Method for operating chemical mechanical polishing (“CMP”) tool for the manufacture of semiconductor devices
    1.
    发明授权
    Method for operating chemical mechanical polishing (“CMP”) tool for the manufacture of semiconductor devices 有权
    用于制造半导体器件的化学机械抛光(“CMP”)工具的方法

    公开(公告)号:US06852633B2

    公开(公告)日:2005-02-08

    申请号:US10796700

    申请日:2004-03-08

    摘要: A method for processing integrated circuit devices including a water recycling process. The method includes operating a chemical mechanical planarization process, which includes a discharge for process water. The process water is used to process one or more semiconductor wafers. The method also selectively discharges process water from the discharge. A step of transferring the process water from the chemical mechanical planarization process to a facility process is included. The method then uses the discharged water in the facility process.

    摘要翻译: 一种用于处理包括水循环处理的集成电路装置的方法。 该方法包括操作化学机械平面化工艺,其包括工艺用水的排放。 工艺用水用于处理一个或多个半导体晶片。 该方法还选择性地从排放物中排出工艺用水。 包括将处理水从化学机械平面化处理转移到设备过程的步骤。 然后,该方法在设施过程中使用排出的水。

    Rocker switch device
    3.
    发明授权
    Rocker switch device 有权
    摇臂开关装置

    公开(公告)号:US09129758B2

    公开(公告)日:2015-09-08

    申请号:US13451647

    申请日:2012-04-20

    申请人: Chien Hua Chen

    发明人: Chien Hua Chen

    摘要: Disclosed is a switch device including a housing, a plurality of components (including a conductive member, a conducting member, a switch member and an actuating member) accommodated in the housing, and a lid body disposed on the housing. Two vertical boards are disposed on a bottom portion of the housing, and a receiving space is formed in a middle part of the bottom portion. The conductive member has an electrode that is disposed on an upper side in the receiving space adjacent to the two vertical boards. A plurality of grooves are disposed on the bottom portion outside the two vertical boards. The switch member is disposed in the receiving space. A contact pad corresponding to the electrode is disposed between a bottom portion of the switch member and the actuating member at a top portion of the switch member, and is linearly aligned with the actuating member.

    摘要翻译: 公开了一种开关装置,包括壳体,容纳在壳体中的多个部件(包括导电部件,导电部件,开关部件和致动部件)以及设置在壳体上的盖体。 两个垂直板设置在壳体的底部,并且在底部的中间部分形成有容纳空间。 导电构件具有设置在与两个垂直板相邻的容纳空间中的上侧的电极。 多个凹槽设置在两个垂直板之外的底部上。 开关构件设置在容纳空间中。 对应于电极的接触垫设置在开关构件的底部和开关构件的顶部处的致动构件之间,并且与致动构件线性对准。

    Fan module and control device thereof
    4.
    发明授权
    Fan module and control device thereof 有权
    风扇模块及其控制装置

    公开(公告)号:US07271561B2

    公开(公告)日:2007-09-18

    申请号:US11391550

    申请日:2006-03-29

    IPC分类号: G05D23/24

    摘要: Fan module and control device thereof. The fan module comprises a plurality of fans and the control device. The control device comprises a temperature sensing circuit, and a driving circuit. The temperature sensing circuit detects an ambient temperature of the fans and generates a sensing signal accordingly. The driving circuit is coupled between the fans and temperature sensing circuit, and comprises a fully powered operating mode and a power-saving operating mode, wherein the driving circuit selects different operating modes in accordance with the sensing signal, and generates a fan driving signal controlling the speed of the fans.

    摘要翻译: 风扇模块及其控制装置。 风扇模块包括多个风扇和控制装置。 控制装置包括温度检测电路和驱动电路。 温度检测电路检测风扇的环境温度并相应地产生感测信号。 驱动电路耦合在风扇和温度检测电路之间,并且包括全功率工作模式和省电操作模式,其中驱动电路根据感测信号选择不同的工作模式,并产生风扇驱动信号控制 球迷的速度。