摘要:
A masked ion beam lithography (MIBL) system and method is disclosed which is considerably more compact and economical than prior ion implantation devices. An H.sup.+ ion beam is extracted from a source in the form of an angularly expanding beam, and is transmitted through two lenses that sequentially accelerate the ions to energies in the range of 200-300 keV. The first lens focuses the beam so that it emerges from a crossover point with an amplified angular divergence at least three times the divergence of the initial beam, thereby considerably reducing the necessary column length. The second lens collimates the beam so that it can be directed onto a mask to expose resist on an underlying semiconductor substrate. A series of extraction electrodes are used to provide an initial point source beam with a desired angular expansion, and a specially designed sector magnet is positioned between the extraction mechanism and the first lens to remove particles heavier than H.sup.+ from the beam. Voltage ratios across the lenses and extraction electrodes can be varied in tandem, permitting control over the final beam energy by a simple voltage adjustment. The beam is aligned with the column axis and then steered into alignment with the mask channeling axis by a pair of octupole lenses.
摘要翻译:公开了掩蔽离子束光刻(MIBL)系统和方法,其比先前的离子注入装置更紧凑和经济。 H +离子束以角度扩展的光束形式从光源中提取出来,并通过两个透镜传播,该透镜将离子依次加速到200-300keV范围内的能量。 第一透镜聚焦光束,使得其从具有放大的角度发散的交叉点出现至少是初始光束的发散的三倍,从而显着地减少必要的色谱柱长度。 第二透镜使光束准直,使得其可以被引导到掩模上以在下面的半导体衬底上曝光抗蚀剂。 一系列提取电极用于提供具有所需角度膨胀的初始点源光束,并且特殊设计的扇形磁体位于提取机构和第一透镜之间,以从光束去除比H +更重的颗粒。 透镜和引出电极之间的电压比可以串联变化,允许通过简单的电压调节来控制最终的束能量。 光束与列轴对准,然后通过一对八极透镜转向与掩模引导轴对准。
摘要:
A grain cart includes a wheel supported frame supporting a container having front and rear walls connected by an inclined left side wall and an inclined right side wall. An auger conveyor has a lower section having an inlet to receive grain from the container and an upper section pivotable between a storage position adjacent the container and an extended discharge position projecting laterally outwardly from the cart. A side wall extension panel is pivotally connected to the inclined right side wall of the container and is movable from a retracted position projecting above the right side wall and an inclined extended position projecting laterally outwardly from the right side wall beyond a right support wheel. A set of inclined brace members are pivotally connected to the extension panel and are adjustably connected to a corresponding set of horizontal tie members rigidly connecting the side walls of the container.
摘要:
A grain wagon includes a wheel supported frame on which is mounted a hopper or container for receiving grain, and the wagon is pulled by a tow vehicle or tractor. An inclined discharge conveyor or auger has a folding outer section which projects upwardly and forwardly and laterally outwardly from the container. The auger has a pivotal discharge spout and a pivotal internal baffle, and the spout is actuated by a double acting hydraulic cylinder controllable through hydraulic lines from the cab of the tractor so that the tractor operator may fully load and “top off” the grain within an adjacent semi-trailer as the tractor operator pulls the wagon along the length of the semi-trailer.
摘要:
A grain cart includes a wheel supported frame supporting a container having front and rear walls connected by an inclined left side wall and an inclined right side wall. An auger conveyor has a lower section having an inlet to receive grain from the container and an upper section pivotable between a storage position adjacent the container and an extended discharge position projecting laterally outwardly from the cart. A side wall extension panel is pivotally connected to the inclined right side wall of the container and is movable from a retracted position projecting above the right side wall and an inclined extended position projecting laterally outwardly from the right side wall beyond a right support wheel. A set of inclined brace members are pivotally connected to the extension panel and are adjustably connected to a corresponding set of horizontal tie members rigidly connecting the side walls of the container.
摘要:
A grain cart has a wheel supported frame on which is mounted an open top container having inclined bottom walls and including a single discharge auger conveyor having a lower section extending from a sump for the container adjacent a front left inclined corner portion of the container. The auger conveyor has an extended upper section supported by a hinge assembly having a pivot axis offset and askewed at an acute angle from the auger axis. The hinge assembly provides for pivoting the upper conveyor section between an inclined grain discharge position projecting upwardly, laterally outwardly and forwardly from the container and a stored position inclined downwardly at a substantial angle from the hinge assembly in front of the container. In the stored position, the grain discharge outlet is located lower than the top surfaces of the wheels.
摘要:
A grain wagon includes a wheel supported frame on which is mounted a hopper or container for receiving grain, and the wagon is pulled by a tow vehicle or tractor. An inclined discharge auger conveyor has an outer section which folds between a stored position and an operating position projecting upwardly and forwardly and laterally outwardly from the container. The outer auger section has a pivotal discharge spout with a pivotal internal baffle, and the spout is actuated by a double acting hydraulic cylinder controllable through hydraulic lines from the cab of the tractor so that the tractor operator may fully load and “top off” the grain within an adjacent semi-trailer as the tractor operator pulls the wagon along the side of the semi-trailer. In one embodiment, the outer section of the auger conveyor has an outer telescopic housing extension which carries the discharge spout and extends and retracts automatically with folding of the outer auger conveyor section.
摘要:
A grain cart has a wheel supported container with an inclined auger unloading conveyor having an inclined lower section positioned to receive grain from the container and an upper section supported for folding movement between a stored position adjacent the container and an inclined discharge position projecting upwardly, forwardly and laterally outwardly from the left side wall of the container. The upper section of the auger conveyor has a tubular housing with an askewed discharge spout supporting a pivotable flow control spout for tilting movement on a horizontal axis extending parallel to the left side wall of the container for discharge of grain laterally across an open top rectangular semi-trailer within a vertical plane perpendicular to the left side wall of the cart. The flow control spout is tilted by a remotely controlled actuator for filling and topping off the semi-trailer including all four corner portions of the trailer.
摘要:
A grain cart has a wheel supported frame on which is mounted an open top container having inclined bottom walls and including a single discharge auger conveyor having a lower section extending from a sump for the container adjacent a front left inclined corner portion of the container. The auger conveyor has an extended upper section supported by a hinge assembly having a pivot axis offset and askewed at an acute angle from the auger axis. The hinge assembly provides for pivoting the upper conveyor section between an inclined grain discharge position projecting upwardly, laterally outwardly and forwardly from the container and a stored position inclined downwardly at a substantial angle from the hinge assembly in front of the container. In the stored position, the grain discharge outlet is located lower than the top surfaces of the wheels and does not project laterally beyond the right side wall of the container.