公开(公告)号：US09804196B2

公开(公告)日：2017-10-31

申请号：US14997371

申请日：2016-01-15

Applicant: Cascade Microtech, Inc.

Inventor： Bryan Conrad Bolt ,  Joseph George Frankel

IPC: G01R1/067 ,  G01R31/28

CPC classification number: G01R1/06794 ,  G01R31/2891

Abstract: Probes with fiducial marks, probe systems including the same, and associated methods. The probes include a beam portion and a probe tip that is configured to contact a device under test (DUT), and further include a fiducial mark formed on the beam portion that is configured to facilitate alignment of the probe and the DUT. The fiducial mark is configured to be visible to an optical assembly, and is in focus to the optical assembly within a depth of field of the optical assembly that is smaller than a depth of field over which the beam portion is in focus to the optical assembly. The methods include methods of utilizing and/or manufacturing the probes.

公开(公告)号：US20170205443A1

公开(公告)日：2017-07-20

申请号：US14997371

申请日：2016-01-15

Applicant: Cascade Microtech, Inc.

Inventor： Bryan Conrad Bolt ,  Joseph George Frankel

IPC: G01R1/067 ,  G01R31/28

CPC classification number: G01R1/06794 ,  G01R31/2891

Abstract: Probes with fiducial marks, probe systems including the same, and associated methods. The probes include a beam portion and a probe tip that is configured to contact a device under test (DUT), and further include a fiducial mark formed on the beam portion that is configured to facilitate alignment of the probe and the DUT. The fiducial mark is configured to be visible to an optical assembly, and is in focus to the optical assembly within a depth of field of the optical assembly that is smaller than a depth of field over which the beam portion is in focus to the optical assembly. The methods include methods of utilizing and/or manufacturing the probes.

公开(公告)号：US10060950B2

公开(公告)日：2018-08-28

申请号：US14997345

申请日：2016-01-15

Applicant: Cascade Microtech, Inc.

Inventor： Michael E Simmons ,  Bryan Conrad Bolt ,  Christopher Anthony Storm ,  Kazuki Negishi ,  Joseph George Frankel ,  Robbie Ingram-Goble

IPC: G01R31/00 ,  G01R1/18 ,  G01R1/067 ,  G01R31/28

CPC classification number: G01R1/18 ,  G01R1/06705 ,  G01R31/2849

Abstract: Shielded probe systems are disclosed herein. The probe systems are configured to test a device under test (DUT) and include a measurement chamber that at least partially bounds an enclosed volume, an aperture defined by the measurement chamber, a probing assembly, and a shielding structure. The probing assembly includes a probe, which is oriented within the enclosed volume, a probe arm, which is operatively attached to the probe, and a manipulator, which is operatively attached to the probe arm. At least a portion of the probing assembly extends through the aperture. The shielding structure extends between the measurement chamber and the probing assembly and is configured to restrict fluid flow through the aperture and shield the enclosed volume from an ambient environment that surrounds the measurement chamber while maintaining at least a threshold separation distance from the probe arm throughout a probe arm range-of-motion thereof.

公开(公告)号：US20170205446A1

公开(公告)日：2017-07-20

申请号：US14997345

申请日：2016-01-15

Applicant: Cascade Microtech, Inc.

Inventor： Michael E. Simmons ,  Bryan Conrad Bolt ,  Christopher Anthony Storm ,  Kazuki Negishi ,  Joseph George Frankel ,  Robbie Ingram-Goble

IPC: G01R1/18 ,  G01R1/067

CPC classification number: G01R1/18 ,  G01R1/06705 ,  G01R31/2849

Abstract: Shielded probe systems are disclosed herein. The probe systems are configured to test a device under test (DUT) and include a measurement chamber that at least partially bounds an enclosed volume, an aperture defined by the measurement chamber, a probing assembly, and a shielding structure. The probing assembly includes a probe, which is oriented within the enclosed volume, a probe arm, which is operatively attached to the probe, and a manipulator, which is operatively attached to the probe arm. At least a portion of the probing assembly extends through the aperture. The shielding structure extends between the measurement chamber and the probing assembly and is configured to restrict fluid flow through the aperture and shield the enclosed volume from an ambient environment that surrounds the measurement chamber while maintaining at least a threshold separation distance from the probe arm throughout a probe arm range-of-motion thereof.