公开(公告)号：US20150340829A1

公开(公告)日：2015-11-26

申请号：US14816217

申请日：2015-08-03

申请人： Carl Zeiss SMT GmbH

发明人： Michael Schall ,  Johannes Kraus ,  Holger Muenz ,  Ingrid Schuster ,  Willi Anderl ,  Ulrich Weber ,  Markus Bauer ,  Jeffrey Erxmeyer ,  Michel Le Maire

IPC分类号： H01S3/00 ,  G02B5/04 ,  G02B5/08 ,  H01S3/10 ,  H01S3/23 ,  H01S3/225

CPC分类号： H01S3/0071 ,  G02B5/04 ,  G02B5/08 ,  G02B5/12 ,  G02B7/1815 ,  H01S3/005 ,  H01S3/10023 ,  H01S3/225 ,  H01S3/2251 ,  H01S3/2256 ,  H01S3/2333

摘要： A beam reverser module for an optical power amplifier of a laser arrangement comprises at least one reflecting surface for receiving an incoming laser beam propagating in a first direction and reflecting the incoming laser beam into a second direction different from the first direction, wherein the at least one reflecting surface is a highly reflecting surface of at least one mirror.

摘要翻译： 用于激光装置的光功率放大器的光束反射器模块包括至少一个反射表面，用于接收沿第一方向传播的入射激光束并将入射激光束反射到不同于第一方向的第二方向，其中至少 一个反射表面是至少一个反射镜的高反射表面。

公开(公告)号：US20180196362A1

公开(公告)日：2018-07-12

申请号：US15912722

申请日：2018-03-06

申请人： Carl Zeiss SMT GmbH

发明人： Vitaliy Shklover ,  Michael Schall ,  Johannes Kraus ,  Oliver Gloeckl ,  Jeffrey Erxmeyer ,  Horst Feldermann ,  Konstantin Forcht ,  Ute Heinemeyer

IPC分类号： G03F7/20 ,  G02B1/115

摘要： In order to make possible both good laser resistance and good antireflection properties, an optical element, in particular for UV lithography, comprising a substrate and a coating on the substrate having at least four layers, is proposed, wherein a first layer comprising a low refractive index inorganic fluoride compound is arranged on the substrate, a layer comprising an inorganic oxide-containing compound is arranged as a layer the most distant from the substrate, and at least two further layers each comprising an inorganic fluoride compound or an inorganic oxide-containing compound are arranged alternately between the first and the most distant layers.

公开(公告)号：US10777958B2

公开(公告)日：2020-09-15

申请号：US15830373

申请日：2017-12-04

申请人： Carl Zeiss SMT GmbH

发明人： Michael Schall ,  Johannes Kraus ,  Holger Muenz ,  Ingrid Schuster ,  Willi Anderl ,  Ulrich Weber ,  Markus Bauer ,  Jeffrey Erxmeyer ,  Michel Le Maire

IPC分类号： H01S3/00 ,  G02B5/08 ,  G02B7/18 ,  G02B5/04 ,  G02B5/12 ,  H01S3/225 ,  H01S3/10 ,  H01S3/23

摘要： A beam reverser module for an optical power amplifier of a laser arrangement comprises at least one reflecting surface for receiving an incoming laser beam propagating in a first direction and reflecting the incoming laser beam into a second direction different from the first direction, wherein the at least one reflecting surface is a highly reflecting surface of at least one mirror.

公开(公告)号：US20180102620A1

公开(公告)日：2018-04-12

申请号：US15830373

申请日：2017-12-04

申请人： Carl Zeiss SMT GmbH

发明人： Michael Schall ,  Johannes Kraus ,  Holger Muenz ,  Ingrid Schuster ,  Willi Anderl ,  Ulrich Weber ,  Markus Bauer ,  Jeffrey Erxmeyer ,  Michel Le Maire

IPC分类号： H01S3/00 ,  H01S3/23 ,  H01S3/225 ,  H01S3/10 ,  G02B5/08 ,  G02B5/04 ,  G02B7/18 ,  G02B5/12

CPC分类号： H01S3/0071 ,  G02B5/04 ,  G02B5/08 ,  G02B5/12 ,  G02B7/1815 ,  H01S3/005 ,  H01S3/10023 ,  H01S3/225 ,  H01S3/2251 ,  H01S3/2256 ,  H01S3/2333

摘要： A beam reverser module for an optical power amplifier of a laser arrangement comprises at least one reflecting surface for receiving an incoming laser beam propagating in a first direction and reflecting the incoming laser beam into a second direction different from the first direction, wherein the at least one reflecting surface is a highly reflecting surface of at least one mirror.

公开(公告)号：US09843153B2

公开(公告)日：2017-12-12

申请号：US14816217

申请日：2015-08-03

申请人： Carl Zeiss SMT GmbH

发明人： Michael Schall ,  Johannes Kraus ,  Holger Muenz ,  Ingrid Schuster ,  Willi Anderl ,  Ulrich Weber ,  Markus Bauer ,  Jeffrey Erxmeyer ,  Michel Le Maire

IPC分类号： H01S3/07 ,  H01S3/081 ,  G02B7/18 ,  H01S3/00 ,  H01S3/225 ,  G02B5/08 ,  H01S3/10 ,  G02B5/04 ,  G02B5/12 ,  H01S3/23

CPC分类号： H01S3/0071 ,  G02B5/04 ,  G02B5/08 ,  G02B5/12 ,  G02B7/1815 ,  H01S3/005 ,  H01S3/10023 ,  H01S3/225 ,  H01S3/2251 ,  H01S3/2256 ,  H01S3/2333

摘要： A beam reverser module for an optical power amplifier of a laser arrangement comprises at least one reflecting surface for receiving an incoming laser beam propagating in a first direction and reflecting the incoming laser beam into a second direction different from the first direction, wherein the at least one reflecting surface is a highly reflecting surface of at least one mirror.