to the sensor, and/or may include an amplifier that has a selectable gain for amplifying an output of the bridge.
摘要翻译： 本公开涉及包括压力传感器的传感器。 在一些情况下，压力传感器可以包括膜或膜片，以桥式结构彼此连接并位于膜上的多个感测元件，以及耦合到桥式结构的输出并具有输出的放大器，其中隔膜 感测元件和放大器可以形成在单个衬底上或与其一体形成或两者形成。 在一个示例中，压力传感器可以感测施加到传感器的特定压力范围，和/或可以包括具有用于放大桥的输出的可选增益的放大器。
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公开(公告)号：US08297125B2
公开(公告)日：2012-10-30
申请号：US12126494
申请日：2008-05-23
CPC分类号： G01L9/0054 , G01L19/0038 , G01L19/147
摘要： A differential pressure sensor includes two pressure ports for allowing media to pass into contact with both the top and bottom sides of the diaphragm. A silicon pressure sensor die can be attached between the pressure ports using die attach materials for sensing a differential pressure between the media to evaluate media differential pressure. A cap with an opening can be placed on topside of a diaphragm formed in the silicon pressure die. The silicon pressure die can include die bond pads that can be electrically connected to the diaphragm to output electrical signals. The cap can seal the die bond pads from the harsh media and route the electrical signals therein. Media can pass through the opening in the cap such that a media path to the top of the diaphragm is not exposed to the die bond pads of the silicon pressure die to ensure long-term sensor reliability.
摘要翻译： 差压传感器包括两个压力端口，用于允许介质与隔膜的顶侧和底侧进行接触。 硅压力传感器模具可以使用管芯附接材料连接在压力端口之间，用于感测介质之间的压差以评估介质压差。 具有开口的盖可以放置在形成在硅压模中的隔膜的上侧。 硅压模可以包括可以与膜片电连接以输出电信号的管芯接合焊盘。 盖可以将密封焊盘从恶劣的介质密封并将电信号传送到其中。 介质可以穿过盖中的开口，使得到隔膜顶部的介质路径不暴露于硅压模的管芯接合焊盘，以确保长期的传感器可靠性。
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公开(公告)号：US20090288492A1
公开(公告)日：2009-11-26
申请号：US12126494
申请日：2008-05-23
CPC分类号： G01L9/0054 , G01L19/0038 , G01L19/147
摘要： A differential pressure sensor includes two pressure ports for allowing media to pass into contact with both the top and bottom sides of the diaphragm. A silicon pressure sensor die can be attached between the pressure ports using die attach materials for sensing a differential pressure between the media to evaluate media differential pressure. A cap with an opening can be placed on topside of a diaphragm formed in the silicon pressure die. The silicon pressure die can include die bond pads that can be electrically connected to the diaphragm to output electrical signals. The cap can seal the die bond pads from the harsh media and route the electrical signals therein. Media can pass through the opening in the cap such that a media path to the top of the diaphragm is not exposed to the die bond pads of the silicon pressure die to ensure long-term sensor reliability.
摘要翻译： 差压传感器包括两个压力端口，用于允许介质与隔膜的顶侧和底侧进行接触。 硅压力传感器模具可以使用管芯附接材料连接在压力端口之间，用于感测介质之间的压差以评估介质压差。 具有开口的盖可以放置在形成在硅压模中的隔膜的上侧。 硅压模可以包括可以与膜片电连接以输出电信号的管芯接合焊盘。 盖可以将密封焊盘从恶劣的介质密封并将电信号传送到其中。 介质可以穿过盖中的开口，使得到隔膜顶部的介质路径不暴露于硅压模的管芯接合焊盘，以确保长期的传感器可靠性。
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公开(公告)号：US20120125114A1
公开(公告)日：2012-05-24
申请号：US13196743
申请日：2011-08-02
申请人： Carl Stewart , Alistair Bradley , Lamar Ricks
发明人： Carl Stewart , Alistair Bradley , Lamar Ricks
IPC分类号： G01L9/06
CPC分类号： G01L9/0054 , G01L9/065
摘要： The present disclosure relates to sensors including pressure sensors. In some cases, the pressure sensor may include a membrane or diaphragm, multiple sense elements connected to one another in a bridge configuration and positioned on the membrane, and an amplifier coupled to an output of the bridge configuration and having an output, where the diaphragm, sense elements and amplifier may be formed on a singled substrate or formed integrally therewith, or both. In one example, the pressure sensor may sense a particular range of pressures applied to the sensor, and/or may include an amplifier that has a selectable gain for amplifying an output of the bridge.
