公开(公告)号：US20150130509A1

公开(公告)日：2015-05-14

申请号：US14542343

申请日：2014-11-14

Applicant: Case Western Reserve University

Inventor： Ting He ,  Fengchao Zhang ,  Swarup Bhunia ,  Philip X.-L. Feng

IPC: H01L23/525 ,  H03K19/177 ,  G11C17/16

CPC classification number: H03K19/17768 ,  G01R27/025 ,  G11C17/16 ,  G11C17/18 ,  H01L23/5252 ,  H01L23/5382 ,  H01L23/544 ,  H01L23/573 ,  H01L23/576 ,  H01L23/62 ,  H01L24/32 ,  H01L24/48 ,  H01L24/49 ,  H01L24/73 ,  H01L2223/5444 ,  H01L2224/05554 ,  H01L2224/32225 ,  H01L2224/48091 ,  H01L2224/48227 ,  H01L2224/49 ,  H01L2224/73265 ,  H01L2924/00014 ,  H01L2924/15184 ,  H01L2924/15311 ,  H01L2924/181 ,  H01L2924/19107 ,  H03K19/17704 ,  H03K19/17724 ,  H01L2224/45099 ,  H01L2924/00012 ,  H01L2224/29099

Abstract: An antifuse apparatus can include a cantilever extending from a first electrode portion to terminate in a distal end. A second electrode portion can be spaced apart from the cantilever by an air gap. In response to a program voltage across the first and second electrode portions, the cantilever can be adapted to move from an unprogrammed condition, corresponding to an open circuit condition where the cantilever is spaced apart from the second electrode portion, to at least one permanent programmed condition, corresponding to a short circuit condition between the first and second electrode portions where the cantilever engages the second electrode portion.

Abstract translation: 反熔丝设备可以包括从第一电极部分延伸以终止于远端的悬臂。 第二电极部分可以通过气隙与悬臂间隔开。 响应于跨越第一和第二电极部分的编程电压，悬臂可以适于从悬臂与第二电极部分间隔开的开路状态的非编程状态移动到至少一个永久编程的状态 条件，对应于悬臂与第二电极部分接合的第一和第二电极部分之间的短路状态。

公开(公告)号：US09628086B2

公开(公告)日：2017-04-18

申请号：US14542343

申请日：2014-11-14

Applicant: Case Western Reserve University

Inventor： Ting He ,  Fengchao Zhang ,  Swarup Bhunia ,  Philip X. -L. Feng

IPC: H01L23/525 ,  H03K19/177 ,  G11C17/16 ,  G01R27/02 ,  H01L23/544 ,  G11C17/18 ,  H01L23/538 ,  H01L23/00 ,  H01L23/62

CPC classification number: H03K19/17768 ,  G01R27/025 ,  G11C17/16 ,  G11C17/18 ,  H01L23/5252 ,  H01L23/5382 ,  H01L23/544 ,  H01L23/573 ,  H01L23/576 ,  H01L23/62 ,  H01L24/32 ,  H01L24/48 ,  H01L24/49 ,  H01L24/73 ,  H01L2223/5444 ,  H01L2224/05554 ,  H01L2224/32225 ,  H01L2224/48091 ,  H01L2224/48227 ,  H01L2224/49 ,  H01L2224/73265 ,  H01L2924/00014 ,  H01L2924/15184 ,  H01L2924/15311 ,  H01L2924/181 ,  H01L2924/19107 ,  H03K19/17704 ,  H03K19/17724 ,  H01L2224/45099 ,  H01L2924/00012 ,  H01L2224/29099

Abstract: An antifuse apparatus can include a cantilever extending from a first electrode portion to terminate in a distal end. A second electrode portion can be spaced apart from the cantilever by an air gap. In response to a program voltage across the first and second electrode portions, the cantilever can be adapted to move from an unprogrammed condition, corresponding to an open circuit condition where the cantilever is spaced apart from the second electrode portion, to at least one permanent programmed condition, corresponding to a short circuit condition between the first and second electrode portions where the cantilever engages the second electrode portion.