公开(公告)号：US20140174465A1

公开(公告)日：2014-06-26

申请号：US14136381

申请日：2013-12-20

申请人： Central Glass Company, Limited

发明人： Soichi KUMON ,  Takashi SAIO ,  Shinobu ARATA ,  Hidehisa NANAI ,  Yoshinori AKAMATSU ,  Shigeo HAMAGUCHI ,  Kazuhiko MAEDA

IPC分类号： H01L21/02

CPC分类号： H01L21/02052 ,  B08B3/00 ,  C09D183/04 ,  C11D3/162 ,  C11D7/5022 ,  H01L21/00 ,  H01L21/02054

摘要： A cleaning agent for a silicon wafer (a first cleaning agent) contains at least a water-based cleaning liquid and a water-repellent cleaning liquid for providing at least a recessed portion of an uneven pattern with water repellency during a cleaning process. The water-based cleaning liquid is a liquid in which a water-repellent compound having a reactive moiety chemically bondable to Si element in the silicon wafer and a hydrophobic group, and an organic solvent including at least an alcoholic solvent are mixed and contained. With this cleaning agent, the cleaning process which tends to induce a pattern collapse can be improved.

摘要翻译： 一种用于硅晶片（第一清洁剂）的清洁剂至少含有一种水基清洗液和一种防水清洗液，用于在清洁过程中至少提供具有防水性的凹凸图案的凹陷部分。 水性清洗液是将具有与硅晶片中的Si元素和疏水性基团化学结合的反应性部分的防水化合物和至少含有醇溶剂的有机溶剂混合并包含的液体。 利用该清洁剂，可以提高倾向于引起图案塌陷的清洁处理。

公开(公告)号：US20160215169A1

公开(公告)日：2016-07-28

申请号：US15001664

申请日：2016-01-20

申请人： Central Glass Company, Limited

发明人： Hiroshi NOMURA ,  Shigeo HAMAGUCHI

IPC分类号： C09D183/08 ,  C03C17/30

CPC分类号： C09D183/08 ,  C03C17/30 ,  C03C23/0075 ,  C03C2217/76 ,  C03C2217/78 ,  C03C2218/11 ,  C08G77/24

摘要： A water repellent liquid for forming water repellent film. The liquid is provided containing: fluoroalkylsilane compound represented by general formula 1 where “m” is an integer between 2 and 7, “n” is an integer between 1 and 5, “X” is mutually independently at least one group selected from the group consisting of alkoxy group, chloro group, isocyanate group and hydroxyl group, and “p” is an integer between 1 and 3; silicon compound represented by general formula 2 R12SiY2   2 where “R1” mutually independently represents a C1-C20 hydrocarbon group, “Y” mutually independently represents at least one group selected from the group consisting of alkoxy group, chloro group, isocyanate group and hydroxyl group, and “R1” may be a branched hydrocarbon group or a cyclic hydrocarbon group; organic solvent; water; and acid. In this liquid the mass ratio of the fluoroalkylsilane compound to the silicon compound is between 1:0.1 and 1:20.

摘要翻译： 用于形成防水膜的防水液体。 提供含有通式1表示的氟代烷基硅烷化合物的液体，其中“m”为2至7之间的整数，“n”为1至5之间的整数，“X”彼此独立地为至少一个选自基团 由烷氧基，氯基，异氰酸酯基和羟基组成，“p”是1和3之间的整数; 由通式2 R 12 SiY 2 2表示的硅化合物，其中“R 1”相互独立地表示C1-C20烃基，“Y”相互独立地表示选自烷氧基，氯基，异氰酸酯基和羟基中的至少一个基团 ，“R1”可以是支链烃基或环状烃基; 有机溶剂; 水; 和酸。 在该液体中，氟代烷基硅烷化合物与硅化合物的质量比为1:0.1至1:20。