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公开(公告)号:US20080280398A1
公开(公告)日:2008-11-13
申请号:US12177033
申请日:2008-07-21
IPC分类号: H01L21/50
CPC分类号: B81C1/00285 , B81B2201/042 , G02B26/0833
摘要: A method of forming a MEMS (Micro-Electro-Mechanical System), includes forming an ambient port through a MEMS cap which defines a cavity containing a plurality of MEMS actuators therein; and bonding a lid arrangement to the MEMS cap to hermetically seal the ambient port.
摘要翻译: 一种形成MEMS(微机电系统)的方法包括:通过限定在其中包含多个MEMS致动器的空腔的MEMS盖形成环境端口; 以及将盖装置结合到MEMS盖以密封环境端口。
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公开(公告)号:US07741157B2
公开(公告)日:2010-06-22
申请号:US12177033
申请日:2008-07-21
申请人: Charles C Haluzak , Arthur Piehl , Chien-Hua Chen , Jennifer Shih
发明人: Charles C Haluzak , Arthur Piehl , Chien-Hua Chen , Jennifer Shih
IPC分类号: H01L21/00
CPC分类号: B81C1/00285 , B81B2201/042 , G02B26/0833
摘要: A method of forming a MEMS (Micro-Electro-Mechanical System), includes forming an ambient port through a MEMS cap which defines a cavity containing a plurality of MEMS actuators therein; and bonding a lid arrangement to the MEMS cap to hermetically seal the ambient port.
摘要翻译: 一种形成MEMS(微机电系统)的方法包括:通过限定在其中包含多个MEMS致动器的空腔的MEMS盖形成环境端口; 以及将盖装置结合到MEMS盖以密封环境端口。
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公开(公告)号:US07417307B2
公开(公告)日:2008-08-26
申请号:US11192377
申请日:2005-07-29
申请人: Charles C Haluzak , Arthur Piehl , Chien-Hua Chen , Jennifer Shih
发明人: Charles C Haluzak , Arthur Piehl , Chien-Hua Chen , Jennifer Shih
IPC分类号: H01L23/20
CPC分类号: B81C1/00285 , B81B2201/042 , G02B26/0833
摘要: A method of forming a MEMS (Micro-Electro-Mechanical System), includes forming an ambient port through a MEMS cap which defines a cavity containing a plurality of MEMS actuators therein; and bonding a lid arrangement to the MEMS cap to hermetically seal the ambient port.
摘要翻译: 一种形成MEMS(微机电系统)的方法包括:通过限定在其中包含多个MEMS致动器的空腔的MEMS盖形成环境端口; 以及将盖装置结合到MEMS盖以密封环境端口。
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公开(公告)号:US07436571B2
公开(公告)日:2008-10-14
申请号:US10971637
申请日:2004-10-20
申请人: John R Sterner , Charles C Haluzak , William R Boucher , Scott Lerner , James W. Ring , Brett Dahlgren , Chien-Hua Chen , Arthur Piehl , Quan Qi
发明人: John R Sterner , Charles C Haluzak , William R Boucher , Scott Lerner , James W. Ring , Brett Dahlgren , Chien-Hua Chen , Arthur Piehl , Quan Qi
CPC分类号: G03B21/008 , G03B21/2073
摘要: A micro-display has a device chip with a transparent layer overlying one or more micro-electromechanical system devices. A transparent cover overlies the transparent layer. An index-of-refraction-matching medium is interposed between the transparent layer and the transparent cover. An index of refraction of the index-of-refraction-matching medium is substantially equal to an index of refraction of the transparent layer and the transparent cover.
摘要翻译: 微型显示器具有覆盖一个或多个微机电系统设备的透明层的器件芯片。 透明盖覆盖透明层。 折射率匹配介质夹在透明层和透明罩之间。 折射率匹配介质的折射率基本上等于透明层和透明盖的折射率。
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公开(公告)号:US20070026559A1
公开(公告)日:2007-02-01
申请号:US11192377
申请日:2005-07-29
申请人: Charles Haluzak , Arthur Piehl , Chien-Hua Chen , Jennifer Shih
发明人: Charles Haluzak , Arthur Piehl , Chien-Hua Chen , Jennifer Shih
CPC分类号: B81C1/00285 , B81B2201/042 , G02B26/0833
摘要: A method of forming a MEMS (Micro-Electro-Mechanical System), includes forming an ambient port through a MEMS cap which defines a cavity containing a plurality of MEMS actuators therein; and bonding a lid arrangement to the MEMS cap to hermetically seal the ambient port.
摘要翻译: 一种形成MEMS(微机电系统)的方法包括:通过限定在其中包含多个MEMS致动器的空腔的MEMS盖形成环境端口; 以及将盖装置结合到MEMS盖以密封环境端口。
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公开(公告)号:US20060082737A1
公开(公告)日:2006-04-20
申请号:US10971637
申请日:2004-10-20
申请人: John Sterner , Charles Haluzak , William Boucher , Scott Lerner , James Ring , Brett Dahlgren , Chien-Hua Chen , Arthur Piehl , Quan Qi
发明人: John Sterner , Charles Haluzak , William Boucher , Scott Lerner , James Ring , Brett Dahlgren , Chien-Hua Chen , Arthur Piehl , Quan Qi
IPC分类号: G03B21/20
CPC分类号: G03B21/008 , G03B21/2073
摘要: A micro-display has a device chip with a transparent layer overlying one or more micro-electromechanical system devices. A transparent cover overlies the transparent layer. An index-of-refraction-matching medium is interposed between the transparent layer and the transparent cover. An index of refraction of the index-of-refraction-matching medium is substantially equal to an index of refraction of the transparent layer and the transparent cover.
