公开(公告)号：US10060950B2

公开(公告)日：2018-08-28

申请号：US14997345

申请日：2016-01-15

Applicant: Cascade Microtech, Inc.

Inventor： Michael E Simmons ,  Bryan Conrad Bolt ,  Christopher Anthony Storm ,  Kazuki Negishi ,  Joseph George Frankel ,  Robbie Ingram-Goble

IPC: G01R31/00 ,  G01R1/18 ,  G01R1/067 ,  G01R31/28

CPC classification number: G01R1/18 ,  G01R1/06705 ,  G01R31/2849

Abstract: Shielded probe systems are disclosed herein. The probe systems are configured to test a device under test (DUT) and include a measurement chamber that at least partially bounds an enclosed volume, an aperture defined by the measurement chamber, a probing assembly, and a shielding structure. The probing assembly includes a probe, which is oriented within the enclosed volume, a probe arm, which is operatively attached to the probe, and a manipulator, which is operatively attached to the probe arm. At least a portion of the probing assembly extends through the aperture. The shielding structure extends between the measurement chamber and the probing assembly and is configured to restrict fluid flow through the aperture and shield the enclosed volume from an ambient environment that surrounds the measurement chamber while maintaining at least a threshold separation distance from the probe arm throughout a probe arm range-of-motion thereof.

公开(公告)号：US20170205446A1

公开(公告)日：2017-07-20

申请号：US14997345

申请日：2016-01-15

Applicant: Cascade Microtech, Inc.

Inventor： Michael E. Simmons ,  Bryan Conrad Bolt ,  Christopher Anthony Storm ,  Kazuki Negishi ,  Joseph George Frankel ,  Robbie Ingram-Goble

IPC: G01R1/18 ,  G01R1/067

CPC classification number: G01R1/18 ,  G01R1/06705 ,  G01R31/2849

Abstract: Shielded probe systems are disclosed herein. The probe systems are configured to test a device under test (DUT) and include a measurement chamber that at least partially bounds an enclosed volume, an aperture defined by the measurement chamber, a probing assembly, and a shielding structure. The probing assembly includes a probe, which is oriented within the enclosed volume, a probe arm, which is operatively attached to the probe, and a manipulator, which is operatively attached to the probe arm. At least a portion of the probing assembly extends through the aperture. The shielding structure extends between the measurement chamber and the probing assembly and is configured to restrict fluid flow through the aperture and shield the enclosed volume from an ambient environment that surrounds the measurement chamber while maintaining at least a threshold separation distance from the probe arm throughout a probe arm range-of-motion thereof.