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公开(公告)号：US20210404977A1
公开(公告)日：2021-12-30
申请号：US17470661
申请日：2021-09-09
Applicant: Carl Zeiss SMT Inc.
Inventor： Thomas Anthony Case , Susan Candell , Naomi Kotwal , Allen Gu , Zheren Wu , Wayne Broderick
IPC: G01N23/083 , G01N23/04
Abstract: A sample holder for holding a sample during an X-ray imaging process includes a sample placement surface on which the sample is placed for positioning the sample in a depth direction of the sample holder. The sample holder also includes a first alignment portion for aligning the sample in a width direction of the sample holder, and a second alignment portion for aligning the sample in a height direction of the sample holder.
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公开(公告)号：US20210407127A1
公开(公告)日：2021-12-30
申请号：US17470695
申请日：2021-09-09
Applicant: Carl Zeiss SMT Inc.
Inventor： Thomas Anthony Case , Susan Candell , Naomi Kotwal , Allen Gu , Lorenz Lechner , Wayne Broderick
Abstract: A method images a region of interest of a sample using a tomographic X-ray microscope. The method includes registering a position of the sample. Registering includes: imaging a portion of the sample containing a feature using the microscope, identifying the feature by matching the feature to a pre-recorded feature, and determining a relative position of the feature in relation to the pre-recorded feature. The method also includes navigating a field of view of the microscope over the region of interest based on the registered position of the sample, and imaging the region of interest using the microscope.
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公开(公告)号：US12056894B2
公开(公告)日：2024-08-06
申请号：US17470695
申请日：2021-09-09
Applicant: Carl Zeiss SMT Inc.
Inventor： Thomas Anthony Case , Susan Candell , Naomi Kotwal , Allen Gu , Lorenz Lechner , Wayne Broderick
CPC classification number: G06T7/74 , G21K7/00 , G06T2207/10056 , G06T2207/10116
Abstract: A method images a region of interest of a sample using a tomographic X-ray microscope. The method includes registering a position of the sample. Registering includes: imaging a portion of the sample containing a feature using the microscope, identifying the feature by matching the feature to a pre-recorded feature, and determining a relative position of the feature in relation to the pre-recorded feature. The method also includes navigating a field of view of the microscope over the region of interest based on the registered position of the sample, and imaging the region of interest using the microscope.
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公开(公告)号：US12007339B2
公开(公告)日：2024-06-11
申请号：US17470661
申请日：2021-09-09
Applicant: Carl Zeiss SMT Inc.
Inventor： Thomas Anthony Case , Susan Candell , Naomi Kotwal , Allen Gu , Zheren Wu , Wayne Broderick
IPC: G01N23/04 , G01N23/083
CPC classification number: G01N23/04 , G01N23/083 , G01N2223/307 , G01N2223/309 , G01N2223/6113 , G01N2223/6462
Abstract: A sample holder for holding a sample during an X-ray imaging process includes a sample placement surface on which the sample is placed for positioning the sample in a depth direction of the sample holder. The sample holder also includes a first alignment portion for aligning the sample in a width direction of the sample holder, and a second alignment portion for aligning the sample in a height direction of the sample holder.
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