摘要翻译: 微型显示器具有覆盖一个或多个微机电系统设备的透明层的器件芯片。 透明盖覆盖透明层。 折射率匹配介质夹在透明层和透明罩之间。 折射率匹配介质的折射率基本上等于透明层和透明盖的折射率。
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公开(公告)号:US20050101045A1
公开(公告)日:2005-05-12
申请号:US10703762
申请日:2003-11-07
申请人: Jennifer Shih , Valerie Marty , James Przybyia , Arthur Piehl , John Williams , Christopher Leonard
发明人: Jennifer Shih , Valerie Marty , James Przybyia , Arthur Piehl , John Williams , Christopher Leonard
IPC分类号: H01L21/00
CPC分类号: B81C1/00333 , B81C2203/0145
摘要: A method of sealing a micro-electromechanical system (MEMS) includes successively depositing and etching a sealing material to seal an opening in the MEMS.
摘要翻译: 密封微机电系统(MEMS)的方法包括连续沉积和蚀刻密封材料以密封MEMS中的开口。
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公开(公告)号:US07733553B2
公开(公告)日:2010-06-08
申请号:US11233225
申请日:2005-09-21
申请人: Kenneth Faase , Adel Jilani , James C. McKinnell , Eric L. Nikkel , Arthur Piehl , James R. Przybyla , Bao-Sung Bruce Yeh
发明人: Kenneth Faase , Adel Jilani , James C. McKinnell , Eric L. Nikkel , Arthur Piehl , James R. Przybyla , Bao-Sung Bruce Yeh
CPC分类号: G02B26/001
摘要: An electronic light modulator device for at least partially displaying a pixel of an image, the device comprising first and second reflectors defining an optical cavity therebetween, the optical cavity being selective of an electromagnetic wavelength at an intensity by optical interference, the device having at least first and second optical states, at least one of the optical states being tunable and the other not tunable.
摘要翻译: 一种用于至少部分地显示图像的像素的电子光调制器装置,所述装置包括在其间限定光腔的第一和第二反射器,所述光腔具有通过光学干涉的强度的电磁波长的选择性,所述装置至少具有 第一和第二光学状态,光学状态中的至少一个是可调谐的,另一个不可调谐。
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公开(公告)号:US20070019274A1
公开(公告)日:2007-01-25
申请号:US11188330
申请日:2005-07-25
申请人: Scott Lerner , John Sterner , Arthur Piehl , Anurag Gupta
发明人: Scott Lerner , John Sterner , Arthur Piehl , Anurag Gupta
IPC分类号: G02F1/03
CPC分类号: G02F1/21 , G02F1/0128 , G02F1/133528 , G02F2201/17 , G02F2203/055 , G02F2203/07
摘要: An embodiment of a double pass modulator includes a reflective polarizer adapted to pass light having a predetermined polarization state therethrough and to reflect substantially all other light, a quarter wave plate positioned to receive and pass light from the reflective polarizer, the quarter wave plate shifting the relative phase of the light passing therethrough by 45° with respect to the optic axis of the plate, and a reflector that receives light from the quarter wave plate and modulates at least a portion of the light incident thereon in a predetermined manner.
摘要翻译: 双通调制器的实施例包括反射偏振器,其适于使具有预定偏振态的光通过其中并基本上反射所有其它光,四分之一波片被定位成接收和传递来自反射偏振器的光,四分之一波片将 通过其相对于板的光轴45°的光的相对相位,以及接收来自四分之一波片的光并以预定方式调制入射到其上的光的至少一部分的反射器。
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公开(公告)号:US07088566B2
公开(公告)日:2006-08-08
申请号:US10942664
申请日:2004-09-15
申请人: Eric T. Martin , Mark Hunter , Arthur Piehl , James R. Przybyla , Matthew Gelhaus , Leslie Louis Szepesi, Jr.
发明人: Eric T. Martin , Mark Hunter , Arthur Piehl , James R. Przybyla , Matthew Gelhaus , Leslie Louis Szepesi, Jr.
IPC分类号: H01H47/00
CPC分类号: G02B26/001 , G09G3/3466 , G09G2300/0809 , H01G5/16
摘要: A charge control circuit for controlling a micro-electromechanical system (MEMS) device having variable capacitor formed by first conductive plate and a second conductive plate separated by a variable gap distance. The charge control circuit comprises a switch circuit configured to receive a reference voltage having a selected voltage level and configured to respond to an enable signal having a duration at least as long as an electrical time constant constant of the MEMS device, but shorter than a mechanical time constant of the MEMS device, to apply the selected voltage level across the first and second plates for the duration to thereby cause a stored charge having a desired magnitude to accumulate on the variable capacitor, wherein the variable gap distance is a function of the magnitude of the stored charge.
摘要翻译: 一种用于控制具有由第一导电板形成的可变电容器和由可变间隙距离分开的第二导电板的微机电系统(MEMS)装置的充电控制电路。 充电控制电路包括开关电路,其被配置为接收具有所选电压电平的参考电压并且被配置为响应具有至少等于MEMS器件的电时间常数常数的持续时间的使能信号,但短于机械 时间常数,以在所述持续时间内在所述第一和第二板上施加所选择的电压电平,从而使具有期望幅度的存储电荷累积在所述可变电容器上,其中所述可变间隙距离是幅度的函数 的存储费用。
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