摘要翻译： 本公开涉及包括压力传感器的传感器。 在一些情况下，压力传感器可以包括膜或膜片，以桥式结构彼此连接并位于膜上的多个感测元件，以及耦合到桥式结构的输出并具有输出的放大器，其中隔膜 感测元件和放大器可以形成在单个衬底上或与其一体形成或两者形成。 在一个示例中，压力传感器可以感测施加到传感器的特定压力范围，和/或可以包括具有用于放大桥的输出的可选增益的放大器。
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公开(公告)号：US20100212434A1
公开(公告)日：2010-08-26
申请号：US12779657
申请日：2010-05-13
CPC分类号： G01L19/0023 , G01F1/363 , G01F1/48 , Y10T29/49002 , Y10T29/49826
摘要： A flow sensor apparatus that utilizes a pressure sensor with media isolated electrical connections. A cap can be attached to topside of the pressure sensor over a diaphragm to protect bond pads and wire bonds from a fluid media. A flow channel can be etched on the cap with an opening and exit on the sides of the cap so that liquid can flow through the flow channel. An inlet port and an outlet port can be attached to the channel's opening and exit to allow for fluid flow over the diaphragm. The flow channel creates a larger pressure over portions of the diaphragm that increases the deflection of the diaphragm, which increases an output signal of the pressure sensor. V-grooves can be created on two sides of the pressure sensor and in the cap to create the channel for the fluid in and out of the cap's cavity.
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8.发明申请公开(公告)号：US20100122580A1
公开(公告)日：2010-05-20
申请号：US12273912
申请日：2008-11-19
IPC分类号： G01L7/00
CPC分类号： G01L19/0023 , G01F1/363 , G01F1/48 , Y10T29/49002 , Y10T29/49826
摘要： A flow sensor apparatus that utilizes a pressure sensor with media isolated electrical connections. A cap can be attached to topside of the pressure sensor over a diaphragm to protect bond pads and wire bonds from a fluid media. A flow channel can be etched on the cap with an opening and exit on the sides of the cap so that liquid can flow through the flow channel. An inlet port and an outlet port can be attached to the channel's opening and exit to allow for fluid flow over the diaphragm. The flow channel creates a larger pressure over portions of the diaphragm that increases the deflection of the diaphragm, which increases an output signal of the pressure sensor. V-grooves can be created on two sides of the pressure sensor and in the cap to create the channel for the fluid in and out of the cap's cavity.
