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公开(公告)号：US20180196362A1
公开(公告)日：2018-07-12
申请号：US15912722
申请日：2018-03-06
申请人： Carl Zeiss SMT GmbH
发明人： Vitaliy Shklover , Michael Schall , Johannes Kraus , Oliver Gloeckl , Jeffrey Erxmeyer , Horst Feldermann , Konstantin Forcht , Ute Heinemeyer
摘要： In order to make possible both good laser resistance and good antireflection properties, an optical element, in particular for UV lithography, comprising a substrate and a coating on the substrate having at least four layers, is proposed, wherein a first layer comprising a low refractive index inorganic fluoride compound is arranged on the substrate, a layer comprising an inorganic oxide-containing compound is arranged as a layer the most distant from the substrate, and at least two further layers each comprising an inorganic fluoride compound or an inorganic oxide-containing compound are arranged alternately between the first and the most distant layers.
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公开(公告)号：US20210098958A1
公开(公告)日：2021-04-01
申请号：US17117824
申请日：2020-12-10
申请人： Carl Zeiss SMT GmbH
发明人： Johannes Kraus , Oliver Gloeckl , Markus Deubel
摘要： An optical assembly reduces a spectral bandwidth of an output beam of a laser. The assembly includes a beam-expanding optical unit within a laser resonator. The latter serves to increase a beam cross section of a resonator-internal laser beam in at least one expansion cross-sectional dimension such that at least one resonator-internal expansion laser beam section arises. The assembly also includes an optical grating in a retroreflective arrangement for the resonator-internal laser beam. A beam-limiting stop acts in the expansion cross-sectional dimension and is arranged in the beam path of the expansion laser beam section. This yields an optical assembly in which unwanted thermal effects on account of optical components of the optical assembly heating during laser operation due to a local power density of the resonator-internal laser beam are reduced or avoided.
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