摘要翻译： 一种使用具有介质隔离电气连接的压力传感器的流量传感器装置。 盖可以通过隔膜连接到压力传感器的顶部，以保护接合垫和引线接合与流体介质。 可以在盖上蚀刻流动通道，其开口和出口在盖的侧面上，使得液体可以流过流动通道。 入口和出口可以连接到通道的开口和出口，以允许流体流过隔膜。 流动通道在膜片的部分上产生较大的压力，这增加了膜片的偏转，这增加了压力传感器的输出信号。 可以在压力传感器和盖子的两侧上形成V形槽，以形成流体进出盖体腔体的通道。
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公开(公告)号：US20110252882A1
公开(公告)日：2011-10-20
申请号：US12762797
申请日：2010-04-19
CPC分类号： G01F1/6845 , G01F15/14 , Y10T29/49002
摘要： A robust sensor, such as a robust flow sensor or pressure sensor, is provided. In one illustrative embodiment, a robust flow sensor includes one or more flow sensor components secured relative to a membrane, and a substrate for supporting the membrane. In some cases, the one or more flow sensor components may be substantially thermally isolated from the substrate by the membrane. One or more wire bond pads may be situated adjacent to a first side of the substrate and may be provided for communicating signals relative to the one or more flow sensor components. A top cap may be situated adjacent to the first side of the substrate and secured relative to the substrate. The top cap may define at least part of a fluid inlet and/or an outlet of the flow sensor assembly, and may at least partially define a flow channel that extends from the inlet, past at least one of the one or more flow sensor components, and out the outlet of the flow sensor assembly. The top cap may be structured and attached relative to the first side of the substrate such that the one or more wire bond pads are not exposed to a fluid in the flow channel, but are accessible for electrical connection to an external device. While a flow sensor is used as an example, it is contemplated that any suitable sensor may be used, as desired.
摘要翻译： 提供鲁棒的传感器，例如鲁棒的流量传感器或压力传感器。 在一个说明性实施例中，坚固的流量传感器包括相对于膜固定的一个或多个流量传感器部件和用于支撑膜的基板。 在一些情况下，一个或多个流量传感器组件可以通过膜与衬底基本上热隔离。 一个或多个引线接合焊盘可以位于与衬底的第一侧相邻的位置，并且可被设置用于相对于一个或多个流量传感器部件传送信号。 顶盖可以位于邻近衬底的第一侧并相对于衬底固定。 顶盖可以限定流量传感器组件的流体入口和/或出口的至少一部分，并且可以至少部分地限定从入口延伸通过一个或多个流量传感器部件中的至少一个的流动通道 ，并从流量传感器组件的出口排出。 顶盖可以相对于基板的第一侧被构造和附接，使得一个或多个引线接合焊盘不暴露于流动通道中的流体，而是可访问以用于与外部设备的电连接。 虽然使用流量传感器作为示例，但是可以设想，可以根据需要使用任何合适的传感器。
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10.发明授权Flow sensor apparatus and method with media isolated electrical connections 有权具有介质隔离电气连接的流量传感器装置和方法公开(公告)号：US07765872B2
公开(公告)日：2010-08-03
申请号：US12273912
申请日：2008-11-19
IPC分类号： G01L7/00
CPC分类号： G01L19/0023 , G01F1/363 , G01F1/48 , Y10T29/49002 , Y10T29/49826
摘要： A flow sensor apparatus that utilizes a pressure sensor with media isolated electrical connections. A cap can be attached to topside of the pressure sensor over a diaphragm to protect bond pads and wire bonds from a fluid media. A flow channel can be etched on the cap with an opening and exit on the sides of the cap so that liquid can flow through the flow channel. An inlet port and an outlet port can be attached to the channel's opening and exit to allow for fluid flow over the diaphragm. The flow channel creates a larger pressure over portions of the diaphragm that increases the deflection of the diaphragm, which increases an output signal of the pressure sensor. V-grooves can be created on two sides of the pressure sensor and in the cap to create the channel for the fluid in and out of the cap's cavity.
摘要翻译： 一种使用具有介质隔离电气连接的压力传感器的流量传感器装置。 盖可以通过隔膜连接到压力传感器的顶部，以保护接合垫和引线接合与流体介质。 可以在盖上蚀刻流动通道，其开口和出口在盖的侧面上，使得液体可以流过流动通道。 入口和出口可以连接到通道的开口和出口，以允许流体流过隔膜。 流动通道在膜片的部分上产生较大的压力，这增加了膜片的偏转，这增加了压力传感器的输出信号。 可以在压力传感器和盖子的两侧上形成V形槽，以形成流体进出盖体腔体的通道。
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